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Bibliographic details for 18412173. FLUORINE INCORPORATION METHOD FOR NANOSHEET simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.)

Citation styles for 18412173. FLUORINE INCORPORATION METHOD FOR NANOSHEET simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.)

APA style

18412173. FLUORINE INCORPORATION METHOD FOR NANOSHEET simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.). (2024, June 6). WikiPatents, . Retrieved 16:23, June 28, 2024 from http://wikipatents.org/index.php?title=18412173._FLUORINE_INCORPORATION_METHOD_FOR_NANOSHEET_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=64680.

MLA style

"18412173. FLUORINE INCORPORATION METHOD FOR NANOSHEET simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.)." WikiPatents, . 6 Jun 2024, 02:20 UTC. 28 Jun 2024, 16:23 <http://wikipatents.org/index.php?title=18412173._FLUORINE_INCORPORATION_METHOD_FOR_NANOSHEET_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=64680>.

MHRA style

WikiPatents contributors, '18412173. FLUORINE INCORPORATION METHOD FOR NANOSHEET simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.)', WikiPatents, , 6 June 2024, 02:20 UTC, <http://wikipatents.org/index.php?title=18412173._FLUORINE_INCORPORATION_METHOD_FOR_NANOSHEET_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=64680> [accessed 28 June 2024]

Chicago style

WikiPatents contributors, "18412173. FLUORINE INCORPORATION METHOD FOR NANOSHEET simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.)," WikiPatents, , http://wikipatents.org/index.php?title=18412173._FLUORINE_INCORPORATION_METHOD_FOR_NANOSHEET_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=64680 (accessed June 28, 2024).

CBE/CSE style

WikiPatents contributors. 18412173. FLUORINE INCORPORATION METHOD FOR NANOSHEET simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.) [Internet]. WikiPatents, ; 2024 Jun 6, 02:20 UTC [cited 2024 Jun 28]. Available from: http://wikipatents.org/index.php?title=18412173._FLUORINE_INCORPORATION_METHOD_FOR_NANOSHEET_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=64680.

Bluebook style

18412173. FLUORINE INCORPORATION METHOD FOR NANOSHEET simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.), http://wikipatents.org/index.php?title=18412173._FLUORINE_INCORPORATION_METHOD_FOR_NANOSHEET_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=64680 (last visited June 28, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18412173. FLUORINE INCORPORATION METHOD FOR NANOSHEET simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=18412173._FLUORINE_INCORPORATION_METHOD_FOR_NANOSHEET_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=64680",
   note = "[Online; accessed 28-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18412173. FLUORINE INCORPORATION METHOD FOR NANOSHEET simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=18412173._FLUORINE_INCORPORATION_METHOD_FOR_NANOSHEET_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=64680}",
   note = "[Online; accessed 28-June-2024]"
 }


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