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Bibliographic details for 18411091. METHOD OF MANUFACTURING PHASE SHIFT PHOTO MASKS simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)

Citation styles for 18411091. METHOD OF MANUFACTURING PHASE SHIFT PHOTO MASKS simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)

APA style

18411091. METHOD OF MANUFACTURING PHASE SHIFT PHOTO MASKS simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.). (2024, June 10). WikiPatents, . Retrieved 23:50, July 2, 2024 from http://wikipatents.org/index.php?title=18411091._METHOD_OF_MANUFACTURING_PHASE_SHIFT_PHOTO_MASKS_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=69543.

MLA style

"18411091. METHOD OF MANUFACTURING PHASE SHIFT PHOTO MASKS simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)." WikiPatents, . 10 Jun 2024, 08:22 UTC. 2 Jul 2024, 23:50 <http://wikipatents.org/index.php?title=18411091._METHOD_OF_MANUFACTURING_PHASE_SHIFT_PHOTO_MASKS_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=69543>.

MHRA style

WikiPatents contributors, '18411091. METHOD OF MANUFACTURING PHASE SHIFT PHOTO MASKS simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)', WikiPatents, , 10 June 2024, 08:22 UTC, <http://wikipatents.org/index.php?title=18411091._METHOD_OF_MANUFACTURING_PHASE_SHIFT_PHOTO_MASKS_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=69543> [accessed 2 July 2024]

Chicago style

WikiPatents contributors, "18411091. METHOD OF MANUFACTURING PHASE SHIFT PHOTO MASKS simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)," WikiPatents, , http://wikipatents.org/index.php?title=18411091._METHOD_OF_MANUFACTURING_PHASE_SHIFT_PHOTO_MASKS_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=69543 (accessed July 2, 2024).

CBE/CSE style

WikiPatents contributors. 18411091. METHOD OF MANUFACTURING PHASE SHIFT PHOTO MASKS simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.) [Internet]. WikiPatents, ; 2024 Jun 10, 08:22 UTC [cited 2024 Jul 2]. Available from: http://wikipatents.org/index.php?title=18411091._METHOD_OF_MANUFACTURING_PHASE_SHIFT_PHOTO_MASKS_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=69543.

Bluebook style

18411091. METHOD OF MANUFACTURING PHASE SHIFT PHOTO MASKS simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.), http://wikipatents.org/index.php?title=18411091._METHOD_OF_MANUFACTURING_PHASE_SHIFT_PHOTO_MASKS_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=69543 (last visited July 2, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18411091. METHOD OF MANUFACTURING PHASE SHIFT PHOTO MASKS simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=18411091._METHOD_OF_MANUFACTURING_PHASE_SHIFT_PHOTO_MASKS_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=69543",
   note = "[Online; accessed 2-July-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18411091. METHOD OF MANUFACTURING PHASE SHIFT PHOTO MASKS simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=18411091._METHOD_OF_MANUFACTURING_PHASE_SHIFT_PHOTO_MASKS_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=69543}",
   note = "[Online; accessed 2-July-2024]"
 }


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