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Bibliographic details for Samsung electronics co., ltd. (20240176247). EUV LIGHT UNIFORMITY CONTROL APPARATUS, EUV EXPOSURE EQUIPMENT INCLUDING THE SAME, AND METHOD OF CONTROLLING EUV LIGHT UNIFORMITY BY USING THE CONTROL APPARATUS simplified abstract

Citation styles for Samsung electronics co., ltd. (20240176247). EUV LIGHT UNIFORMITY CONTROL APPARATUS, EUV EXPOSURE EQUIPMENT INCLUDING THE SAME, AND METHOD OF CONTROLLING EUV LIGHT UNIFORMITY BY USING THE CONTROL APPARATUS simplified abstract

APA style

Samsung electronics co., ltd. (20240176247). EUV LIGHT UNIFORMITY CONTROL APPARATUS, EUV EXPOSURE EQUIPMENT INCLUDING THE SAME, AND METHOD OF CONTROLLING EUV LIGHT UNIFORMITY BY USING THE CONTROL APPARATUS simplified abstract. (2024, May 31). WikiPatents, . Retrieved 05:19, June 29, 2024 from http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240176247)._EUV_LIGHT_UNIFORMITY_CONTROL_APPARATUS,_EUV_EXPOSURE_EQUIPMENT_INCLUDING_THE_SAME,_AND_METHOD_OF_CONTROLLING_EUV_LIGHT_UNIFORMITY_BY_USING_THE_CONTROL_APPARATUS_simplified_abstract&oldid=62572.

MLA style

"Samsung electronics co., ltd. (20240176247). EUV LIGHT UNIFORMITY CONTROL APPARATUS, EUV EXPOSURE EQUIPMENT INCLUDING THE SAME, AND METHOD OF CONTROLLING EUV LIGHT UNIFORMITY BY USING THE CONTROL APPARATUS simplified abstract." WikiPatents, . 31 May 2024, 06:16 UTC. 29 Jun 2024, 05:19 <http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240176247)._EUV_LIGHT_UNIFORMITY_CONTROL_APPARATUS,_EUV_EXPOSURE_EQUIPMENT_INCLUDING_THE_SAME,_AND_METHOD_OF_CONTROLLING_EUV_LIGHT_UNIFORMITY_BY_USING_THE_CONTROL_APPARATUS_simplified_abstract&oldid=62572>.

MHRA style

WikiPatents contributors, 'Samsung electronics co., ltd. (20240176247). EUV LIGHT UNIFORMITY CONTROL APPARATUS, EUV EXPOSURE EQUIPMENT INCLUDING THE SAME, AND METHOD OF CONTROLLING EUV LIGHT UNIFORMITY BY USING THE CONTROL APPARATUS simplified abstract', WikiPatents, , 31 May 2024, 06:16 UTC, <http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240176247)._EUV_LIGHT_UNIFORMITY_CONTROL_APPARATUS,_EUV_EXPOSURE_EQUIPMENT_INCLUDING_THE_SAME,_AND_METHOD_OF_CONTROLLING_EUV_LIGHT_UNIFORMITY_BY_USING_THE_CONTROL_APPARATUS_simplified_abstract&oldid=62572> [accessed 29 June 2024]

Chicago style

WikiPatents contributors, "Samsung electronics co., ltd. (20240176247). EUV LIGHT UNIFORMITY CONTROL APPARATUS, EUV EXPOSURE EQUIPMENT INCLUDING THE SAME, AND METHOD OF CONTROLLING EUV LIGHT UNIFORMITY BY USING THE CONTROL APPARATUS simplified abstract," WikiPatents, , http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240176247)._EUV_LIGHT_UNIFORMITY_CONTROL_APPARATUS,_EUV_EXPOSURE_EQUIPMENT_INCLUDING_THE_SAME,_AND_METHOD_OF_CONTROLLING_EUV_LIGHT_UNIFORMITY_BY_USING_THE_CONTROL_APPARATUS_simplified_abstract&oldid=62572 (accessed June 29, 2024).

CBE/CSE style

WikiPatents contributors. Samsung electronics co., ltd. (20240176247). EUV LIGHT UNIFORMITY CONTROL APPARATUS, EUV EXPOSURE EQUIPMENT INCLUDING THE SAME, AND METHOD OF CONTROLLING EUV LIGHT UNIFORMITY BY USING THE CONTROL APPARATUS simplified abstract [Internet]. WikiPatents, ; 2024 May 31, 06:16 UTC [cited 2024 Jun 29]. Available from: http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240176247)._EUV_LIGHT_UNIFORMITY_CONTROL_APPARATUS,_EUV_EXPOSURE_EQUIPMENT_INCLUDING_THE_SAME,_AND_METHOD_OF_CONTROLLING_EUV_LIGHT_UNIFORMITY_BY_USING_THE_CONTROL_APPARATUS_simplified_abstract&oldid=62572.

Bluebook style

Samsung electronics co., ltd. (20240176247). EUV LIGHT UNIFORMITY CONTROL APPARATUS, EUV EXPOSURE EQUIPMENT INCLUDING THE SAME, AND METHOD OF CONTROLLING EUV LIGHT UNIFORMITY BY USING THE CONTROL APPARATUS simplified abstract, http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240176247)._EUV_LIGHT_UNIFORMITY_CONTROL_APPARATUS,_EUV_EXPOSURE_EQUIPMENT_INCLUDING_THE_SAME,_AND_METHOD_OF_CONTROLLING_EUV_LIGHT_UNIFORMITY_BY_USING_THE_CONTROL_APPARATUS_simplified_abstract&oldid=62572 (last visited June 29, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "Samsung electronics co., ltd. (20240176247). EUV LIGHT UNIFORMITY CONTROL APPARATUS, EUV EXPOSURE EQUIPMENT INCLUDING THE SAME, AND METHOD OF CONTROLLING EUV LIGHT UNIFORMITY BY USING THE CONTROL APPARATUS simplified abstract --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240176247)._EUV_LIGHT_UNIFORMITY_CONTROL_APPARATUS,_EUV_EXPOSURE_EQUIPMENT_INCLUDING_THE_SAME,_AND_METHOD_OF_CONTROLLING_EUV_LIGHT_UNIFORMITY_BY_USING_THE_CONTROL_APPARATUS_simplified_abstract&oldid=62572",
   note = "[Online; accessed 29-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "Samsung electronics co., ltd. (20240176247). EUV LIGHT UNIFORMITY CONTROL APPARATUS, EUV EXPOSURE EQUIPMENT INCLUDING THE SAME, AND METHOD OF CONTROLLING EUV LIGHT UNIFORMITY BY USING THE CONTROL APPARATUS simplified abstract --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240176247)._EUV_LIGHT_UNIFORMITY_CONTROL_APPARATUS,_EUV_EXPOSURE_EQUIPMENT_INCLUDING_THE_SAME,_AND_METHOD_OF_CONTROLLING_EUV_LIGHT_UNIFORMITY_BY_USING_THE_CONTROL_APPARATUS_simplified_abstract&oldid=62572}",
   note = "[Online; accessed 29-June-2024]"
 }


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