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Bibliographic details for 18216142. EUV LIGHT UNIFORMITY CONTROL APPARATUS, EUV EXPOSURE EQUIPMENT INCLUDING THE SAME, AND METHOD OF CONTROLLING EUV LIGHT UNIFORMITY BY USING THE CONTROL APPARATUS simplified abstract (Samsung Electronics Co., Ltd.)

Citation styles for 18216142. EUV LIGHT UNIFORMITY CONTROL APPARATUS, EUV EXPOSURE EQUIPMENT INCLUDING THE SAME, AND METHOD OF CONTROLLING EUV LIGHT UNIFORMITY BY USING THE CONTROL APPARATUS simplified abstract (Samsung Electronics Co., Ltd.)

APA style

18216142. EUV LIGHT UNIFORMITY CONTROL APPARATUS, EUV EXPOSURE EQUIPMENT INCLUDING THE SAME, AND METHOD OF CONTROLLING EUV LIGHT UNIFORMITY BY USING THE CONTROL APPARATUS simplified abstract (Samsung Electronics Co., Ltd.). (2024, May 31). WikiPatents, . Retrieved 05:14, June 29, 2024 from http://wikipatents.org/index.php?title=18216142._EUV_LIGHT_UNIFORMITY_CONTROL_APPARATUS,_EUV_EXPOSURE_EQUIPMENT_INCLUDING_THE_SAME,_AND_METHOD_OF_CONTROLLING_EUV_LIGHT_UNIFORMITY_BY_USING_THE_CONTROL_APPARATUS_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=63701.

MLA style

"18216142. EUV LIGHT UNIFORMITY CONTROL APPARATUS, EUV EXPOSURE EQUIPMENT INCLUDING THE SAME, AND METHOD OF CONTROLLING EUV LIGHT UNIFORMITY BY USING THE CONTROL APPARATUS simplified abstract (Samsung Electronics Co., Ltd.)." WikiPatents, . 31 May 2024, 08:38 UTC. 29 Jun 2024, 05:14 <http://wikipatents.org/index.php?title=18216142._EUV_LIGHT_UNIFORMITY_CONTROL_APPARATUS,_EUV_EXPOSURE_EQUIPMENT_INCLUDING_THE_SAME,_AND_METHOD_OF_CONTROLLING_EUV_LIGHT_UNIFORMITY_BY_USING_THE_CONTROL_APPARATUS_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=63701>.

MHRA style

WikiPatents contributors, '18216142. EUV LIGHT UNIFORMITY CONTROL APPARATUS, EUV EXPOSURE EQUIPMENT INCLUDING THE SAME, AND METHOD OF CONTROLLING EUV LIGHT UNIFORMITY BY USING THE CONTROL APPARATUS simplified abstract (Samsung Electronics Co., Ltd.)', WikiPatents, , 31 May 2024, 08:38 UTC, <http://wikipatents.org/index.php?title=18216142._EUV_LIGHT_UNIFORMITY_CONTROL_APPARATUS,_EUV_EXPOSURE_EQUIPMENT_INCLUDING_THE_SAME,_AND_METHOD_OF_CONTROLLING_EUV_LIGHT_UNIFORMITY_BY_USING_THE_CONTROL_APPARATUS_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=63701> [accessed 29 June 2024]

Chicago style

WikiPatents contributors, "18216142. EUV LIGHT UNIFORMITY CONTROL APPARATUS, EUV EXPOSURE EQUIPMENT INCLUDING THE SAME, AND METHOD OF CONTROLLING EUV LIGHT UNIFORMITY BY USING THE CONTROL APPARATUS simplified abstract (Samsung Electronics Co., Ltd.)," WikiPatents, , http://wikipatents.org/index.php?title=18216142._EUV_LIGHT_UNIFORMITY_CONTROL_APPARATUS,_EUV_EXPOSURE_EQUIPMENT_INCLUDING_THE_SAME,_AND_METHOD_OF_CONTROLLING_EUV_LIGHT_UNIFORMITY_BY_USING_THE_CONTROL_APPARATUS_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=63701 (accessed June 29, 2024).

CBE/CSE style

WikiPatents contributors. 18216142. EUV LIGHT UNIFORMITY CONTROL APPARATUS, EUV EXPOSURE EQUIPMENT INCLUDING THE SAME, AND METHOD OF CONTROLLING EUV LIGHT UNIFORMITY BY USING THE CONTROL APPARATUS simplified abstract (Samsung Electronics Co., Ltd.) [Internet]. WikiPatents, ; 2024 May 31, 08:38 UTC [cited 2024 Jun 29]. Available from: http://wikipatents.org/index.php?title=18216142._EUV_LIGHT_UNIFORMITY_CONTROL_APPARATUS,_EUV_EXPOSURE_EQUIPMENT_INCLUDING_THE_SAME,_AND_METHOD_OF_CONTROLLING_EUV_LIGHT_UNIFORMITY_BY_USING_THE_CONTROL_APPARATUS_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=63701.

Bluebook style

18216142. EUV LIGHT UNIFORMITY CONTROL APPARATUS, EUV EXPOSURE EQUIPMENT INCLUDING THE SAME, AND METHOD OF CONTROLLING EUV LIGHT UNIFORMITY BY USING THE CONTROL APPARATUS simplified abstract (Samsung Electronics Co., Ltd.), http://wikipatents.org/index.php?title=18216142._EUV_LIGHT_UNIFORMITY_CONTROL_APPARATUS,_EUV_EXPOSURE_EQUIPMENT_INCLUDING_THE_SAME,_AND_METHOD_OF_CONTROLLING_EUV_LIGHT_UNIFORMITY_BY_USING_THE_CONTROL_APPARATUS_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=63701 (last visited June 29, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18216142. EUV LIGHT UNIFORMITY CONTROL APPARATUS, EUV EXPOSURE EQUIPMENT INCLUDING THE SAME, AND METHOD OF CONTROLLING EUV LIGHT UNIFORMITY BY USING THE CONTROL APPARATUS simplified abstract (Samsung Electronics Co., Ltd.) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=18216142._EUV_LIGHT_UNIFORMITY_CONTROL_APPARATUS,_EUV_EXPOSURE_EQUIPMENT_INCLUDING_THE_SAME,_AND_METHOD_OF_CONTROLLING_EUV_LIGHT_UNIFORMITY_BY_USING_THE_CONTROL_APPARATUS_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=63701",
   note = "[Online; accessed 29-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18216142. EUV LIGHT UNIFORMITY CONTROL APPARATUS, EUV EXPOSURE EQUIPMENT INCLUDING THE SAME, AND METHOD OF CONTROLLING EUV LIGHT UNIFORMITY BY USING THE CONTROL APPARATUS simplified abstract (Samsung Electronics Co., Ltd.) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=18216142._EUV_LIGHT_UNIFORMITY_CONTROL_APPARATUS,_EUV_EXPOSURE_EQUIPMENT_INCLUDING_THE_SAME,_AND_METHOD_OF_CONTROLLING_EUV_LIGHT_UNIFORMITY_BY_USING_THE_CONTROL_APPARATUS_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=63701}",
   note = "[Online; accessed 29-June-2024]"
 }


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