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Bibliographic details for Taiwan semiconductor manufacturing co., ltd. (20240194525). Vias for Cobalt-Based Interconnects and Methods of Fabrication Thereof simplified abstract

Citation styles for Taiwan semiconductor manufacturing co., ltd. (20240194525). Vias for Cobalt-Based Interconnects and Methods of Fabrication Thereof simplified abstract

APA style

Taiwan semiconductor manufacturing co., ltd. (20240194525). Vias for Cobalt-Based Interconnects and Methods of Fabrication Thereof simplified abstract. (2024, June 14). WikiPatents, . Retrieved 00:34, June 28, 2024 from http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_co.,_ltd._(20240194525)._Vias_for_Cobalt-Based_Interconnects_and_Methods_of_Fabrication_Thereof_simplified_abstract&oldid=72213.

MLA style

"Taiwan semiconductor manufacturing co., ltd. (20240194525). Vias for Cobalt-Based Interconnects and Methods of Fabrication Thereof simplified abstract." WikiPatents, . 14 Jun 2024, 04:23 UTC. 28 Jun 2024, 00:34 <http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_co.,_ltd._(20240194525)._Vias_for_Cobalt-Based_Interconnects_and_Methods_of_Fabrication_Thereof_simplified_abstract&oldid=72213>.

MHRA style

WikiPatents contributors, 'Taiwan semiconductor manufacturing co., ltd. (20240194525). Vias for Cobalt-Based Interconnects and Methods of Fabrication Thereof simplified abstract', WikiPatents, , 14 June 2024, 04:23 UTC, <http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_co.,_ltd._(20240194525)._Vias_for_Cobalt-Based_Interconnects_and_Methods_of_Fabrication_Thereof_simplified_abstract&oldid=72213> [accessed 28 June 2024]

Chicago style

WikiPatents contributors, "Taiwan semiconductor manufacturing co., ltd. (20240194525). Vias for Cobalt-Based Interconnects and Methods of Fabrication Thereof simplified abstract," WikiPatents, , http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_co.,_ltd._(20240194525)._Vias_for_Cobalt-Based_Interconnects_and_Methods_of_Fabrication_Thereof_simplified_abstract&oldid=72213 (accessed June 28, 2024).

CBE/CSE style

WikiPatents contributors. Taiwan semiconductor manufacturing co., ltd. (20240194525). Vias for Cobalt-Based Interconnects and Methods of Fabrication Thereof simplified abstract [Internet]. WikiPatents, ; 2024 Jun 14, 04:23 UTC [cited 2024 Jun 28]. Available from: http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_co.,_ltd._(20240194525)._Vias_for_Cobalt-Based_Interconnects_and_Methods_of_Fabrication_Thereof_simplified_abstract&oldid=72213.

Bluebook style

Taiwan semiconductor manufacturing co., ltd. (20240194525). Vias for Cobalt-Based Interconnects and Methods of Fabrication Thereof simplified abstract, http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_co.,_ltd._(20240194525)._Vias_for_Cobalt-Based_Interconnects_and_Methods_of_Fabrication_Thereof_simplified_abstract&oldid=72213 (last visited June 28, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "Taiwan semiconductor manufacturing co., ltd. (20240194525). Vias for Cobalt-Based Interconnects and Methods of Fabrication Thereof simplified abstract --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_co.,_ltd._(20240194525)._Vias_for_Cobalt-Based_Interconnects_and_Methods_of_Fabrication_Thereof_simplified_abstract&oldid=72213",
   note = "[Online; accessed 28-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "Taiwan semiconductor manufacturing co., ltd. (20240194525). Vias for Cobalt-Based Interconnects and Methods of Fabrication Thereof simplified abstract --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_co.,_ltd._(20240194525)._Vias_for_Cobalt-Based_Interconnects_and_Methods_of_Fabrication_Thereof_simplified_abstract&oldid=72213}",
   note = "[Online; accessed 28-June-2024]"
 }


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