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Bibliographic details for 18509104. APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICES AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)
- Page name: 18509104. APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICES AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 10 June 2024 04:47 UTC
- Date retrieved: 29 June 2024 05:36 UTC
- Permanent URL: http://wikipatents.org/index.php?title=18509104._APPARATUS_FOR_MANUFACTURING_SEMICONDUCTOR_DEVICES_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICES_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=68726
- Page Version ID: 68726
Citation styles for 18509104. APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICES AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)
APA style
18509104. APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICES AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES simplified abstract (SAMSUNG ELECTRONICS CO., LTD.). (2024, June 10). WikiPatents, . Retrieved 05:36, June 29, 2024 from http://wikipatents.org/index.php?title=18509104._APPARATUS_FOR_MANUFACTURING_SEMICONDUCTOR_DEVICES_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICES_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=68726.
MLA style
"18509104. APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICES AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)." WikiPatents, . 10 Jun 2024, 04:47 UTC. 29 Jun 2024, 05:36 <http://wikipatents.org/index.php?title=18509104._APPARATUS_FOR_MANUFACTURING_SEMICONDUCTOR_DEVICES_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICES_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=68726>.
MHRA style
WikiPatents contributors, '18509104. APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICES AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)', WikiPatents, , 10 June 2024, 04:47 UTC, <http://wikipatents.org/index.php?title=18509104._APPARATUS_FOR_MANUFACTURING_SEMICONDUCTOR_DEVICES_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICES_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=68726> [accessed 29 June 2024]
Chicago style
WikiPatents contributors, "18509104. APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICES AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)," WikiPatents, , http://wikipatents.org/index.php?title=18509104._APPARATUS_FOR_MANUFACTURING_SEMICONDUCTOR_DEVICES_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICES_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=68726 (accessed June 29, 2024).
CBE/CSE style
WikiPatents contributors. 18509104. APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICES AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES simplified abstract (SAMSUNG ELECTRONICS CO., LTD.) [Internet]. WikiPatents, ; 2024 Jun 10, 04:47 UTC [cited 2024 Jun 29]. Available from: http://wikipatents.org/index.php?title=18509104._APPARATUS_FOR_MANUFACTURING_SEMICONDUCTOR_DEVICES_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICES_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=68726.
Bluebook style
18509104. APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICES AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES simplified abstract (SAMSUNG ELECTRONICS CO., LTD.), http://wikipatents.org/index.php?title=18509104._APPARATUS_FOR_MANUFACTURING_SEMICONDUCTOR_DEVICES_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICES_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=68726 (last visited June 29, 2024).
BibTeX entry
@misc{ wiki:xxx,
author = "WikiPatents",
title = "18509104. APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICES AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES simplified abstract (SAMSUNG ELECTRONICS CO., LTD.) --- WikiPatents{,} ",
year = "2024",
url = "http://wikipatents.org/index.php?title=18509104._APPARATUS_FOR_MANUFACTURING_SEMICONDUCTOR_DEVICES_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICES_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=68726",
note = "[Online; accessed 29-June-2024]"
}
When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx,
author = "WikiPatents",
title = "18509104. APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICES AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES simplified abstract (SAMSUNG ELECTRONICS CO., LTD.) --- WikiPatents{,} ",
year = "2024",
url = "\url{http://wikipatents.org/index.php?title=18509104._APPARATUS_FOR_MANUFACTURING_SEMICONDUCTOR_DEVICES_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICES_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=68726}",
note = "[Online; accessed 29-June-2024]"
}
