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Bibliographic details for 18222897. INTEGRATED SOLUTION WITH LOW TEMPERATURE DRY DEVELOP FOR EUV PHOTORESIST simplified abstract (Applied Materials, Inc.)

Citation styles for 18222897. INTEGRATED SOLUTION WITH LOW TEMPERATURE DRY DEVELOP FOR EUV PHOTORESIST simplified abstract (Applied Materials, Inc.)

APA style

18222897. INTEGRATED SOLUTION WITH LOW TEMPERATURE DRY DEVELOP FOR EUV PHOTORESIST simplified abstract (Applied Materials, Inc.). (2024, May 30). WikiPatents, . Retrieved 05:39, June 29, 2024 from http://wikipatents.org/index.php?title=18222897._INTEGRATED_SOLUTION_WITH_LOW_TEMPERATURE_DRY_DEVELOP_FOR_EUV_PHOTORESIST_simplified_abstract_(Applied_Materials,_Inc.)&oldid=62450.

MLA style

"18222897. INTEGRATED SOLUTION WITH LOW TEMPERATURE DRY DEVELOP FOR EUV PHOTORESIST simplified abstract (Applied Materials, Inc.)." WikiPatents, . 30 May 2024, 04:05 UTC. 29 Jun 2024, 05:39 <http://wikipatents.org/index.php?title=18222897._INTEGRATED_SOLUTION_WITH_LOW_TEMPERATURE_DRY_DEVELOP_FOR_EUV_PHOTORESIST_simplified_abstract_(Applied_Materials,_Inc.)&oldid=62450>.

MHRA style

WikiPatents contributors, '18222897. INTEGRATED SOLUTION WITH LOW TEMPERATURE DRY DEVELOP FOR EUV PHOTORESIST simplified abstract (Applied Materials, Inc.)', WikiPatents, , 30 May 2024, 04:05 UTC, <http://wikipatents.org/index.php?title=18222897._INTEGRATED_SOLUTION_WITH_LOW_TEMPERATURE_DRY_DEVELOP_FOR_EUV_PHOTORESIST_simplified_abstract_(Applied_Materials,_Inc.)&oldid=62450> [accessed 29 June 2024]

Chicago style

WikiPatents contributors, "18222897. INTEGRATED SOLUTION WITH LOW TEMPERATURE DRY DEVELOP FOR EUV PHOTORESIST simplified abstract (Applied Materials, Inc.)," WikiPatents, , http://wikipatents.org/index.php?title=18222897._INTEGRATED_SOLUTION_WITH_LOW_TEMPERATURE_DRY_DEVELOP_FOR_EUV_PHOTORESIST_simplified_abstract_(Applied_Materials,_Inc.)&oldid=62450 (accessed June 29, 2024).

CBE/CSE style

WikiPatents contributors. 18222897. INTEGRATED SOLUTION WITH LOW TEMPERATURE DRY DEVELOP FOR EUV PHOTORESIST simplified abstract (Applied Materials, Inc.) [Internet]. WikiPatents, ; 2024 May 30, 04:05 UTC [cited 2024 Jun 29]. Available from: http://wikipatents.org/index.php?title=18222897._INTEGRATED_SOLUTION_WITH_LOW_TEMPERATURE_DRY_DEVELOP_FOR_EUV_PHOTORESIST_simplified_abstract_(Applied_Materials,_Inc.)&oldid=62450.

Bluebook style

18222897. INTEGRATED SOLUTION WITH LOW TEMPERATURE DRY DEVELOP FOR EUV PHOTORESIST simplified abstract (Applied Materials, Inc.), http://wikipatents.org/index.php?title=18222897._INTEGRATED_SOLUTION_WITH_LOW_TEMPERATURE_DRY_DEVELOP_FOR_EUV_PHOTORESIST_simplified_abstract_(Applied_Materials,_Inc.)&oldid=62450 (last visited June 29, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18222897. INTEGRATED SOLUTION WITH LOW TEMPERATURE DRY DEVELOP FOR EUV PHOTORESIST simplified abstract (Applied Materials, Inc.) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=18222897._INTEGRATED_SOLUTION_WITH_LOW_TEMPERATURE_DRY_DEVELOP_FOR_EUV_PHOTORESIST_simplified_abstract_(Applied_Materials,_Inc.)&oldid=62450",
   note = "[Online; accessed 29-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18222897. INTEGRATED SOLUTION WITH LOW TEMPERATURE DRY DEVELOP FOR EUV PHOTORESIST simplified abstract (Applied Materials, Inc.) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=18222897._INTEGRATED_SOLUTION_WITH_LOW_TEMPERATURE_DRY_DEVELOP_FOR_EUV_PHOTORESIST_simplified_abstract_(Applied_Materials,_Inc.)&oldid=62450}",
   note = "[Online; accessed 29-June-2024]"
 }


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