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Bibliographic details for US Patent Application 18213294. PROCESSING SYSTEM, PROCESSING METHOD, MEASUREMENT APPARATUS, SUBSTRATE PROCESSING APPARATUS AND ARTICLE MANUFACTURING METHOD simplified abstract

Citation styles for US Patent Application 18213294. PROCESSING SYSTEM, PROCESSING METHOD, MEASUREMENT APPARATUS, SUBSTRATE PROCESSING APPARATUS AND ARTICLE MANUFACTURING METHOD simplified abstract

APA style

US Patent Application 18213294. PROCESSING SYSTEM, PROCESSING METHOD, MEASUREMENT APPARATUS, SUBSTRATE PROCESSING APPARATUS AND ARTICLE MANUFACTURING METHOD simplified abstract. (2023, November 10). WikiPatents, . Retrieved 02:06, June 23, 2024 from http://wikipatents.org/index.php?title=US_Patent_Application_18213294._PROCESSING_SYSTEM,_PROCESSING_METHOD,_MEASUREMENT_APPARATUS,_SUBSTRATE_PROCESSING_APPARATUS_AND_ARTICLE_MANUFACTURING_METHOD_simplified_abstract&oldid=7471.

MLA style

"US Patent Application 18213294. PROCESSING SYSTEM, PROCESSING METHOD, MEASUREMENT APPARATUS, SUBSTRATE PROCESSING APPARATUS AND ARTICLE MANUFACTURING METHOD simplified abstract." WikiPatents, . 10 Nov 2023, 17:29 UTC. 23 Jun 2024, 02:06 <http://wikipatents.org/index.php?title=US_Patent_Application_18213294._PROCESSING_SYSTEM,_PROCESSING_METHOD,_MEASUREMENT_APPARATUS,_SUBSTRATE_PROCESSING_APPARATUS_AND_ARTICLE_MANUFACTURING_METHOD_simplified_abstract&oldid=7471>.

MHRA style

WikiPatents contributors, 'US Patent Application 18213294. PROCESSING SYSTEM, PROCESSING METHOD, MEASUREMENT APPARATUS, SUBSTRATE PROCESSING APPARATUS AND ARTICLE MANUFACTURING METHOD simplified abstract', WikiPatents, , 10 November 2023, 17:29 UTC, <http://wikipatents.org/index.php?title=US_Patent_Application_18213294._PROCESSING_SYSTEM,_PROCESSING_METHOD,_MEASUREMENT_APPARATUS,_SUBSTRATE_PROCESSING_APPARATUS_AND_ARTICLE_MANUFACTURING_METHOD_simplified_abstract&oldid=7471> [accessed 23 June 2024]

Chicago style

WikiPatents contributors, "US Patent Application 18213294. PROCESSING SYSTEM, PROCESSING METHOD, MEASUREMENT APPARATUS, SUBSTRATE PROCESSING APPARATUS AND ARTICLE MANUFACTURING METHOD simplified abstract," WikiPatents, , http://wikipatents.org/index.php?title=US_Patent_Application_18213294._PROCESSING_SYSTEM,_PROCESSING_METHOD,_MEASUREMENT_APPARATUS,_SUBSTRATE_PROCESSING_APPARATUS_AND_ARTICLE_MANUFACTURING_METHOD_simplified_abstract&oldid=7471 (accessed June 23, 2024).

CBE/CSE style

WikiPatents contributors. US Patent Application 18213294. PROCESSING SYSTEM, PROCESSING METHOD, MEASUREMENT APPARATUS, SUBSTRATE PROCESSING APPARATUS AND ARTICLE MANUFACTURING METHOD simplified abstract [Internet]. WikiPatents, ; 2023 Nov 10, 17:29 UTC [cited 2024 Jun 23]. Available from: http://wikipatents.org/index.php?title=US_Patent_Application_18213294._PROCESSING_SYSTEM,_PROCESSING_METHOD,_MEASUREMENT_APPARATUS,_SUBSTRATE_PROCESSING_APPARATUS_AND_ARTICLE_MANUFACTURING_METHOD_simplified_abstract&oldid=7471.

Bluebook style

US Patent Application 18213294. PROCESSING SYSTEM, PROCESSING METHOD, MEASUREMENT APPARATUS, SUBSTRATE PROCESSING APPARATUS AND ARTICLE MANUFACTURING METHOD simplified abstract, http://wikipatents.org/index.php?title=US_Patent_Application_18213294._PROCESSING_SYSTEM,_PROCESSING_METHOD,_MEASUREMENT_APPARATUS,_SUBSTRATE_PROCESSING_APPARATUS_AND_ARTICLE_MANUFACTURING_METHOD_simplified_abstract&oldid=7471 (last visited June 23, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "US Patent Application 18213294. PROCESSING SYSTEM, PROCESSING METHOD, MEASUREMENT APPARATUS, SUBSTRATE PROCESSING APPARATUS AND ARTICLE MANUFACTURING METHOD simplified abstract --- WikiPatents{,} ",
   year = "2023",
   url = "http://wikipatents.org/index.php?title=US_Patent_Application_18213294._PROCESSING_SYSTEM,_PROCESSING_METHOD,_MEASUREMENT_APPARATUS,_SUBSTRATE_PROCESSING_APPARATUS_AND_ARTICLE_MANUFACTURING_METHOD_simplified_abstract&oldid=7471",
   note = "[Online; accessed 23-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "US Patent Application 18213294. PROCESSING SYSTEM, PROCESSING METHOD, MEASUREMENT APPARATUS, SUBSTRATE PROCESSING APPARATUS AND ARTICLE MANUFACTURING METHOD simplified abstract --- WikiPatents{,} ",
   year = "2023",
   url = "\url{http://wikipatents.org/index.php?title=US_Patent_Application_18213294._PROCESSING_SYSTEM,_PROCESSING_METHOD,_MEASUREMENT_APPARATUS,_SUBSTRATE_PROCESSING_APPARATUS_AND_ARTICLE_MANUFACTURING_METHOD_simplified_abstract&oldid=7471}",
   note = "[Online; accessed 23-June-2024]"
 }


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