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Bibliographic details for 18516821. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (SEMES CO., LTD.)
- Page name: 18516821. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (SEMES CO., LTD.)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 6 June 2024 04:38 UTC
- Date retrieved: 28 June 2024 10:38 UTC
- Permanent URL: http://wikipatents.org/index.php?title=18516821._SUBSTRATE_PROCESSING_APPARATUS_AND_SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(SEMES_CO.,_LTD.)&oldid=65989
- Page Version ID: 65989
Citation styles for 18516821. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (SEMES CO., LTD.)
APA style
18516821. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (SEMES CO., LTD.). (2024, June 6). WikiPatents, . Retrieved 10:38, June 28, 2024 from http://wikipatents.org/index.php?title=18516821._SUBSTRATE_PROCESSING_APPARATUS_AND_SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(SEMES_CO.,_LTD.)&oldid=65989.
MLA style
"18516821. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (SEMES CO., LTD.)." WikiPatents, . 6 Jun 2024, 04:38 UTC. 28 Jun 2024, 10:38 <http://wikipatents.org/index.php?title=18516821._SUBSTRATE_PROCESSING_APPARATUS_AND_SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(SEMES_CO.,_LTD.)&oldid=65989>.
MHRA style
WikiPatents contributors, '18516821. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (SEMES CO., LTD.)', WikiPatents, , 6 June 2024, 04:38 UTC, <http://wikipatents.org/index.php?title=18516821._SUBSTRATE_PROCESSING_APPARATUS_AND_SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(SEMES_CO.,_LTD.)&oldid=65989> [accessed 28 June 2024]
Chicago style
WikiPatents contributors, "18516821. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (SEMES CO., LTD.)," WikiPatents, , http://wikipatents.org/index.php?title=18516821._SUBSTRATE_PROCESSING_APPARATUS_AND_SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(SEMES_CO.,_LTD.)&oldid=65989 (accessed June 28, 2024).
CBE/CSE style
WikiPatents contributors. 18516821. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (SEMES CO., LTD.) [Internet]. WikiPatents, ; 2024 Jun 6, 04:38 UTC [cited 2024 Jun 28]. Available from: http://wikipatents.org/index.php?title=18516821._SUBSTRATE_PROCESSING_APPARATUS_AND_SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(SEMES_CO.,_LTD.)&oldid=65989.
Bluebook style
18516821. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (SEMES CO., LTD.), http://wikipatents.org/index.php?title=18516821._SUBSTRATE_PROCESSING_APPARATUS_AND_SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(SEMES_CO.,_LTD.)&oldid=65989 (last visited June 28, 2024).
BibTeX entry
@misc{ wiki:xxx,
author = "WikiPatents",
title = "18516821. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (SEMES CO., LTD.) --- WikiPatents{,} ",
year = "2024",
url = "http://wikipatents.org/index.php?title=18516821._SUBSTRATE_PROCESSING_APPARATUS_AND_SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(SEMES_CO.,_LTD.)&oldid=65989",
note = "[Online; accessed 28-June-2024]"
}
When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx,
author = "WikiPatents",
title = "18516821. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (SEMES CO., LTD.) --- WikiPatents{,} ",
year = "2024",
url = "\url{http://wikipatents.org/index.php?title=18516821._SUBSTRATE_PROCESSING_APPARATUS_AND_SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(SEMES_CO.,_LTD.)&oldid=65989}",
note = "[Online; accessed 28-June-2024]"
}
