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Bibliographic details for 18334011. SUBSTRATE PROCESSING BAFFLE, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND PROCESSING APPARATUS FABRICATION METHOD simplified abstract (Samsung Electronics Co., Ltd.)

Citation styles for 18334011. SUBSTRATE PROCESSING BAFFLE, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND PROCESSING APPARATUS FABRICATION METHOD simplified abstract (Samsung Electronics Co., Ltd.)

APA style

18334011. SUBSTRATE PROCESSING BAFFLE, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND PROCESSING APPARATUS FABRICATION METHOD simplified abstract (Samsung Electronics Co., Ltd.). (2024, May 31). WikiPatents, . Retrieved 04:21, July 1, 2024 from http://wikipatents.org/index.php?title=18334011._SUBSTRATE_PROCESSING_BAFFLE,_SUBSTRATE_PROCESSING_APPARATUS_INCLUDING_THE_SAME,_AND_PROCESSING_APPARATUS_FABRICATION_METHOD_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=63692.

MLA style

"18334011. SUBSTRATE PROCESSING BAFFLE, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND PROCESSING APPARATUS FABRICATION METHOD simplified abstract (Samsung Electronics Co., Ltd.)." WikiPatents, . 31 May 2024, 08:37 UTC. 1 Jul 2024, 04:21 <http://wikipatents.org/index.php?title=18334011._SUBSTRATE_PROCESSING_BAFFLE,_SUBSTRATE_PROCESSING_APPARATUS_INCLUDING_THE_SAME,_AND_PROCESSING_APPARATUS_FABRICATION_METHOD_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=63692>.

MHRA style

WikiPatents contributors, '18334011. SUBSTRATE PROCESSING BAFFLE, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND PROCESSING APPARATUS FABRICATION METHOD simplified abstract (Samsung Electronics Co., Ltd.)', WikiPatents, , 31 May 2024, 08:37 UTC, <http://wikipatents.org/index.php?title=18334011._SUBSTRATE_PROCESSING_BAFFLE,_SUBSTRATE_PROCESSING_APPARATUS_INCLUDING_THE_SAME,_AND_PROCESSING_APPARATUS_FABRICATION_METHOD_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=63692> [accessed 1 July 2024]

Chicago style

WikiPatents contributors, "18334011. SUBSTRATE PROCESSING BAFFLE, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND PROCESSING APPARATUS FABRICATION METHOD simplified abstract (Samsung Electronics Co., Ltd.)," WikiPatents, , http://wikipatents.org/index.php?title=18334011._SUBSTRATE_PROCESSING_BAFFLE,_SUBSTRATE_PROCESSING_APPARATUS_INCLUDING_THE_SAME,_AND_PROCESSING_APPARATUS_FABRICATION_METHOD_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=63692 (accessed July 1, 2024).

CBE/CSE style

WikiPatents contributors. 18334011. SUBSTRATE PROCESSING BAFFLE, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND PROCESSING APPARATUS FABRICATION METHOD simplified abstract (Samsung Electronics Co., Ltd.) [Internet]. WikiPatents, ; 2024 May 31, 08:37 UTC [cited 2024 Jul 1]. Available from: http://wikipatents.org/index.php?title=18334011._SUBSTRATE_PROCESSING_BAFFLE,_SUBSTRATE_PROCESSING_APPARATUS_INCLUDING_THE_SAME,_AND_PROCESSING_APPARATUS_FABRICATION_METHOD_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=63692.

Bluebook style

18334011. SUBSTRATE PROCESSING BAFFLE, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND PROCESSING APPARATUS FABRICATION METHOD simplified abstract (Samsung Electronics Co., Ltd.), http://wikipatents.org/index.php?title=18334011._SUBSTRATE_PROCESSING_BAFFLE,_SUBSTRATE_PROCESSING_APPARATUS_INCLUDING_THE_SAME,_AND_PROCESSING_APPARATUS_FABRICATION_METHOD_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=63692 (last visited July 1, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18334011. SUBSTRATE PROCESSING BAFFLE, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND PROCESSING APPARATUS FABRICATION METHOD simplified abstract (Samsung Electronics Co., Ltd.) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=18334011._SUBSTRATE_PROCESSING_BAFFLE,_SUBSTRATE_PROCESSING_APPARATUS_INCLUDING_THE_SAME,_AND_PROCESSING_APPARATUS_FABRICATION_METHOD_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=63692",
   note = "[Online; accessed 1-July-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18334011. SUBSTRATE PROCESSING BAFFLE, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND PROCESSING APPARATUS FABRICATION METHOD simplified abstract (Samsung Electronics Co., Ltd.) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=18334011._SUBSTRATE_PROCESSING_BAFFLE,_SUBSTRATE_PROCESSING_APPARATUS_INCLUDING_THE_SAME,_AND_PROCESSING_APPARATUS_FABRICATION_METHOD_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=63692}",
   note = "[Online; accessed 1-July-2024]"
 }


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