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Bibliographic details for 18418930. METHODS AND APPARATUS FOR REDUCING SPUTTERING OF A GROUNDED SHIELD IN A PROCESS CHAMBER simplified abstract (Applied Materials, Inc.)

Citation styles for 18418930. METHODS AND APPARATUS FOR REDUCING SPUTTERING OF A GROUNDED SHIELD IN A PROCESS CHAMBER simplified abstract (Applied Materials, Inc.)

APA style

18418930. METHODS AND APPARATUS FOR REDUCING SPUTTERING OF A GROUNDED SHIELD IN A PROCESS CHAMBER simplified abstract (Applied Materials, Inc.). (2024, June 11). WikiPatents, . Retrieved 18:32, June 27, 2024 from http://wikipatents.org/index.php?title=18418930._METHODS_AND_APPARATUS_FOR_REDUCING_SPUTTERING_OF_A_GROUNDED_SHIELD_IN_A_PROCESS_CHAMBER_simplified_abstract_(Applied_Materials,_Inc.)&oldid=71330.

MLA style

"18418930. METHODS AND APPARATUS FOR REDUCING SPUTTERING OF A GROUNDED SHIELD IN A PROCESS CHAMBER simplified abstract (Applied Materials, Inc.)." WikiPatents, . 11 Jun 2024, 09:40 UTC. 27 Jun 2024, 18:32 <http://wikipatents.org/index.php?title=18418930._METHODS_AND_APPARATUS_FOR_REDUCING_SPUTTERING_OF_A_GROUNDED_SHIELD_IN_A_PROCESS_CHAMBER_simplified_abstract_(Applied_Materials,_Inc.)&oldid=71330>.

MHRA style

WikiPatents contributors, '18418930. METHODS AND APPARATUS FOR REDUCING SPUTTERING OF A GROUNDED SHIELD IN A PROCESS CHAMBER simplified abstract (Applied Materials, Inc.)', WikiPatents, , 11 June 2024, 09:40 UTC, <http://wikipatents.org/index.php?title=18418930._METHODS_AND_APPARATUS_FOR_REDUCING_SPUTTERING_OF_A_GROUNDED_SHIELD_IN_A_PROCESS_CHAMBER_simplified_abstract_(Applied_Materials,_Inc.)&oldid=71330> [accessed 27 June 2024]

Chicago style

WikiPatents contributors, "18418930. METHODS AND APPARATUS FOR REDUCING SPUTTERING OF A GROUNDED SHIELD IN A PROCESS CHAMBER simplified abstract (Applied Materials, Inc.)," WikiPatents, , http://wikipatents.org/index.php?title=18418930._METHODS_AND_APPARATUS_FOR_REDUCING_SPUTTERING_OF_A_GROUNDED_SHIELD_IN_A_PROCESS_CHAMBER_simplified_abstract_(Applied_Materials,_Inc.)&oldid=71330 (accessed June 27, 2024).

CBE/CSE style

WikiPatents contributors. 18418930. METHODS AND APPARATUS FOR REDUCING SPUTTERING OF A GROUNDED SHIELD IN A PROCESS CHAMBER simplified abstract (Applied Materials, Inc.) [Internet]. WikiPatents, ; 2024 Jun 11, 09:40 UTC [cited 2024 Jun 27]. Available from: http://wikipatents.org/index.php?title=18418930._METHODS_AND_APPARATUS_FOR_REDUCING_SPUTTERING_OF_A_GROUNDED_SHIELD_IN_A_PROCESS_CHAMBER_simplified_abstract_(Applied_Materials,_Inc.)&oldid=71330.

Bluebook style

18418930. METHODS AND APPARATUS FOR REDUCING SPUTTERING OF A GROUNDED SHIELD IN A PROCESS CHAMBER simplified abstract (Applied Materials, Inc.), http://wikipatents.org/index.php?title=18418930._METHODS_AND_APPARATUS_FOR_REDUCING_SPUTTERING_OF_A_GROUNDED_SHIELD_IN_A_PROCESS_CHAMBER_simplified_abstract_(Applied_Materials,_Inc.)&oldid=71330 (last visited June 27, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18418930. METHODS AND APPARATUS FOR REDUCING SPUTTERING OF A GROUNDED SHIELD IN A PROCESS CHAMBER simplified abstract (Applied Materials, Inc.) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=18418930._METHODS_AND_APPARATUS_FOR_REDUCING_SPUTTERING_OF_A_GROUNDED_SHIELD_IN_A_PROCESS_CHAMBER_simplified_abstract_(Applied_Materials,_Inc.)&oldid=71330",
   note = "[Online; accessed 27-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18418930. METHODS AND APPARATUS FOR REDUCING SPUTTERING OF A GROUNDED SHIELD IN A PROCESS CHAMBER simplified abstract (Applied Materials, Inc.) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=18418930._METHODS_AND_APPARATUS_FOR_REDUCING_SPUTTERING_OF_A_GROUNDED_SHIELD_IN_A_PROCESS_CHAMBER_simplified_abstract_(Applied_Materials,_Inc.)&oldid=71330}",
   note = "[Online; accessed 27-June-2024]"
 }


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