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Bibliographic details for US Patent Application 18351571. SUBSTRATE STAGE AND SUBSTRATE PROCESSING SYSTEM USING THE SAME simplified abstract
- Page name: US Patent Application 18351571. SUBSTRATE STAGE AND SUBSTRATE PROCESSING SYSTEM USING THE SAME simplified abstract
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 9 November 2023 11:09 UTC
- Date retrieved: 25 June 2024 06:27 UTC
- Permanent URL: http://wikipatents.org/index.php?title=US_Patent_Application_18351571._SUBSTRATE_STAGE_AND_SUBSTRATE_PROCESSING_SYSTEM_USING_THE_SAME_simplified_abstract&oldid=6708
- Page Version ID: 6708
Citation styles for US Patent Application 18351571. SUBSTRATE STAGE AND SUBSTRATE PROCESSING SYSTEM USING THE SAME simplified abstract
APA style
US Patent Application 18351571. SUBSTRATE STAGE AND SUBSTRATE PROCESSING SYSTEM USING THE SAME simplified abstract. (2023, November 9). WikiPatents, . Retrieved 06:27, June 25, 2024 from http://wikipatents.org/index.php?title=US_Patent_Application_18351571._SUBSTRATE_STAGE_AND_SUBSTRATE_PROCESSING_SYSTEM_USING_THE_SAME_simplified_abstract&oldid=6708.
MLA style
"US Patent Application 18351571. SUBSTRATE STAGE AND SUBSTRATE PROCESSING SYSTEM USING THE SAME simplified abstract." WikiPatents, . 9 Nov 2023, 11:09 UTC. 25 Jun 2024, 06:27 <http://wikipatents.org/index.php?title=US_Patent_Application_18351571._SUBSTRATE_STAGE_AND_SUBSTRATE_PROCESSING_SYSTEM_USING_THE_SAME_simplified_abstract&oldid=6708>.
MHRA style
WikiPatents contributors, 'US Patent Application 18351571. SUBSTRATE STAGE AND SUBSTRATE PROCESSING SYSTEM USING THE SAME simplified abstract', WikiPatents, , 9 November 2023, 11:09 UTC, <http://wikipatents.org/index.php?title=US_Patent_Application_18351571._SUBSTRATE_STAGE_AND_SUBSTRATE_PROCESSING_SYSTEM_USING_THE_SAME_simplified_abstract&oldid=6708> [accessed 25 June 2024]
Chicago style
WikiPatents contributors, "US Patent Application 18351571. SUBSTRATE STAGE AND SUBSTRATE PROCESSING SYSTEM USING THE SAME simplified abstract," WikiPatents, , http://wikipatents.org/index.php?title=US_Patent_Application_18351571._SUBSTRATE_STAGE_AND_SUBSTRATE_PROCESSING_SYSTEM_USING_THE_SAME_simplified_abstract&oldid=6708 (accessed June 25, 2024).
CBE/CSE style
WikiPatents contributors. US Patent Application 18351571. SUBSTRATE STAGE AND SUBSTRATE PROCESSING SYSTEM USING THE SAME simplified abstract [Internet]. WikiPatents, ; 2023 Nov 9, 11:09 UTC [cited 2024 Jun 25]. Available from: http://wikipatents.org/index.php?title=US_Patent_Application_18351571._SUBSTRATE_STAGE_AND_SUBSTRATE_PROCESSING_SYSTEM_USING_THE_SAME_simplified_abstract&oldid=6708.
Bluebook style
US Patent Application 18351571. SUBSTRATE STAGE AND SUBSTRATE PROCESSING SYSTEM USING THE SAME simplified abstract, http://wikipatents.org/index.php?title=US_Patent_Application_18351571._SUBSTRATE_STAGE_AND_SUBSTRATE_PROCESSING_SYSTEM_USING_THE_SAME_simplified_abstract&oldid=6708 (last visited June 25, 2024).
BibTeX entry
@misc{ wiki:xxx, author = "WikiPatents", title = "US Patent Application 18351571. SUBSTRATE STAGE AND SUBSTRATE PROCESSING SYSTEM USING THE SAME simplified abstract --- WikiPatents{,} ", year = "2023", url = "http://wikipatents.org/index.php?title=US_Patent_Application_18351571._SUBSTRATE_STAGE_AND_SUBSTRATE_PROCESSING_SYSTEM_USING_THE_SAME_simplified_abstract&oldid=6708", note = "[Online; accessed 25-June-2024]" }
When using the LaTeX package url (\usepackage{url}
somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx, author = "WikiPatents", title = "US Patent Application 18351571. SUBSTRATE STAGE AND SUBSTRATE PROCESSING SYSTEM USING THE SAME simplified abstract --- WikiPatents{,} ", year = "2023", url = "\url{http://wikipatents.org/index.php?title=US_Patent_Application_18351571._SUBSTRATE_STAGE_AND_SUBSTRATE_PROCESSING_SYSTEM_USING_THE_SAME_simplified_abstract&oldid=6708}", note = "[Online; accessed 25-June-2024]" }