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Bibliographic details for 18520047. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (Samsung Electronics Co., Ltd.)
- Page name: 18520047. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (Samsung Electronics Co., Ltd.)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 31 May 2024 08:43 UTC
- Date retrieved: 29 June 2024 05:06 UTC
- Permanent URL: http://wikipatents.org/index.php?title=18520047._SUBSTRATE_PROCESSING_APPARATUS_AND_SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=63742
- Page Version ID: 63742
Citation styles for 18520047. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (Samsung Electronics Co., Ltd.)
APA style
18520047. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (Samsung Electronics Co., Ltd.). (2024, May 31). WikiPatents, . Retrieved 05:06, June 29, 2024 from http://wikipatents.org/index.php?title=18520047._SUBSTRATE_PROCESSING_APPARATUS_AND_SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=63742.
MLA style
"18520047. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (Samsung Electronics Co., Ltd.)." WikiPatents, . 31 May 2024, 08:43 UTC. 29 Jun 2024, 05:06 <http://wikipatents.org/index.php?title=18520047._SUBSTRATE_PROCESSING_APPARATUS_AND_SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=63742>.
MHRA style
WikiPatents contributors, '18520047. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (Samsung Electronics Co., Ltd.)', WikiPatents, , 31 May 2024, 08:43 UTC, <http://wikipatents.org/index.php?title=18520047._SUBSTRATE_PROCESSING_APPARATUS_AND_SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=63742> [accessed 29 June 2024]
Chicago style
WikiPatents contributors, "18520047. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (Samsung Electronics Co., Ltd.)," WikiPatents, , http://wikipatents.org/index.php?title=18520047._SUBSTRATE_PROCESSING_APPARATUS_AND_SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=63742 (accessed June 29, 2024).
CBE/CSE style
WikiPatents contributors. 18520047. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (Samsung Electronics Co., Ltd.) [Internet]. WikiPatents, ; 2024 May 31, 08:43 UTC [cited 2024 Jun 29]. Available from: http://wikipatents.org/index.php?title=18520047._SUBSTRATE_PROCESSING_APPARATUS_AND_SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=63742.
Bluebook style
18520047. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (Samsung Electronics Co., Ltd.), http://wikipatents.org/index.php?title=18520047._SUBSTRATE_PROCESSING_APPARATUS_AND_SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=63742 (last visited June 29, 2024).
BibTeX entry
@misc{ wiki:xxx, author = "WikiPatents", title = "18520047. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (Samsung Electronics Co., Ltd.) --- WikiPatents{,} ", year = "2024", url = "http://wikipatents.org/index.php?title=18520047._SUBSTRATE_PROCESSING_APPARATUS_AND_SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=63742", note = "[Online; accessed 29-June-2024]" }
When using the LaTeX package url (\usepackage{url}
somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx, author = "WikiPatents", title = "18520047. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (Samsung Electronics Co., Ltd.) --- WikiPatents{,} ", year = "2024", url = "\url{http://wikipatents.org/index.php?title=18520047._SUBSTRATE_PROCESSING_APPARATUS_AND_SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=63742}", note = "[Online; accessed 29-June-2024]" }