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Bibliographic details for US Patent Application 17862138. APPARATUS AND METHODS TO PROMOTE WAFER EDGE TEMPERATURE UNIFORMITY simplified abstract

Citation styles for US Patent Application 17862138. APPARATUS AND METHODS TO PROMOTE WAFER EDGE TEMPERATURE UNIFORMITY simplified abstract

APA style

US Patent Application 17862138. APPARATUS AND METHODS TO PROMOTE WAFER EDGE TEMPERATURE UNIFORMITY simplified abstract. (2023, November 11). WikiPatents, . Retrieved 05:58, June 21, 2024 from http://wikipatents.org/index.php?title=US_Patent_Application_17862138._APPARATUS_AND_METHODS_TO_PROMOTE_WAFER_EDGE_TEMPERATURE_UNIFORMITY_simplified_abstract&oldid=7611.

MLA style

"US Patent Application 17862138. APPARATUS AND METHODS TO PROMOTE WAFER EDGE TEMPERATURE UNIFORMITY simplified abstract." WikiPatents, . 11 Nov 2023, 14:56 UTC. 21 Jun 2024, 05:58 <http://wikipatents.org/index.php?title=US_Patent_Application_17862138._APPARATUS_AND_METHODS_TO_PROMOTE_WAFER_EDGE_TEMPERATURE_UNIFORMITY_simplified_abstract&oldid=7611>.

MHRA style

WikiPatents contributors, 'US Patent Application 17862138. APPARATUS AND METHODS TO PROMOTE WAFER EDGE TEMPERATURE UNIFORMITY simplified abstract', WikiPatents, , 11 November 2023, 14:56 UTC, <http://wikipatents.org/index.php?title=US_Patent_Application_17862138._APPARATUS_AND_METHODS_TO_PROMOTE_WAFER_EDGE_TEMPERATURE_UNIFORMITY_simplified_abstract&oldid=7611> [accessed 21 June 2024]

Chicago style

WikiPatents contributors, "US Patent Application 17862138. APPARATUS AND METHODS TO PROMOTE WAFER EDGE TEMPERATURE UNIFORMITY simplified abstract," WikiPatents, , http://wikipatents.org/index.php?title=US_Patent_Application_17862138._APPARATUS_AND_METHODS_TO_PROMOTE_WAFER_EDGE_TEMPERATURE_UNIFORMITY_simplified_abstract&oldid=7611 (accessed June 21, 2024).

CBE/CSE style

WikiPatents contributors. US Patent Application 17862138. APPARATUS AND METHODS TO PROMOTE WAFER EDGE TEMPERATURE UNIFORMITY simplified abstract [Internet]. WikiPatents, ; 2023 Nov 11, 14:56 UTC [cited 2024 Jun 21]. Available from: http://wikipatents.org/index.php?title=US_Patent_Application_17862138._APPARATUS_AND_METHODS_TO_PROMOTE_WAFER_EDGE_TEMPERATURE_UNIFORMITY_simplified_abstract&oldid=7611.

Bluebook style

US Patent Application 17862138. APPARATUS AND METHODS TO PROMOTE WAFER EDGE TEMPERATURE UNIFORMITY simplified abstract, http://wikipatents.org/index.php?title=US_Patent_Application_17862138._APPARATUS_AND_METHODS_TO_PROMOTE_WAFER_EDGE_TEMPERATURE_UNIFORMITY_simplified_abstract&oldid=7611 (last visited June 21, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "US Patent Application 17862138. APPARATUS AND METHODS TO PROMOTE WAFER EDGE TEMPERATURE UNIFORMITY simplified abstract --- WikiPatents{,} ",
   year = "2023",
   url = "http://wikipatents.org/index.php?title=US_Patent_Application_17862138._APPARATUS_AND_METHODS_TO_PROMOTE_WAFER_EDGE_TEMPERATURE_UNIFORMITY_simplified_abstract&oldid=7611",
   note = "[Online; accessed 21-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "US Patent Application 17862138. APPARATUS AND METHODS TO PROMOTE WAFER EDGE TEMPERATURE UNIFORMITY simplified abstract --- WikiPatents{,} ",
   year = "2023",
   url = "\url{http://wikipatents.org/index.php?title=US_Patent_Application_17862138._APPARATUS_AND_METHODS_TO_PROMOTE_WAFER_EDGE_TEMPERATURE_UNIFORMITY_simplified_abstract&oldid=7611}",
   note = "[Online; accessed 21-June-2024]"
 }


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