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Bibliographic details for 18529057. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (Tokyo Electron Limited)
- Page name: 18529057. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (Tokyo Electron Limited)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 14 June 2024 08:36 UTC
- Date retrieved: 29 June 2024 06:05 UTC
- Permanent URL: http://wikipatents.org/index.php?title=18529057._SUBSTRATE_PROCESSING_APPARATUS_AND_SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=74477
- Page Version ID: 74477
Citation styles for 18529057. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (Tokyo Electron Limited)
APA style
18529057. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (Tokyo Electron Limited). (2024, June 14). WikiPatents, . Retrieved 06:05, June 29, 2024 from http://wikipatents.org/index.php?title=18529057._SUBSTRATE_PROCESSING_APPARATUS_AND_SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=74477.
MLA style
"18529057. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (Tokyo Electron Limited)." WikiPatents, . 14 Jun 2024, 08:36 UTC. 29 Jun 2024, 06:05 <http://wikipatents.org/index.php?title=18529057._SUBSTRATE_PROCESSING_APPARATUS_AND_SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=74477>.
MHRA style
WikiPatents contributors, '18529057. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (Tokyo Electron Limited)', WikiPatents, , 14 June 2024, 08:36 UTC, <http://wikipatents.org/index.php?title=18529057._SUBSTRATE_PROCESSING_APPARATUS_AND_SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=74477> [accessed 29 June 2024]
Chicago style
WikiPatents contributors, "18529057. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (Tokyo Electron Limited)," WikiPatents, , http://wikipatents.org/index.php?title=18529057._SUBSTRATE_PROCESSING_APPARATUS_AND_SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=74477 (accessed June 29, 2024).
CBE/CSE style
WikiPatents contributors. 18529057. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (Tokyo Electron Limited) [Internet]. WikiPatents, ; 2024 Jun 14, 08:36 UTC [cited 2024 Jun 29]. Available from: http://wikipatents.org/index.php?title=18529057._SUBSTRATE_PROCESSING_APPARATUS_AND_SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=74477.
Bluebook style
18529057. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (Tokyo Electron Limited), http://wikipatents.org/index.php?title=18529057._SUBSTRATE_PROCESSING_APPARATUS_AND_SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=74477 (last visited June 29, 2024).
BibTeX entry
@misc{ wiki:xxx,
author = "WikiPatents",
title = "18529057. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (Tokyo Electron Limited) --- WikiPatents{,} ",
year = "2024",
url = "http://wikipatents.org/index.php?title=18529057._SUBSTRATE_PROCESSING_APPARATUS_AND_SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=74477",
note = "[Online; accessed 29-June-2024]"
}
When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx,
author = "WikiPatents",
title = "18529057. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (Tokyo Electron Limited) --- WikiPatents{,} ",
year = "2024",
url = "\url{http://wikipatents.org/index.php?title=18529057._SUBSTRATE_PROCESSING_APPARATUS_AND_SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=74477}",
note = "[Online; accessed 29-June-2024]"
}
