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Bibliographic details for 18060592. SUBSTRATE ARCHITECTURE FOR ENHANCED ELECTROSTATIC CHUCKING simplified abstract (Intel Corporation)
- Page name: 18060592. SUBSTRATE ARCHITECTURE FOR ENHANCED ELECTROSTATIC CHUCKING simplified abstract (Intel Corporation)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 10 June 2024 07:43 UTC
- Date retrieved: 27 June 2024 08:07 UTC
- Permanent URL: http://wikipatents.org/index.php?title=18060592._SUBSTRATE_ARCHITECTURE_FOR_ENHANCED_ELECTROSTATIC_CHUCKING_simplified_abstract_(Intel_Corporation)&oldid=69187
- Page Version ID: 69187
Citation styles for 18060592. SUBSTRATE ARCHITECTURE FOR ENHANCED ELECTROSTATIC CHUCKING simplified abstract (Intel Corporation)
APA style
18060592. SUBSTRATE ARCHITECTURE FOR ENHANCED ELECTROSTATIC CHUCKING simplified abstract (Intel Corporation). (2024, June 10). WikiPatents, . Retrieved 08:07, June 27, 2024 from http://wikipatents.org/index.php?title=18060592._SUBSTRATE_ARCHITECTURE_FOR_ENHANCED_ELECTROSTATIC_CHUCKING_simplified_abstract_(Intel_Corporation)&oldid=69187.
MLA style
"18060592. SUBSTRATE ARCHITECTURE FOR ENHANCED ELECTROSTATIC CHUCKING simplified abstract (Intel Corporation)." WikiPatents, . 10 Jun 2024, 07:43 UTC. 27 Jun 2024, 08:07 <http://wikipatents.org/index.php?title=18060592._SUBSTRATE_ARCHITECTURE_FOR_ENHANCED_ELECTROSTATIC_CHUCKING_simplified_abstract_(Intel_Corporation)&oldid=69187>.
MHRA style
WikiPatents contributors, '18060592. SUBSTRATE ARCHITECTURE FOR ENHANCED ELECTROSTATIC CHUCKING simplified abstract (Intel Corporation)', WikiPatents, , 10 June 2024, 07:43 UTC, <http://wikipatents.org/index.php?title=18060592._SUBSTRATE_ARCHITECTURE_FOR_ENHANCED_ELECTROSTATIC_CHUCKING_simplified_abstract_(Intel_Corporation)&oldid=69187> [accessed 27 June 2024]
Chicago style
WikiPatents contributors, "18060592. SUBSTRATE ARCHITECTURE FOR ENHANCED ELECTROSTATIC CHUCKING simplified abstract (Intel Corporation)," WikiPatents, , http://wikipatents.org/index.php?title=18060592._SUBSTRATE_ARCHITECTURE_FOR_ENHANCED_ELECTROSTATIC_CHUCKING_simplified_abstract_(Intel_Corporation)&oldid=69187 (accessed June 27, 2024).
CBE/CSE style
WikiPatents contributors. 18060592. SUBSTRATE ARCHITECTURE FOR ENHANCED ELECTROSTATIC CHUCKING simplified abstract (Intel Corporation) [Internet]. WikiPatents, ; 2024 Jun 10, 07:43 UTC [cited 2024 Jun 27]. Available from: http://wikipatents.org/index.php?title=18060592._SUBSTRATE_ARCHITECTURE_FOR_ENHANCED_ELECTROSTATIC_CHUCKING_simplified_abstract_(Intel_Corporation)&oldid=69187.
Bluebook style
18060592. SUBSTRATE ARCHITECTURE FOR ENHANCED ELECTROSTATIC CHUCKING simplified abstract (Intel Corporation), http://wikipatents.org/index.php?title=18060592._SUBSTRATE_ARCHITECTURE_FOR_ENHANCED_ELECTROSTATIC_CHUCKING_simplified_abstract_(Intel_Corporation)&oldid=69187 (last visited June 27, 2024).
BibTeX entry
@misc{ wiki:xxx,
author = "WikiPatents",
title = "18060592. SUBSTRATE ARCHITECTURE FOR ENHANCED ELECTROSTATIC CHUCKING simplified abstract (Intel Corporation) --- WikiPatents{,} ",
year = "2024",
url = "http://wikipatents.org/index.php?title=18060592._SUBSTRATE_ARCHITECTURE_FOR_ENHANCED_ELECTROSTATIC_CHUCKING_simplified_abstract_(Intel_Corporation)&oldid=69187",
note = "[Online; accessed 27-June-2024]"
}
When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx,
author = "WikiPatents",
title = "18060592. SUBSTRATE ARCHITECTURE FOR ENHANCED ELECTROSTATIC CHUCKING simplified abstract (Intel Corporation) --- WikiPatents{,} ",
year = "2024",
url = "\url{http://wikipatents.org/index.php?title=18060592._SUBSTRATE_ARCHITECTURE_FOR_ENHANCED_ELECTROSTATIC_CHUCKING_simplified_abstract_(Intel_Corporation)&oldid=69187}",
note = "[Online; accessed 27-June-2024]"
}
