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Bibliographic details for 18552108. SUBSTRATE LIQUID-TREATMENT DEVICE simplified abstract (Tokyo Electron Limited)
- Page name: 18552108. SUBSTRATE LIQUID-TREATMENT DEVICE simplified abstract (Tokyo Electron Limited)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 14 June 2024 08:35 UTC
- Date retrieved: 29 June 2024 05:31 UTC
- Permanent URL: http://wikipatents.org/index.php?title=18552108._SUBSTRATE_LIQUID-TREATMENT_DEVICE_simplified_abstract_(Tokyo_Electron_Limited)&oldid=74468
- Page Version ID: 74468
Citation styles for 18552108. SUBSTRATE LIQUID-TREATMENT DEVICE simplified abstract (Tokyo Electron Limited)
APA style
18552108. SUBSTRATE LIQUID-TREATMENT DEVICE simplified abstract (Tokyo Electron Limited). (2024, June 14). WikiPatents, . Retrieved 05:31, June 29, 2024 from http://wikipatents.org/index.php?title=18552108._SUBSTRATE_LIQUID-TREATMENT_DEVICE_simplified_abstract_(Tokyo_Electron_Limited)&oldid=74468.
MLA style
"18552108. SUBSTRATE LIQUID-TREATMENT DEVICE simplified abstract (Tokyo Electron Limited)." WikiPatents, . 14 Jun 2024, 08:35 UTC. 29 Jun 2024, 05:31 <http://wikipatents.org/index.php?title=18552108._SUBSTRATE_LIQUID-TREATMENT_DEVICE_simplified_abstract_(Tokyo_Electron_Limited)&oldid=74468>.
MHRA style
WikiPatents contributors, '18552108. SUBSTRATE LIQUID-TREATMENT DEVICE simplified abstract (Tokyo Electron Limited)', WikiPatents, , 14 June 2024, 08:35 UTC, <http://wikipatents.org/index.php?title=18552108._SUBSTRATE_LIQUID-TREATMENT_DEVICE_simplified_abstract_(Tokyo_Electron_Limited)&oldid=74468> [accessed 29 June 2024]
Chicago style
WikiPatents contributors, "18552108. SUBSTRATE LIQUID-TREATMENT DEVICE simplified abstract (Tokyo Electron Limited)," WikiPatents, , http://wikipatents.org/index.php?title=18552108._SUBSTRATE_LIQUID-TREATMENT_DEVICE_simplified_abstract_(Tokyo_Electron_Limited)&oldid=74468 (accessed June 29, 2024).
CBE/CSE style
WikiPatents contributors. 18552108. SUBSTRATE LIQUID-TREATMENT DEVICE simplified abstract (Tokyo Electron Limited) [Internet]. WikiPatents, ; 2024 Jun 14, 08:35 UTC [cited 2024 Jun 29]. Available from: http://wikipatents.org/index.php?title=18552108._SUBSTRATE_LIQUID-TREATMENT_DEVICE_simplified_abstract_(Tokyo_Electron_Limited)&oldid=74468.
Bluebook style
18552108. SUBSTRATE LIQUID-TREATMENT DEVICE simplified abstract (Tokyo Electron Limited), http://wikipatents.org/index.php?title=18552108._SUBSTRATE_LIQUID-TREATMENT_DEVICE_simplified_abstract_(Tokyo_Electron_Limited)&oldid=74468 (last visited June 29, 2024).
BibTeX entry
@misc{ wiki:xxx,
author = "WikiPatents",
title = "18552108. SUBSTRATE LIQUID-TREATMENT DEVICE simplified abstract (Tokyo Electron Limited) --- WikiPatents{,} ",
year = "2024",
url = "http://wikipatents.org/index.php?title=18552108._SUBSTRATE_LIQUID-TREATMENT_DEVICE_simplified_abstract_(Tokyo_Electron_Limited)&oldid=74468",
note = "[Online; accessed 29-June-2024]"
}
When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx,
author = "WikiPatents",
title = "18552108. SUBSTRATE LIQUID-TREATMENT DEVICE simplified abstract (Tokyo Electron Limited) --- WikiPatents{,} ",
year = "2024",
url = "\url{http://wikipatents.org/index.php?title=18552108._SUBSTRATE_LIQUID-TREATMENT_DEVICE_simplified_abstract_(Tokyo_Electron_Limited)&oldid=74468}",
note = "[Online; accessed 29-June-2024]"
}
