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Bibliographic details for 18511890. SUBSTRATE PROCESSING APPARATUS AND CLEANING METHOD simplified abstract (Tokyo Electron Limited)
- Page name: 18511890. SUBSTRATE PROCESSING APPARATUS AND CLEANING METHOD simplified abstract (Tokyo Electron Limited)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 6 June 2024 04:20 UTC
- Date retrieved: 27 June 2024 17:54 UTC
- Permanent URL: http://wikipatents.org/index.php?title=18511890._SUBSTRATE_PROCESSING_APPARATUS_AND_CLEANING_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=65817
- Page Version ID: 65817
Citation styles for 18511890. SUBSTRATE PROCESSING APPARATUS AND CLEANING METHOD simplified abstract (Tokyo Electron Limited)
APA style
18511890. SUBSTRATE PROCESSING APPARATUS AND CLEANING METHOD simplified abstract (Tokyo Electron Limited). (2024, June 6). WikiPatents, . Retrieved 17:54, June 27, 2024 from http://wikipatents.org/index.php?title=18511890._SUBSTRATE_PROCESSING_APPARATUS_AND_CLEANING_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=65817.
MLA style
"18511890. SUBSTRATE PROCESSING APPARATUS AND CLEANING METHOD simplified abstract (Tokyo Electron Limited)." WikiPatents, . 6 Jun 2024, 04:20 UTC. 27 Jun 2024, 17:54 <http://wikipatents.org/index.php?title=18511890._SUBSTRATE_PROCESSING_APPARATUS_AND_CLEANING_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=65817>.
MHRA style
WikiPatents contributors, '18511890. SUBSTRATE PROCESSING APPARATUS AND CLEANING METHOD simplified abstract (Tokyo Electron Limited)', WikiPatents, , 6 June 2024, 04:20 UTC, <http://wikipatents.org/index.php?title=18511890._SUBSTRATE_PROCESSING_APPARATUS_AND_CLEANING_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=65817> [accessed 27 June 2024]
Chicago style
WikiPatents contributors, "18511890. SUBSTRATE PROCESSING APPARATUS AND CLEANING METHOD simplified abstract (Tokyo Electron Limited)," WikiPatents, , http://wikipatents.org/index.php?title=18511890._SUBSTRATE_PROCESSING_APPARATUS_AND_CLEANING_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=65817 (accessed June 27, 2024).
CBE/CSE style
WikiPatents contributors. 18511890. SUBSTRATE PROCESSING APPARATUS AND CLEANING METHOD simplified abstract (Tokyo Electron Limited) [Internet]. WikiPatents, ; 2024 Jun 6, 04:20 UTC [cited 2024 Jun 27]. Available from: http://wikipatents.org/index.php?title=18511890._SUBSTRATE_PROCESSING_APPARATUS_AND_CLEANING_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=65817.
Bluebook style
18511890. SUBSTRATE PROCESSING APPARATUS AND CLEANING METHOD simplified abstract (Tokyo Electron Limited), http://wikipatents.org/index.php?title=18511890._SUBSTRATE_PROCESSING_APPARATUS_AND_CLEANING_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=65817 (last visited June 27, 2024).
BibTeX entry
@misc{ wiki:xxx,
author = "WikiPatents",
title = "18511890. SUBSTRATE PROCESSING APPARATUS AND CLEANING METHOD simplified abstract (Tokyo Electron Limited) --- WikiPatents{,} ",
year = "2024",
url = "http://wikipatents.org/index.php?title=18511890._SUBSTRATE_PROCESSING_APPARATUS_AND_CLEANING_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=65817",
note = "[Online; accessed 27-June-2024]"
}
When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx,
author = "WikiPatents",
title = "18511890. SUBSTRATE PROCESSING APPARATUS AND CLEANING METHOD simplified abstract (Tokyo Electron Limited) --- WikiPatents{,} ",
year = "2024",
url = "\url{http://wikipatents.org/index.php?title=18511890._SUBSTRATE_PROCESSING_APPARATUS_AND_CLEANING_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=65817}",
note = "[Online; accessed 27-June-2024]"
}
