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Bibliographic details for 18379106. EUV PHOTORESIST AND UNDERLAYER ADHESION MODULATION simplified abstract (Applied Materials, Inc.)
- Page name: 18379106. EUV PHOTORESIST AND UNDERLAYER ADHESION MODULATION simplified abstract (Applied Materials, Inc.)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 11 June 2024 09:39 UTC
- Date retrieved: 30 June 2024 19:04 UTC
- Permanent URL: http://wikipatents.org/index.php?title=18379106._EUV_PHOTORESIST_AND_UNDERLAYER_ADHESION_MODULATION_simplified_abstract_(Applied_Materials,_Inc.)&oldid=71323
- Page Version ID: 71323
Citation styles for 18379106. EUV PHOTORESIST AND UNDERLAYER ADHESION MODULATION simplified abstract (Applied Materials, Inc.)
APA style
18379106. EUV PHOTORESIST AND UNDERLAYER ADHESION MODULATION simplified abstract (Applied Materials, Inc.). (2024, June 11). WikiPatents, . Retrieved 19:04, June 30, 2024 from http://wikipatents.org/index.php?title=18379106._EUV_PHOTORESIST_AND_UNDERLAYER_ADHESION_MODULATION_simplified_abstract_(Applied_Materials,_Inc.)&oldid=71323.
MLA style
"18379106. EUV PHOTORESIST AND UNDERLAYER ADHESION MODULATION simplified abstract (Applied Materials, Inc.)." WikiPatents, . 11 Jun 2024, 09:39 UTC. 30 Jun 2024, 19:04 <http://wikipatents.org/index.php?title=18379106._EUV_PHOTORESIST_AND_UNDERLAYER_ADHESION_MODULATION_simplified_abstract_(Applied_Materials,_Inc.)&oldid=71323>.
MHRA style
WikiPatents contributors, '18379106. EUV PHOTORESIST AND UNDERLAYER ADHESION MODULATION simplified abstract (Applied Materials, Inc.)', WikiPatents, , 11 June 2024, 09:39 UTC, <http://wikipatents.org/index.php?title=18379106._EUV_PHOTORESIST_AND_UNDERLAYER_ADHESION_MODULATION_simplified_abstract_(Applied_Materials,_Inc.)&oldid=71323> [accessed 30 June 2024]
Chicago style
WikiPatents contributors, "18379106. EUV PHOTORESIST AND UNDERLAYER ADHESION MODULATION simplified abstract (Applied Materials, Inc.)," WikiPatents, , http://wikipatents.org/index.php?title=18379106._EUV_PHOTORESIST_AND_UNDERLAYER_ADHESION_MODULATION_simplified_abstract_(Applied_Materials,_Inc.)&oldid=71323 (accessed June 30, 2024).
CBE/CSE style
WikiPatents contributors. 18379106. EUV PHOTORESIST AND UNDERLAYER ADHESION MODULATION simplified abstract (Applied Materials, Inc.) [Internet]. WikiPatents, ; 2024 Jun 11, 09:39 UTC [cited 2024 Jun 30]. Available from: http://wikipatents.org/index.php?title=18379106._EUV_PHOTORESIST_AND_UNDERLAYER_ADHESION_MODULATION_simplified_abstract_(Applied_Materials,_Inc.)&oldid=71323.
Bluebook style
18379106. EUV PHOTORESIST AND UNDERLAYER ADHESION MODULATION simplified abstract (Applied Materials, Inc.), http://wikipatents.org/index.php?title=18379106._EUV_PHOTORESIST_AND_UNDERLAYER_ADHESION_MODULATION_simplified_abstract_(Applied_Materials,_Inc.)&oldid=71323 (last visited June 30, 2024).
BibTeX entry
@misc{ wiki:xxx,
author = "WikiPatents",
title = "18379106. EUV PHOTORESIST AND UNDERLAYER ADHESION MODULATION simplified abstract (Applied Materials, Inc.) --- WikiPatents{,} ",
year = "2024",
url = "http://wikipatents.org/index.php?title=18379106._EUV_PHOTORESIST_AND_UNDERLAYER_ADHESION_MODULATION_simplified_abstract_(Applied_Materials,_Inc.)&oldid=71323",
note = "[Online; accessed 30-June-2024]"
}
When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx,
author = "WikiPatents",
title = "18379106. EUV PHOTORESIST AND UNDERLAYER ADHESION MODULATION simplified abstract (Applied Materials, Inc.) --- WikiPatents{,} ",
year = "2024",
url = "\url{http://wikipatents.org/index.php?title=18379106._EUV_PHOTORESIST_AND_UNDERLAYER_ADHESION_MODULATION_simplified_abstract_(Applied_Materials,_Inc.)&oldid=71323}",
note = "[Online; accessed 30-June-2024]"
}
