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Bibliographic details for 18582746. SELECTIVE DEPOSITION OF A PROTECTIVE LAYER TO REDUCE INTERCONNECT STRUCTURE CRITICAL DIMENSIONS simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)

Citation styles for 18582746. SELECTIVE DEPOSITION OF A PROTECTIVE LAYER TO REDUCE INTERCONNECT STRUCTURE CRITICAL DIMENSIONS simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)

APA style

18582746. SELECTIVE DEPOSITION OF A PROTECTIVE LAYER TO REDUCE INTERCONNECT STRUCTURE CRITICAL DIMENSIONS simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.). (2024, June 14). WikiPatents, . Retrieved 15:53, June 30, 2024 from http://wikipatents.org/index.php?title=18582746._SELECTIVE_DEPOSITION_OF_A_PROTECTIVE_LAYER_TO_REDUCE_INTERCONNECT_STRUCTURE_CRITICAL_DIMENSIONS_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=73394.

MLA style

"18582746. SELECTIVE DEPOSITION OF A PROTECTIVE LAYER TO REDUCE INTERCONNECT STRUCTURE CRITICAL DIMENSIONS simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)." WikiPatents, . 14 Jun 2024, 06:29 UTC. 30 Jun 2024, 15:53 <http://wikipatents.org/index.php?title=18582746._SELECTIVE_DEPOSITION_OF_A_PROTECTIVE_LAYER_TO_REDUCE_INTERCONNECT_STRUCTURE_CRITICAL_DIMENSIONS_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=73394>.

MHRA style

WikiPatents contributors, '18582746. SELECTIVE DEPOSITION OF A PROTECTIVE LAYER TO REDUCE INTERCONNECT STRUCTURE CRITICAL DIMENSIONS simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)', WikiPatents, , 14 June 2024, 06:29 UTC, <http://wikipatents.org/index.php?title=18582746._SELECTIVE_DEPOSITION_OF_A_PROTECTIVE_LAYER_TO_REDUCE_INTERCONNECT_STRUCTURE_CRITICAL_DIMENSIONS_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=73394> [accessed 30 June 2024]

Chicago style

WikiPatents contributors, "18582746. SELECTIVE DEPOSITION OF A PROTECTIVE LAYER TO REDUCE INTERCONNECT STRUCTURE CRITICAL DIMENSIONS simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)," WikiPatents, , http://wikipatents.org/index.php?title=18582746._SELECTIVE_DEPOSITION_OF_A_PROTECTIVE_LAYER_TO_REDUCE_INTERCONNECT_STRUCTURE_CRITICAL_DIMENSIONS_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=73394 (accessed June 30, 2024).

CBE/CSE style

WikiPatents contributors. 18582746. SELECTIVE DEPOSITION OF A PROTECTIVE LAYER TO REDUCE INTERCONNECT STRUCTURE CRITICAL DIMENSIONS simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.) [Internet]. WikiPatents, ; 2024 Jun 14, 06:29 UTC [cited 2024 Jun 30]. Available from: http://wikipatents.org/index.php?title=18582746._SELECTIVE_DEPOSITION_OF_A_PROTECTIVE_LAYER_TO_REDUCE_INTERCONNECT_STRUCTURE_CRITICAL_DIMENSIONS_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=73394.

Bluebook style

18582746. SELECTIVE DEPOSITION OF A PROTECTIVE LAYER TO REDUCE INTERCONNECT STRUCTURE CRITICAL DIMENSIONS simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.), http://wikipatents.org/index.php?title=18582746._SELECTIVE_DEPOSITION_OF_A_PROTECTIVE_LAYER_TO_REDUCE_INTERCONNECT_STRUCTURE_CRITICAL_DIMENSIONS_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=73394 (last visited June 30, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18582746. SELECTIVE DEPOSITION OF A PROTECTIVE LAYER TO REDUCE INTERCONNECT STRUCTURE CRITICAL DIMENSIONS simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=18582746._SELECTIVE_DEPOSITION_OF_A_PROTECTIVE_LAYER_TO_REDUCE_INTERCONNECT_STRUCTURE_CRITICAL_DIMENSIONS_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=73394",
   note = "[Online; accessed 30-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18582746. SELECTIVE DEPOSITION OF A PROTECTIVE LAYER TO REDUCE INTERCONNECT STRUCTURE CRITICAL DIMENSIONS simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=18582746._SELECTIVE_DEPOSITION_OF_A_PROTECTIVE_LAYER_TO_REDUCE_INTERCONNECT_STRUCTURE_CRITICAL_DIMENSIONS_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=73394}",
   note = "[Online; accessed 30-June-2024]"
 }


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