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Bibliographic details for 18442234. METHODS AND APPARATUS FOR PRECLEANING AND TREATING WAFER SURFACES simplified abstract (Applied Materials, Inc.)
- Page name: 18442234. METHODS AND APPARATUS FOR PRECLEANING AND TREATING WAFER SURFACES simplified abstract (Applied Materials, Inc.)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 11 June 2024 09:39 UTC
- Date retrieved: 28 June 2024 19:34 UTC
- Permanent URL: http://wikipatents.org/index.php?title=18442234._METHODS_AND_APPARATUS_FOR_PRECLEANING_AND_TREATING_WAFER_SURFACES_simplified_abstract_(Applied_Materials,_Inc.)&oldid=71316
- Page Version ID: 71316
Citation styles for 18442234. METHODS AND APPARATUS FOR PRECLEANING AND TREATING WAFER SURFACES simplified abstract (Applied Materials, Inc.)
APA style
18442234. METHODS AND APPARATUS FOR PRECLEANING AND TREATING WAFER SURFACES simplified abstract (Applied Materials, Inc.). (2024, June 11). WikiPatents, . Retrieved 19:34, June 28, 2024 from http://wikipatents.org/index.php?title=18442234._METHODS_AND_APPARATUS_FOR_PRECLEANING_AND_TREATING_WAFER_SURFACES_simplified_abstract_(Applied_Materials,_Inc.)&oldid=71316.
MLA style
"18442234. METHODS AND APPARATUS FOR PRECLEANING AND TREATING WAFER SURFACES simplified abstract (Applied Materials, Inc.)." WikiPatents, . 11 Jun 2024, 09:39 UTC. 28 Jun 2024, 19:34 <http://wikipatents.org/index.php?title=18442234._METHODS_AND_APPARATUS_FOR_PRECLEANING_AND_TREATING_WAFER_SURFACES_simplified_abstract_(Applied_Materials,_Inc.)&oldid=71316>.
MHRA style
WikiPatents contributors, '18442234. METHODS AND APPARATUS FOR PRECLEANING AND TREATING WAFER SURFACES simplified abstract (Applied Materials, Inc.)', WikiPatents, , 11 June 2024, 09:39 UTC, <http://wikipatents.org/index.php?title=18442234._METHODS_AND_APPARATUS_FOR_PRECLEANING_AND_TREATING_WAFER_SURFACES_simplified_abstract_(Applied_Materials,_Inc.)&oldid=71316> [accessed 28 June 2024]
Chicago style
WikiPatents contributors, "18442234. METHODS AND APPARATUS FOR PRECLEANING AND TREATING WAFER SURFACES simplified abstract (Applied Materials, Inc.)," WikiPatents, , http://wikipatents.org/index.php?title=18442234._METHODS_AND_APPARATUS_FOR_PRECLEANING_AND_TREATING_WAFER_SURFACES_simplified_abstract_(Applied_Materials,_Inc.)&oldid=71316 (accessed June 28, 2024).
CBE/CSE style
WikiPatents contributors. 18442234. METHODS AND APPARATUS FOR PRECLEANING AND TREATING WAFER SURFACES simplified abstract (Applied Materials, Inc.) [Internet]. WikiPatents, ; 2024 Jun 11, 09:39 UTC [cited 2024 Jun 28]. Available from: http://wikipatents.org/index.php?title=18442234._METHODS_AND_APPARATUS_FOR_PRECLEANING_AND_TREATING_WAFER_SURFACES_simplified_abstract_(Applied_Materials,_Inc.)&oldid=71316.
Bluebook style
18442234. METHODS AND APPARATUS FOR PRECLEANING AND TREATING WAFER SURFACES simplified abstract (Applied Materials, Inc.), http://wikipatents.org/index.php?title=18442234._METHODS_AND_APPARATUS_FOR_PRECLEANING_AND_TREATING_WAFER_SURFACES_simplified_abstract_(Applied_Materials,_Inc.)&oldid=71316 (last visited June 28, 2024).
BibTeX entry
@misc{ wiki:xxx, author = "WikiPatents", title = "18442234. METHODS AND APPARATUS FOR PRECLEANING AND TREATING WAFER SURFACES simplified abstract (Applied Materials, Inc.) --- WikiPatents{,} ", year = "2024", url = "http://wikipatents.org/index.php?title=18442234._METHODS_AND_APPARATUS_FOR_PRECLEANING_AND_TREATING_WAFER_SURFACES_simplified_abstract_(Applied_Materials,_Inc.)&oldid=71316", note = "[Online; accessed 28-June-2024]" }
When using the LaTeX package url (\usepackage{url}
somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx, author = "WikiPatents", title = "18442234. METHODS AND APPARATUS FOR PRECLEANING AND TREATING WAFER SURFACES simplified abstract (Applied Materials, Inc.) --- WikiPatents{,} ", year = "2024", url = "\url{http://wikipatents.org/index.php?title=18442234._METHODS_AND_APPARATUS_FOR_PRECLEANING_AND_TREATING_WAFER_SURFACES_simplified_abstract_(Applied_Materials,_Inc.)&oldid=71316}", note = "[Online; accessed 28-June-2024]" }