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Bibliographic details for 18416880. PROCESSING METHOD AND PLASMA PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited)
- Page name: 18416880. PROCESSING METHOD AND PLASMA PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 14 June 2024 08:36 UTC
- Date retrieved: 5 July 2024 17:00 UTC
- Permanent URL: http://wikipatents.org/index.php?title=18416880._PROCESSING_METHOD_AND_PLASMA_PROCESSING_APPARATUS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=74474
- Page Version ID: 74474
Citation styles for 18416880. PROCESSING METHOD AND PLASMA PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited)
APA style
18416880. PROCESSING METHOD AND PLASMA PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited). (2024, June 14). WikiPatents, . Retrieved 17:00, July 5, 2024 from http://wikipatents.org/index.php?title=18416880._PROCESSING_METHOD_AND_PLASMA_PROCESSING_APPARATUS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=74474.
MLA style
"18416880. PROCESSING METHOD AND PLASMA PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited)." WikiPatents, . 14 Jun 2024, 08:36 UTC. 5 Jul 2024, 17:00 <http://wikipatents.org/index.php?title=18416880._PROCESSING_METHOD_AND_PLASMA_PROCESSING_APPARATUS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=74474>.
MHRA style
WikiPatents contributors, '18416880. PROCESSING METHOD AND PLASMA PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited)', WikiPatents, , 14 June 2024, 08:36 UTC, <http://wikipatents.org/index.php?title=18416880._PROCESSING_METHOD_AND_PLASMA_PROCESSING_APPARATUS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=74474> [accessed 5 July 2024]
Chicago style
WikiPatents contributors, "18416880. PROCESSING METHOD AND PLASMA PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited)," WikiPatents, , http://wikipatents.org/index.php?title=18416880._PROCESSING_METHOD_AND_PLASMA_PROCESSING_APPARATUS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=74474 (accessed July 5, 2024).
CBE/CSE style
WikiPatents contributors. 18416880. PROCESSING METHOD AND PLASMA PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited) [Internet]. WikiPatents, ; 2024 Jun 14, 08:36 UTC [cited 2024 Jul 5]. Available from: http://wikipatents.org/index.php?title=18416880._PROCESSING_METHOD_AND_PLASMA_PROCESSING_APPARATUS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=74474.
Bluebook style
18416880. PROCESSING METHOD AND PLASMA PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited), http://wikipatents.org/index.php?title=18416880._PROCESSING_METHOD_AND_PLASMA_PROCESSING_APPARATUS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=74474 (last visited July 5, 2024).
BibTeX entry
@misc{ wiki:xxx,
author = "WikiPatents",
title = "18416880. PROCESSING METHOD AND PLASMA PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited) --- WikiPatents{,} ",
year = "2024",
url = "http://wikipatents.org/index.php?title=18416880._PROCESSING_METHOD_AND_PLASMA_PROCESSING_APPARATUS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=74474",
note = "[Online; accessed 5-July-2024]"
}
When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx,
author = "WikiPatents",
title = "18416880. PROCESSING METHOD AND PLASMA PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited) --- WikiPatents{,} ",
year = "2024",
url = "\url{http://wikipatents.org/index.php?title=18416880._PROCESSING_METHOD_AND_PLASMA_PROCESSING_APPARATUS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=74474}",
note = "[Online; accessed 5-July-2024]"
}
