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Bibliographic details for 18523455. OXIDATION CONFORMALITY IMPROVEMENT WITH IN-SITU INTEGRATED PROCESSING simplified abstract (Applied Materials, Inc.)
- Page name: 18523455. OXIDATION CONFORMALITY IMPROVEMENT WITH IN-SITU INTEGRATED PROCESSING simplified abstract (Applied Materials, Inc.)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 6 June 2024 03:48 UTC
- Date retrieved: 4 July 2024 19:19 UTC
- Permanent URL: http://wikipatents.org/index.php?title=18523455._OXIDATION_CONFORMALITY_IMPROVEMENT_WITH_IN-SITU_INTEGRATED_PROCESSING_simplified_abstract_(Applied_Materials,_Inc.)&oldid=65492
- Page Version ID: 65492
Citation styles for 18523455. OXIDATION CONFORMALITY IMPROVEMENT WITH IN-SITU INTEGRATED PROCESSING simplified abstract (Applied Materials, Inc.)
APA style
18523455. OXIDATION CONFORMALITY IMPROVEMENT WITH IN-SITU INTEGRATED PROCESSING simplified abstract (Applied Materials, Inc.). (2024, June 6). WikiPatents, . Retrieved 19:19, July 4, 2024 from http://wikipatents.org/index.php?title=18523455._OXIDATION_CONFORMALITY_IMPROVEMENT_WITH_IN-SITU_INTEGRATED_PROCESSING_simplified_abstract_(Applied_Materials,_Inc.)&oldid=65492.
MLA style
"18523455. OXIDATION CONFORMALITY IMPROVEMENT WITH IN-SITU INTEGRATED PROCESSING simplified abstract (Applied Materials, Inc.)." WikiPatents, . 6 Jun 2024, 03:48 UTC. 4 Jul 2024, 19:19 <http://wikipatents.org/index.php?title=18523455._OXIDATION_CONFORMALITY_IMPROVEMENT_WITH_IN-SITU_INTEGRATED_PROCESSING_simplified_abstract_(Applied_Materials,_Inc.)&oldid=65492>.
MHRA style
WikiPatents contributors, '18523455. OXIDATION CONFORMALITY IMPROVEMENT WITH IN-SITU INTEGRATED PROCESSING simplified abstract (Applied Materials, Inc.)', WikiPatents, , 6 June 2024, 03:48 UTC, <http://wikipatents.org/index.php?title=18523455._OXIDATION_CONFORMALITY_IMPROVEMENT_WITH_IN-SITU_INTEGRATED_PROCESSING_simplified_abstract_(Applied_Materials,_Inc.)&oldid=65492> [accessed 4 July 2024]
Chicago style
WikiPatents contributors, "18523455. OXIDATION CONFORMALITY IMPROVEMENT WITH IN-SITU INTEGRATED PROCESSING simplified abstract (Applied Materials, Inc.)," WikiPatents, , http://wikipatents.org/index.php?title=18523455._OXIDATION_CONFORMALITY_IMPROVEMENT_WITH_IN-SITU_INTEGRATED_PROCESSING_simplified_abstract_(Applied_Materials,_Inc.)&oldid=65492 (accessed July 4, 2024).
CBE/CSE style
WikiPatents contributors. 18523455. OXIDATION CONFORMALITY IMPROVEMENT WITH IN-SITU INTEGRATED PROCESSING simplified abstract (Applied Materials, Inc.) [Internet]. WikiPatents, ; 2024 Jun 6, 03:48 UTC [cited 2024 Jul 4]. Available from: http://wikipatents.org/index.php?title=18523455._OXIDATION_CONFORMALITY_IMPROVEMENT_WITH_IN-SITU_INTEGRATED_PROCESSING_simplified_abstract_(Applied_Materials,_Inc.)&oldid=65492.
Bluebook style
18523455. OXIDATION CONFORMALITY IMPROVEMENT WITH IN-SITU INTEGRATED PROCESSING simplified abstract (Applied Materials, Inc.), http://wikipatents.org/index.php?title=18523455._OXIDATION_CONFORMALITY_IMPROVEMENT_WITH_IN-SITU_INTEGRATED_PROCESSING_simplified_abstract_(Applied_Materials,_Inc.)&oldid=65492 (last visited July 4, 2024).
BibTeX entry
@misc{ wiki:xxx, author = "WikiPatents", title = "18523455. OXIDATION CONFORMALITY IMPROVEMENT WITH IN-SITU INTEGRATED PROCESSING simplified abstract (Applied Materials, Inc.) --- WikiPatents{,} ", year = "2024", url = "http://wikipatents.org/index.php?title=18523455._OXIDATION_CONFORMALITY_IMPROVEMENT_WITH_IN-SITU_INTEGRATED_PROCESSING_simplified_abstract_(Applied_Materials,_Inc.)&oldid=65492", note = "[Online; accessed 4-July-2024]" }
When using the LaTeX package url (\usepackage{url}
somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx, author = "WikiPatents", title = "18523455. OXIDATION CONFORMALITY IMPROVEMENT WITH IN-SITU INTEGRATED PROCESSING simplified abstract (Applied Materials, Inc.) --- WikiPatents{,} ", year = "2024", url = "\url{http://wikipatents.org/index.php?title=18523455._OXIDATION_CONFORMALITY_IMPROVEMENT_WITH_IN-SITU_INTEGRATED_PROCESSING_simplified_abstract_(Applied_Materials,_Inc.)&oldid=65492}", note = "[Online; accessed 4-July-2024]" }