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Bibliographic details for 17984772. REDUCING ASPECT RATIO DEPENDENT ETCH WITH DIRECT CURRENT BIAS PULSING simplified abstract (Applied Materials, Inc.)

Citation styles for 17984772. REDUCING ASPECT RATIO DEPENDENT ETCH WITH DIRECT CURRENT BIAS PULSING simplified abstract (Applied Materials, Inc.)

APA style

17984772. REDUCING ASPECT RATIO DEPENDENT ETCH WITH DIRECT CURRENT BIAS PULSING simplified abstract (Applied Materials, Inc.). (2024, May 30). WikiPatents, . Retrieved 13:17, July 7, 2024 from http://wikipatents.org/index.php?title=17984772._REDUCING_ASPECT_RATIO_DEPENDENT_ETCH_WITH_DIRECT_CURRENT_BIAS_PULSING_simplified_abstract_(Applied_Materials,_Inc.)&oldid=62452.

MLA style

"17984772. REDUCING ASPECT RATIO DEPENDENT ETCH WITH DIRECT CURRENT BIAS PULSING simplified abstract (Applied Materials, Inc.)." WikiPatents, . 30 May 2024, 04:05 UTC. 7 Jul 2024, 13:17 <http://wikipatents.org/index.php?title=17984772._REDUCING_ASPECT_RATIO_DEPENDENT_ETCH_WITH_DIRECT_CURRENT_BIAS_PULSING_simplified_abstract_(Applied_Materials,_Inc.)&oldid=62452>.

MHRA style

WikiPatents contributors, '17984772. REDUCING ASPECT RATIO DEPENDENT ETCH WITH DIRECT CURRENT BIAS PULSING simplified abstract (Applied Materials, Inc.)', WikiPatents, , 30 May 2024, 04:05 UTC, <http://wikipatents.org/index.php?title=17984772._REDUCING_ASPECT_RATIO_DEPENDENT_ETCH_WITH_DIRECT_CURRENT_BIAS_PULSING_simplified_abstract_(Applied_Materials,_Inc.)&oldid=62452> [accessed 7 July 2024]

Chicago style

WikiPatents contributors, "17984772. REDUCING ASPECT RATIO DEPENDENT ETCH WITH DIRECT CURRENT BIAS PULSING simplified abstract (Applied Materials, Inc.)," WikiPatents, , http://wikipatents.org/index.php?title=17984772._REDUCING_ASPECT_RATIO_DEPENDENT_ETCH_WITH_DIRECT_CURRENT_BIAS_PULSING_simplified_abstract_(Applied_Materials,_Inc.)&oldid=62452 (accessed July 7, 2024).

CBE/CSE style

WikiPatents contributors. 17984772. REDUCING ASPECT RATIO DEPENDENT ETCH WITH DIRECT CURRENT BIAS PULSING simplified abstract (Applied Materials, Inc.) [Internet]. WikiPatents, ; 2024 May 30, 04:05 UTC [cited 2024 Jul 7]. Available from: http://wikipatents.org/index.php?title=17984772._REDUCING_ASPECT_RATIO_DEPENDENT_ETCH_WITH_DIRECT_CURRENT_BIAS_PULSING_simplified_abstract_(Applied_Materials,_Inc.)&oldid=62452.

Bluebook style

17984772. REDUCING ASPECT RATIO DEPENDENT ETCH WITH DIRECT CURRENT BIAS PULSING simplified abstract (Applied Materials, Inc.), http://wikipatents.org/index.php?title=17984772._REDUCING_ASPECT_RATIO_DEPENDENT_ETCH_WITH_DIRECT_CURRENT_BIAS_PULSING_simplified_abstract_(Applied_Materials,_Inc.)&oldid=62452 (last visited July 7, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "17984772. REDUCING ASPECT RATIO DEPENDENT ETCH WITH DIRECT CURRENT BIAS PULSING simplified abstract (Applied Materials, Inc.) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=17984772._REDUCING_ASPECT_RATIO_DEPENDENT_ETCH_WITH_DIRECT_CURRENT_BIAS_PULSING_simplified_abstract_(Applied_Materials,_Inc.)&oldid=62452",
   note = "[Online; accessed 7-July-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "17984772. REDUCING ASPECT RATIO DEPENDENT ETCH WITH DIRECT CURRENT BIAS PULSING simplified abstract (Applied Materials, Inc.) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=17984772._REDUCING_ASPECT_RATIO_DEPENDENT_ETCH_WITH_DIRECT_CURRENT_BIAS_PULSING_simplified_abstract_(Applied_Materials,_Inc.)&oldid=62452}",
   note = "[Online; accessed 7-July-2024]"
 }


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