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Bibliographic details for 18070010. GAS RECYCLING SYSTEMS, SUBSTRATE PROCESSING SYSTEMS, AND RELATED APPARATUS AND METHODS FOR SEMICONDUCTOR MANUFACTURING simplified abstract (Applied Materials, Inc.)

Citation styles for 18070010. GAS RECYCLING SYSTEMS, SUBSTRATE PROCESSING SYSTEMS, AND RELATED APPARATUS AND METHODS FOR SEMICONDUCTOR MANUFACTURING simplified abstract (Applied Materials, Inc.)

APA style

18070010. GAS RECYCLING SYSTEMS, SUBSTRATE PROCESSING SYSTEMS, AND RELATED APPARATUS AND METHODS FOR SEMICONDUCTOR MANUFACTURING simplified abstract (Applied Materials, Inc.). (2024, June 6). WikiPatents, . Retrieved 02:52, June 28, 2024 from http://wikipatents.org/index.php?title=18070010._GAS_RECYCLING_SYSTEMS,_SUBSTRATE_PROCESSING_SYSTEMS,_AND_RELATED_APPARATUS_AND_METHODS_FOR_SEMICONDUCTOR_MANUFACTURING_simplified_abstract_(Applied_Materials,_Inc.)&oldid=65480.

MLA style

"18070010. GAS RECYCLING SYSTEMS, SUBSTRATE PROCESSING SYSTEMS, AND RELATED APPARATUS AND METHODS FOR SEMICONDUCTOR MANUFACTURING simplified abstract (Applied Materials, Inc.)." WikiPatents, . 6 Jun 2024, 03:47 UTC. 28 Jun 2024, 02:52 <http://wikipatents.org/index.php?title=18070010._GAS_RECYCLING_SYSTEMS,_SUBSTRATE_PROCESSING_SYSTEMS,_AND_RELATED_APPARATUS_AND_METHODS_FOR_SEMICONDUCTOR_MANUFACTURING_simplified_abstract_(Applied_Materials,_Inc.)&oldid=65480>.

MHRA style

WikiPatents contributors, '18070010. GAS RECYCLING SYSTEMS, SUBSTRATE PROCESSING SYSTEMS, AND RELATED APPARATUS AND METHODS FOR SEMICONDUCTOR MANUFACTURING simplified abstract (Applied Materials, Inc.)', WikiPatents, , 6 June 2024, 03:47 UTC, <http://wikipatents.org/index.php?title=18070010._GAS_RECYCLING_SYSTEMS,_SUBSTRATE_PROCESSING_SYSTEMS,_AND_RELATED_APPARATUS_AND_METHODS_FOR_SEMICONDUCTOR_MANUFACTURING_simplified_abstract_(Applied_Materials,_Inc.)&oldid=65480> [accessed 28 June 2024]

Chicago style

WikiPatents contributors, "18070010. GAS RECYCLING SYSTEMS, SUBSTRATE PROCESSING SYSTEMS, AND RELATED APPARATUS AND METHODS FOR SEMICONDUCTOR MANUFACTURING simplified abstract (Applied Materials, Inc.)," WikiPatents, , http://wikipatents.org/index.php?title=18070010._GAS_RECYCLING_SYSTEMS,_SUBSTRATE_PROCESSING_SYSTEMS,_AND_RELATED_APPARATUS_AND_METHODS_FOR_SEMICONDUCTOR_MANUFACTURING_simplified_abstract_(Applied_Materials,_Inc.)&oldid=65480 (accessed June 28, 2024).

CBE/CSE style

WikiPatents contributors. 18070010. GAS RECYCLING SYSTEMS, SUBSTRATE PROCESSING SYSTEMS, AND RELATED APPARATUS AND METHODS FOR SEMICONDUCTOR MANUFACTURING simplified abstract (Applied Materials, Inc.) [Internet]. WikiPatents, ; 2024 Jun 6, 03:47 UTC [cited 2024 Jun 28]. Available from: http://wikipatents.org/index.php?title=18070010._GAS_RECYCLING_SYSTEMS,_SUBSTRATE_PROCESSING_SYSTEMS,_AND_RELATED_APPARATUS_AND_METHODS_FOR_SEMICONDUCTOR_MANUFACTURING_simplified_abstract_(Applied_Materials,_Inc.)&oldid=65480.

Bluebook style

18070010. GAS RECYCLING SYSTEMS, SUBSTRATE PROCESSING SYSTEMS, AND RELATED APPARATUS AND METHODS FOR SEMICONDUCTOR MANUFACTURING simplified abstract (Applied Materials, Inc.), http://wikipatents.org/index.php?title=18070010._GAS_RECYCLING_SYSTEMS,_SUBSTRATE_PROCESSING_SYSTEMS,_AND_RELATED_APPARATUS_AND_METHODS_FOR_SEMICONDUCTOR_MANUFACTURING_simplified_abstract_(Applied_Materials,_Inc.)&oldid=65480 (last visited June 28, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18070010. GAS RECYCLING SYSTEMS, SUBSTRATE PROCESSING SYSTEMS, AND RELATED APPARATUS AND METHODS FOR SEMICONDUCTOR MANUFACTURING simplified abstract (Applied Materials, Inc.) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=18070010._GAS_RECYCLING_SYSTEMS,_SUBSTRATE_PROCESSING_SYSTEMS,_AND_RELATED_APPARATUS_AND_METHODS_FOR_SEMICONDUCTOR_MANUFACTURING_simplified_abstract_(Applied_Materials,_Inc.)&oldid=65480",
   note = "[Online; accessed 28-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18070010. GAS RECYCLING SYSTEMS, SUBSTRATE PROCESSING SYSTEMS, AND RELATED APPARATUS AND METHODS FOR SEMICONDUCTOR MANUFACTURING simplified abstract (Applied Materials, Inc.) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=18070010._GAS_RECYCLING_SYSTEMS,_SUBSTRATE_PROCESSING_SYSTEMS,_AND_RELATED_APPARATUS_AND_METHODS_FOR_SEMICONDUCTOR_MANUFACTURING_simplified_abstract_(Applied_Materials,_Inc.)&oldid=65480}",
   note = "[Online; accessed 28-June-2024]"
 }


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