Cite This Page
Bibliographic details for 18522825. PRECOAT METHOD FOR SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited)
- Page name: 18522825. PRECOAT METHOD FOR SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 14 June 2024 08:35 UTC
- Date retrieved: 28 June 2024 01:54 UTC
- Permanent URL: http://wikipatents.org/index.php?title=18522825._PRECOAT_METHOD_FOR_SUBSTRATE_PROCESSING_APPARATUS_AND_SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=74464
- Page Version ID: 74464
Citation styles for 18522825. PRECOAT METHOD FOR SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited)
APA style
18522825. PRECOAT METHOD FOR SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited). (2024, June 14). WikiPatents, . Retrieved 01:54, June 28, 2024 from http://wikipatents.org/index.php?title=18522825._PRECOAT_METHOD_FOR_SUBSTRATE_PROCESSING_APPARATUS_AND_SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=74464.
MLA style
"18522825. PRECOAT METHOD FOR SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited)." WikiPatents, . 14 Jun 2024, 08:35 UTC. 28 Jun 2024, 01:54 <http://wikipatents.org/index.php?title=18522825._PRECOAT_METHOD_FOR_SUBSTRATE_PROCESSING_APPARATUS_AND_SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=74464>.
MHRA style
WikiPatents contributors, '18522825. PRECOAT METHOD FOR SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited)', WikiPatents, , 14 June 2024, 08:35 UTC, <http://wikipatents.org/index.php?title=18522825._PRECOAT_METHOD_FOR_SUBSTRATE_PROCESSING_APPARATUS_AND_SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=74464> [accessed 28 June 2024]
Chicago style
WikiPatents contributors, "18522825. PRECOAT METHOD FOR SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited)," WikiPatents, , http://wikipatents.org/index.php?title=18522825._PRECOAT_METHOD_FOR_SUBSTRATE_PROCESSING_APPARATUS_AND_SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=74464 (accessed June 28, 2024).
CBE/CSE style
WikiPatents contributors. 18522825. PRECOAT METHOD FOR SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited) [Internet]. WikiPatents, ; 2024 Jun 14, 08:35 UTC [cited 2024 Jun 28]. Available from: http://wikipatents.org/index.php?title=18522825._PRECOAT_METHOD_FOR_SUBSTRATE_PROCESSING_APPARATUS_AND_SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=74464.
Bluebook style
18522825. PRECOAT METHOD FOR SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited), http://wikipatents.org/index.php?title=18522825._PRECOAT_METHOD_FOR_SUBSTRATE_PROCESSING_APPARATUS_AND_SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=74464 (last visited June 28, 2024).
BibTeX entry
@misc{ wiki:xxx,
author = "WikiPatents",
title = "18522825. PRECOAT METHOD FOR SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited) --- WikiPatents{,} ",
year = "2024",
url = "http://wikipatents.org/index.php?title=18522825._PRECOAT_METHOD_FOR_SUBSTRATE_PROCESSING_APPARATUS_AND_SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=74464",
note = "[Online; accessed 28-June-2024]"
}
When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx,
author = "WikiPatents",
title = "18522825. PRECOAT METHOD FOR SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited) --- WikiPatents{,} ",
year = "2024",
url = "\url{http://wikipatents.org/index.php?title=18522825._PRECOAT_METHOD_FOR_SUBSTRATE_PROCESSING_APPARATUS_AND_SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=74464}",
note = "[Online; accessed 28-June-2024]"
}
