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Bibliographic details for 18074385. Heated Pedestal With Impedance Matching Radio Frequency (RF) Rod simplified abstract (Applied Materials, Inc.)

Citation styles for 18074385. Heated Pedestal With Impedance Matching Radio Frequency (RF) Rod simplified abstract (Applied Materials, Inc.)

APA style

18074385. Heated Pedestal With Impedance Matching Radio Frequency (RF) Rod simplified abstract (Applied Materials, Inc.). (2024, June 11). WikiPatents, . Retrieved 13:26, July 7, 2024 from http://wikipatents.org/index.php?title=18074385._Heated_Pedestal_With_Impedance_Matching_Radio_Frequency_(RF)_Rod_simplified_abstract_(Applied_Materials,_Inc.)&oldid=71329.

MLA style

"18074385. Heated Pedestal With Impedance Matching Radio Frequency (RF) Rod simplified abstract (Applied Materials, Inc.)." WikiPatents, . 11 Jun 2024, 09:40 UTC. 7 Jul 2024, 13:26 <http://wikipatents.org/index.php?title=18074385._Heated_Pedestal_With_Impedance_Matching_Radio_Frequency_(RF)_Rod_simplified_abstract_(Applied_Materials,_Inc.)&oldid=71329>.

MHRA style

WikiPatents contributors, '18074385. Heated Pedestal With Impedance Matching Radio Frequency (RF) Rod simplified abstract (Applied Materials, Inc.)', WikiPatents, , 11 June 2024, 09:40 UTC, <http://wikipatents.org/index.php?title=18074385._Heated_Pedestal_With_Impedance_Matching_Radio_Frequency_(RF)_Rod_simplified_abstract_(Applied_Materials,_Inc.)&oldid=71329> [accessed 7 July 2024]

Chicago style

WikiPatents contributors, "18074385. Heated Pedestal With Impedance Matching Radio Frequency (RF) Rod simplified abstract (Applied Materials, Inc.)," WikiPatents, , http://wikipatents.org/index.php?title=18074385._Heated_Pedestal_With_Impedance_Matching_Radio_Frequency_(RF)_Rod_simplified_abstract_(Applied_Materials,_Inc.)&oldid=71329 (accessed July 7, 2024).

CBE/CSE style

WikiPatents contributors. 18074385. Heated Pedestal With Impedance Matching Radio Frequency (RF) Rod simplified abstract (Applied Materials, Inc.) [Internet]. WikiPatents, ; 2024 Jun 11, 09:40 UTC [cited 2024 Jul 7]. Available from: http://wikipatents.org/index.php?title=18074385._Heated_Pedestal_With_Impedance_Matching_Radio_Frequency_(RF)_Rod_simplified_abstract_(Applied_Materials,_Inc.)&oldid=71329.

Bluebook style

18074385. Heated Pedestal With Impedance Matching Radio Frequency (RF) Rod simplified abstract (Applied Materials, Inc.), http://wikipatents.org/index.php?title=18074385._Heated_Pedestal_With_Impedance_Matching_Radio_Frequency_(RF)_Rod_simplified_abstract_(Applied_Materials,_Inc.)&oldid=71329 (last visited July 7, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18074385. Heated Pedestal With Impedance Matching Radio Frequency (RF) Rod simplified abstract (Applied Materials, Inc.) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=18074385._Heated_Pedestal_With_Impedance_Matching_Radio_Frequency_(RF)_Rod_simplified_abstract_(Applied_Materials,_Inc.)&oldid=71329",
   note = "[Online; accessed 7-July-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18074385. Heated Pedestal With Impedance Matching Radio Frequency (RF) Rod simplified abstract (Applied Materials, Inc.) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=18074385._Heated_Pedestal_With_Impedance_Matching_Radio_Frequency_(RF)_Rod_simplified_abstract_(Applied_Materials,_Inc.)&oldid=71329}",
   note = "[Online; accessed 7-July-2024]"
 }


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