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Bibliographic details for 18518393. SYSTEMS AND METHODS FOR CONTROLLING PRESSURE IN SUBSTRATE PROCESSING SYSTEMS simplified abstract (ASM IP Holding B.V.)

Citation styles for 18518393. SYSTEMS AND METHODS FOR CONTROLLING PRESSURE IN SUBSTRATE PROCESSING SYSTEMS simplified abstract (ASM IP Holding B.V.)

APA style

18518393. SYSTEMS AND METHODS FOR CONTROLLING PRESSURE IN SUBSTRATE PROCESSING SYSTEMS simplified abstract (ASM IP Holding B.V.). (2024, June 6). WikiPatents, . Retrieved 01:21, June 28, 2024 from http://wikipatents.org/index.php?title=18518393._SYSTEMS_AND_METHODS_FOR_CONTROLLING_PRESSURE_IN_SUBSTRATE_PROCESSING_SYSTEMS_simplified_abstract_(ASM_IP_Holding_B.V.)&oldid=66329.

MLA style

"18518393. SYSTEMS AND METHODS FOR CONTROLLING PRESSURE IN SUBSTRATE PROCESSING SYSTEMS simplified abstract (ASM IP Holding B.V.)." WikiPatents, . 6 Jun 2024, 05:13 UTC. 28 Jun 2024, 01:21 <http://wikipatents.org/index.php?title=18518393._SYSTEMS_AND_METHODS_FOR_CONTROLLING_PRESSURE_IN_SUBSTRATE_PROCESSING_SYSTEMS_simplified_abstract_(ASM_IP_Holding_B.V.)&oldid=66329>.

MHRA style

WikiPatents contributors, '18518393. SYSTEMS AND METHODS FOR CONTROLLING PRESSURE IN SUBSTRATE PROCESSING SYSTEMS simplified abstract (ASM IP Holding B.V.)', WikiPatents, , 6 June 2024, 05:13 UTC, <http://wikipatents.org/index.php?title=18518393._SYSTEMS_AND_METHODS_FOR_CONTROLLING_PRESSURE_IN_SUBSTRATE_PROCESSING_SYSTEMS_simplified_abstract_(ASM_IP_Holding_B.V.)&oldid=66329> [accessed 28 June 2024]

Chicago style

WikiPatents contributors, "18518393. SYSTEMS AND METHODS FOR CONTROLLING PRESSURE IN SUBSTRATE PROCESSING SYSTEMS simplified abstract (ASM IP Holding B.V.)," WikiPatents, , http://wikipatents.org/index.php?title=18518393._SYSTEMS_AND_METHODS_FOR_CONTROLLING_PRESSURE_IN_SUBSTRATE_PROCESSING_SYSTEMS_simplified_abstract_(ASM_IP_Holding_B.V.)&oldid=66329 (accessed June 28, 2024).

CBE/CSE style

WikiPatents contributors. 18518393. SYSTEMS AND METHODS FOR CONTROLLING PRESSURE IN SUBSTRATE PROCESSING SYSTEMS simplified abstract (ASM IP Holding B.V.) [Internet]. WikiPatents, ; 2024 Jun 6, 05:13 UTC [cited 2024 Jun 28]. Available from: http://wikipatents.org/index.php?title=18518393._SYSTEMS_AND_METHODS_FOR_CONTROLLING_PRESSURE_IN_SUBSTRATE_PROCESSING_SYSTEMS_simplified_abstract_(ASM_IP_Holding_B.V.)&oldid=66329.

Bluebook style

18518393. SYSTEMS AND METHODS FOR CONTROLLING PRESSURE IN SUBSTRATE PROCESSING SYSTEMS simplified abstract (ASM IP Holding B.V.), http://wikipatents.org/index.php?title=18518393._SYSTEMS_AND_METHODS_FOR_CONTROLLING_PRESSURE_IN_SUBSTRATE_PROCESSING_SYSTEMS_simplified_abstract_(ASM_IP_Holding_B.V.)&oldid=66329 (last visited June 28, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18518393. SYSTEMS AND METHODS FOR CONTROLLING PRESSURE IN SUBSTRATE PROCESSING SYSTEMS simplified abstract (ASM IP Holding B.V.) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=18518393._SYSTEMS_AND_METHODS_FOR_CONTROLLING_PRESSURE_IN_SUBSTRATE_PROCESSING_SYSTEMS_simplified_abstract_(ASM_IP_Holding_B.V.)&oldid=66329",
   note = "[Online; accessed 28-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18518393. SYSTEMS AND METHODS FOR CONTROLLING PRESSURE IN SUBSTRATE PROCESSING SYSTEMS simplified abstract (ASM IP Holding B.V.) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=18518393._SYSTEMS_AND_METHODS_FOR_CONTROLLING_PRESSURE_IN_SUBSTRATE_PROCESSING_SYSTEMS_simplified_abstract_(ASM_IP_Holding_B.V.)&oldid=66329}",
   note = "[Online; accessed 28-June-2024]"
 }


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