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Bibliographic details for 18555432. GAS SUPPLY SYSTEM, SUBSTRATE PROCESSING APPARATUS, AND OPERATION METHOD FOR GAS SUPPLY SYSTEM simplified abstract (Tokyo Electron Limited)

Citation styles for 18555432. GAS SUPPLY SYSTEM, SUBSTRATE PROCESSING APPARATUS, AND OPERATION METHOD FOR GAS SUPPLY SYSTEM simplified abstract (Tokyo Electron Limited)

APA style

18555432. GAS SUPPLY SYSTEM, SUBSTRATE PROCESSING APPARATUS, AND OPERATION METHOD FOR GAS SUPPLY SYSTEM simplified abstract (Tokyo Electron Limited). (2024, June 14). WikiPatents, . Retrieved 09:17, June 27, 2024 from http://wikipatents.org/index.php?title=18555432._GAS_SUPPLY_SYSTEM,_SUBSTRATE_PROCESSING_APPARATUS,_AND_OPERATION_METHOD_FOR_GAS_SUPPLY_SYSTEM_simplified_abstract_(Tokyo_Electron_Limited)&oldid=74465.

MLA style

"18555432. GAS SUPPLY SYSTEM, SUBSTRATE PROCESSING APPARATUS, AND OPERATION METHOD FOR GAS SUPPLY SYSTEM simplified abstract (Tokyo Electron Limited)." WikiPatents, . 14 Jun 2024, 08:35 UTC. 27 Jun 2024, 09:17 <http://wikipatents.org/index.php?title=18555432._GAS_SUPPLY_SYSTEM,_SUBSTRATE_PROCESSING_APPARATUS,_AND_OPERATION_METHOD_FOR_GAS_SUPPLY_SYSTEM_simplified_abstract_(Tokyo_Electron_Limited)&oldid=74465>.

MHRA style

WikiPatents contributors, '18555432. GAS SUPPLY SYSTEM, SUBSTRATE PROCESSING APPARATUS, AND OPERATION METHOD FOR GAS SUPPLY SYSTEM simplified abstract (Tokyo Electron Limited)', WikiPatents, , 14 June 2024, 08:35 UTC, <http://wikipatents.org/index.php?title=18555432._GAS_SUPPLY_SYSTEM,_SUBSTRATE_PROCESSING_APPARATUS,_AND_OPERATION_METHOD_FOR_GAS_SUPPLY_SYSTEM_simplified_abstract_(Tokyo_Electron_Limited)&oldid=74465> [accessed 27 June 2024]

Chicago style

WikiPatents contributors, "18555432. GAS SUPPLY SYSTEM, SUBSTRATE PROCESSING APPARATUS, AND OPERATION METHOD FOR GAS SUPPLY SYSTEM simplified abstract (Tokyo Electron Limited)," WikiPatents, , http://wikipatents.org/index.php?title=18555432._GAS_SUPPLY_SYSTEM,_SUBSTRATE_PROCESSING_APPARATUS,_AND_OPERATION_METHOD_FOR_GAS_SUPPLY_SYSTEM_simplified_abstract_(Tokyo_Electron_Limited)&oldid=74465 (accessed June 27, 2024).

CBE/CSE style

WikiPatents contributors. 18555432. GAS SUPPLY SYSTEM, SUBSTRATE PROCESSING APPARATUS, AND OPERATION METHOD FOR GAS SUPPLY SYSTEM simplified abstract (Tokyo Electron Limited) [Internet]. WikiPatents, ; 2024 Jun 14, 08:35 UTC [cited 2024 Jun 27]. Available from: http://wikipatents.org/index.php?title=18555432._GAS_SUPPLY_SYSTEM,_SUBSTRATE_PROCESSING_APPARATUS,_AND_OPERATION_METHOD_FOR_GAS_SUPPLY_SYSTEM_simplified_abstract_(Tokyo_Electron_Limited)&oldid=74465.

Bluebook style

18555432. GAS SUPPLY SYSTEM, SUBSTRATE PROCESSING APPARATUS, AND OPERATION METHOD FOR GAS SUPPLY SYSTEM simplified abstract (Tokyo Electron Limited), http://wikipatents.org/index.php?title=18555432._GAS_SUPPLY_SYSTEM,_SUBSTRATE_PROCESSING_APPARATUS,_AND_OPERATION_METHOD_FOR_GAS_SUPPLY_SYSTEM_simplified_abstract_(Tokyo_Electron_Limited)&oldid=74465 (last visited June 27, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18555432. GAS SUPPLY SYSTEM, SUBSTRATE PROCESSING APPARATUS, AND OPERATION METHOD FOR GAS SUPPLY SYSTEM simplified abstract (Tokyo Electron Limited) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=18555432._GAS_SUPPLY_SYSTEM,_SUBSTRATE_PROCESSING_APPARATUS,_AND_OPERATION_METHOD_FOR_GAS_SUPPLY_SYSTEM_simplified_abstract_(Tokyo_Electron_Limited)&oldid=74465",
   note = "[Online; accessed 27-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18555432. GAS SUPPLY SYSTEM, SUBSTRATE PROCESSING APPARATUS, AND OPERATION METHOD FOR GAS SUPPLY SYSTEM simplified abstract (Tokyo Electron Limited) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=18555432._GAS_SUPPLY_SYSTEM,_SUBSTRATE_PROCESSING_APPARATUS,_AND_OPERATION_METHOD_FOR_GAS_SUPPLY_SYSTEM_simplified_abstract_(Tokyo_Electron_Limited)&oldid=74465}",
   note = "[Online; accessed 27-June-2024]"
 }


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