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Bibliographic details for US Patent Application 18351985. Dielectric Gap-Filling Process for Semiconductor Device simplified abstract
- Page name: US Patent Application 18351985. Dielectric Gap-Filling Process for Semiconductor Device simplified abstract
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 10 November 2023 06:50 UTC
- Date retrieved: 27 June 2024 13:58 UTC
- Permanent URL: http://wikipatents.org/index.php?title=US_Patent_Application_18351985._Dielectric_Gap-Filling_Process_for_Semiconductor_Device_simplified_abstract&oldid=7178
- Page Version ID: 7178
Citation styles for US Patent Application 18351985. Dielectric Gap-Filling Process for Semiconductor Device simplified abstract
APA style
US Patent Application 18351985. Dielectric Gap-Filling Process for Semiconductor Device simplified abstract. (2023, November 10). WikiPatents, . Retrieved 13:58, June 27, 2024 from http://wikipatents.org/index.php?title=US_Patent_Application_18351985._Dielectric_Gap-Filling_Process_for_Semiconductor_Device_simplified_abstract&oldid=7178.
MLA style
"US Patent Application 18351985. Dielectric Gap-Filling Process for Semiconductor Device simplified abstract." WikiPatents, . 10 Nov 2023, 06:50 UTC. 27 Jun 2024, 13:58 <http://wikipatents.org/index.php?title=US_Patent_Application_18351985._Dielectric_Gap-Filling_Process_for_Semiconductor_Device_simplified_abstract&oldid=7178>.
MHRA style
WikiPatents contributors, 'US Patent Application 18351985. Dielectric Gap-Filling Process for Semiconductor Device simplified abstract', WikiPatents, , 10 November 2023, 06:50 UTC, <http://wikipatents.org/index.php?title=US_Patent_Application_18351985._Dielectric_Gap-Filling_Process_for_Semiconductor_Device_simplified_abstract&oldid=7178> [accessed 27 June 2024]
Chicago style
WikiPatents contributors, "US Patent Application 18351985. Dielectric Gap-Filling Process for Semiconductor Device simplified abstract," WikiPatents, , http://wikipatents.org/index.php?title=US_Patent_Application_18351985._Dielectric_Gap-Filling_Process_for_Semiconductor_Device_simplified_abstract&oldid=7178 (accessed June 27, 2024).
CBE/CSE style
WikiPatents contributors. US Patent Application 18351985. Dielectric Gap-Filling Process for Semiconductor Device simplified abstract [Internet]. WikiPatents, ; 2023 Nov 10, 06:50 UTC [cited 2024 Jun 27]. Available from: http://wikipatents.org/index.php?title=US_Patent_Application_18351985._Dielectric_Gap-Filling_Process_for_Semiconductor_Device_simplified_abstract&oldid=7178.
Bluebook style
US Patent Application 18351985. Dielectric Gap-Filling Process for Semiconductor Device simplified abstract, http://wikipatents.org/index.php?title=US_Patent_Application_18351985._Dielectric_Gap-Filling_Process_for_Semiconductor_Device_simplified_abstract&oldid=7178 (last visited June 27, 2024).
BibTeX entry
@misc{ wiki:xxx,
author = "WikiPatents",
title = "US Patent Application 18351985. Dielectric Gap-Filling Process for Semiconductor Device simplified abstract --- WikiPatents{,} ",
year = "2023",
url = "http://wikipatents.org/index.php?title=US_Patent_Application_18351985._Dielectric_Gap-Filling_Process_for_Semiconductor_Device_simplified_abstract&oldid=7178",
note = "[Online; accessed 27-June-2024]"
}
When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx,
author = "WikiPatents",
title = "US Patent Application 18351985. Dielectric Gap-Filling Process for Semiconductor Device simplified abstract --- WikiPatents{,} ",
year = "2023",
url = "\url{http://wikipatents.org/index.php?title=US_Patent_Application_18351985._Dielectric_Gap-Filling_Process_for_Semiconductor_Device_simplified_abstract&oldid=7178}",
note = "[Online; accessed 27-June-2024]"
}
