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Bibliographic details for 18515426. SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM simplified abstract (Tokyo Electron Limited)
- Page name: 18515426. SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM simplified abstract (Tokyo Electron Limited)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 6 June 2024 04:19 UTC
- Date retrieved: 28 June 2024 21:11 UTC
- Permanent URL: http://wikipatents.org/index.php?title=18515426._SUBSTRATE_PROCESSING_METHOD_AND_SUBSTRATE_PROCESSING_SYSTEM_simplified_abstract_(Tokyo_Electron_Limited)&oldid=65807
- Page Version ID: 65807
Citation styles for 18515426. SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM simplified abstract (Tokyo Electron Limited)
APA style
18515426. SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM simplified abstract (Tokyo Electron Limited). (2024, June 6). WikiPatents, . Retrieved 21:11, June 28, 2024 from http://wikipatents.org/index.php?title=18515426._SUBSTRATE_PROCESSING_METHOD_AND_SUBSTRATE_PROCESSING_SYSTEM_simplified_abstract_(Tokyo_Electron_Limited)&oldid=65807.
MLA style
"18515426. SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM simplified abstract (Tokyo Electron Limited)." WikiPatents, . 6 Jun 2024, 04:19 UTC. 28 Jun 2024, 21:11 <http://wikipatents.org/index.php?title=18515426._SUBSTRATE_PROCESSING_METHOD_AND_SUBSTRATE_PROCESSING_SYSTEM_simplified_abstract_(Tokyo_Electron_Limited)&oldid=65807>.
MHRA style
WikiPatents contributors, '18515426. SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM simplified abstract (Tokyo Electron Limited)', WikiPatents, , 6 June 2024, 04:19 UTC, <http://wikipatents.org/index.php?title=18515426._SUBSTRATE_PROCESSING_METHOD_AND_SUBSTRATE_PROCESSING_SYSTEM_simplified_abstract_(Tokyo_Electron_Limited)&oldid=65807> [accessed 28 June 2024]
Chicago style
WikiPatents contributors, "18515426. SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM simplified abstract (Tokyo Electron Limited)," WikiPatents, , http://wikipatents.org/index.php?title=18515426._SUBSTRATE_PROCESSING_METHOD_AND_SUBSTRATE_PROCESSING_SYSTEM_simplified_abstract_(Tokyo_Electron_Limited)&oldid=65807 (accessed June 28, 2024).
CBE/CSE style
WikiPatents contributors. 18515426. SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM simplified abstract (Tokyo Electron Limited) [Internet]. WikiPatents, ; 2024 Jun 6, 04:19 UTC [cited 2024 Jun 28]. Available from: http://wikipatents.org/index.php?title=18515426._SUBSTRATE_PROCESSING_METHOD_AND_SUBSTRATE_PROCESSING_SYSTEM_simplified_abstract_(Tokyo_Electron_Limited)&oldid=65807.
Bluebook style
18515426. SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM simplified abstract (Tokyo Electron Limited), http://wikipatents.org/index.php?title=18515426._SUBSTRATE_PROCESSING_METHOD_AND_SUBSTRATE_PROCESSING_SYSTEM_simplified_abstract_(Tokyo_Electron_Limited)&oldid=65807 (last visited June 28, 2024).
BibTeX entry
@misc{ wiki:xxx,
author = "WikiPatents",
title = "18515426. SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM simplified abstract (Tokyo Electron Limited) --- WikiPatents{,} ",
year = "2024",
url = "http://wikipatents.org/index.php?title=18515426._SUBSTRATE_PROCESSING_METHOD_AND_SUBSTRATE_PROCESSING_SYSTEM_simplified_abstract_(Tokyo_Electron_Limited)&oldid=65807",
note = "[Online; accessed 28-June-2024]"
}
When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx,
author = "WikiPatents",
title = "18515426. SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM simplified abstract (Tokyo Electron Limited) --- WikiPatents{,} ",
year = "2024",
url = "\url{http://wikipatents.org/index.php?title=18515426._SUBSTRATE_PROCESSING_METHOD_AND_SUBSTRATE_PROCESSING_SYSTEM_simplified_abstract_(Tokyo_Electron_Limited)&oldid=65807}",
note = "[Online; accessed 28-June-2024]"
}
