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Bibliographic details for 18585466. SUBSTRATE PROCESSING APPARATUS, MODEL DATA GENERATION APPARATUS, SUBSTRATE PROCESSING METHOD, AND MODEL DATA GENERATION METHOD simplified abstract (Tokyo Electron Limited)

Citation styles for 18585466. SUBSTRATE PROCESSING APPARATUS, MODEL DATA GENERATION APPARATUS, SUBSTRATE PROCESSING METHOD, AND MODEL DATA GENERATION METHOD simplified abstract (Tokyo Electron Limited)

APA style

18585466. SUBSTRATE PROCESSING APPARATUS, MODEL DATA GENERATION APPARATUS, SUBSTRATE PROCESSING METHOD, AND MODEL DATA GENERATION METHOD simplified abstract (Tokyo Electron Limited). (2024, June 14). WikiPatents, . Retrieved 05:50, June 29, 2024 from http://wikipatents.org/index.php?title=18585466._SUBSTRATE_PROCESSING_APPARATUS,_MODEL_DATA_GENERATION_APPARATUS,_SUBSTRATE_PROCESSING_METHOD,_AND_MODEL_DATA_GENERATION_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=74479.

MLA style

"18585466. SUBSTRATE PROCESSING APPARATUS, MODEL DATA GENERATION APPARATUS, SUBSTRATE PROCESSING METHOD, AND MODEL DATA GENERATION METHOD simplified abstract (Tokyo Electron Limited)." WikiPatents, . 14 Jun 2024, 08:36 UTC. 29 Jun 2024, 05:50 <http://wikipatents.org/index.php?title=18585466._SUBSTRATE_PROCESSING_APPARATUS,_MODEL_DATA_GENERATION_APPARATUS,_SUBSTRATE_PROCESSING_METHOD,_AND_MODEL_DATA_GENERATION_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=74479>.

MHRA style

WikiPatents contributors, '18585466. SUBSTRATE PROCESSING APPARATUS, MODEL DATA GENERATION APPARATUS, SUBSTRATE PROCESSING METHOD, AND MODEL DATA GENERATION METHOD simplified abstract (Tokyo Electron Limited)', WikiPatents, , 14 June 2024, 08:36 UTC, <http://wikipatents.org/index.php?title=18585466._SUBSTRATE_PROCESSING_APPARATUS,_MODEL_DATA_GENERATION_APPARATUS,_SUBSTRATE_PROCESSING_METHOD,_AND_MODEL_DATA_GENERATION_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=74479> [accessed 29 June 2024]

Chicago style

WikiPatents contributors, "18585466. SUBSTRATE PROCESSING APPARATUS, MODEL DATA GENERATION APPARATUS, SUBSTRATE PROCESSING METHOD, AND MODEL DATA GENERATION METHOD simplified abstract (Tokyo Electron Limited)," WikiPatents, , http://wikipatents.org/index.php?title=18585466._SUBSTRATE_PROCESSING_APPARATUS,_MODEL_DATA_GENERATION_APPARATUS,_SUBSTRATE_PROCESSING_METHOD,_AND_MODEL_DATA_GENERATION_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=74479 (accessed June 29, 2024).

CBE/CSE style

WikiPatents contributors. 18585466. SUBSTRATE PROCESSING APPARATUS, MODEL DATA GENERATION APPARATUS, SUBSTRATE PROCESSING METHOD, AND MODEL DATA GENERATION METHOD simplified abstract (Tokyo Electron Limited) [Internet]. WikiPatents, ; 2024 Jun 14, 08:36 UTC [cited 2024 Jun 29]. Available from: http://wikipatents.org/index.php?title=18585466._SUBSTRATE_PROCESSING_APPARATUS,_MODEL_DATA_GENERATION_APPARATUS,_SUBSTRATE_PROCESSING_METHOD,_AND_MODEL_DATA_GENERATION_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=74479.

Bluebook style

18585466. SUBSTRATE PROCESSING APPARATUS, MODEL DATA GENERATION APPARATUS, SUBSTRATE PROCESSING METHOD, AND MODEL DATA GENERATION METHOD simplified abstract (Tokyo Electron Limited), http://wikipatents.org/index.php?title=18585466._SUBSTRATE_PROCESSING_APPARATUS,_MODEL_DATA_GENERATION_APPARATUS,_SUBSTRATE_PROCESSING_METHOD,_AND_MODEL_DATA_GENERATION_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=74479 (last visited June 29, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18585466. SUBSTRATE PROCESSING APPARATUS, MODEL DATA GENERATION APPARATUS, SUBSTRATE PROCESSING METHOD, AND MODEL DATA GENERATION METHOD simplified abstract (Tokyo Electron Limited) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=18585466._SUBSTRATE_PROCESSING_APPARATUS,_MODEL_DATA_GENERATION_APPARATUS,_SUBSTRATE_PROCESSING_METHOD,_AND_MODEL_DATA_GENERATION_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=74479",
   note = "[Online; accessed 29-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18585466. SUBSTRATE PROCESSING APPARATUS, MODEL DATA GENERATION APPARATUS, SUBSTRATE PROCESSING METHOD, AND MODEL DATA GENERATION METHOD simplified abstract (Tokyo Electron Limited) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=18585466._SUBSTRATE_PROCESSING_APPARATUS,_MODEL_DATA_GENERATION_APPARATUS,_SUBSTRATE_PROCESSING_METHOD,_AND_MODEL_DATA_GENERATION_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=74479}",
   note = "[Online; accessed 29-June-2024]"
 }


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