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Bibliographic details for 18421783. METHOD AND APPARATUS FOR CONTROLLING DROPLET IN EXTREME ULTRAVIOLET LIGHT SOURCE simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)

Citation styles for 18421783. METHOD AND APPARATUS FOR CONTROLLING DROPLET IN EXTREME ULTRAVIOLET LIGHT SOURCE simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)

APA style

18421783. METHOD AND APPARATUS FOR CONTROLLING DROPLET IN EXTREME ULTRAVIOLET LIGHT SOURCE simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.). (2024, May 24). WikiPatents, . Retrieved 11:33, June 26, 2024 from http://wikipatents.org/index.php?title=18421783._METHOD_AND_APPARATUS_FOR_CONTROLLING_DROPLET_IN_EXTREME_ULTRAVIOLET_LIGHT_SOURCE_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=61263.

MLA style

"18421783. METHOD AND APPARATUS FOR CONTROLLING DROPLET IN EXTREME ULTRAVIOLET LIGHT SOURCE simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)." WikiPatents, . 24 May 2024, 07:08 UTC. 26 Jun 2024, 11:33 <http://wikipatents.org/index.php?title=18421783._METHOD_AND_APPARATUS_FOR_CONTROLLING_DROPLET_IN_EXTREME_ULTRAVIOLET_LIGHT_SOURCE_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=61263>.

MHRA style

WikiPatents contributors, '18421783. METHOD AND APPARATUS FOR CONTROLLING DROPLET IN EXTREME ULTRAVIOLET LIGHT SOURCE simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)', WikiPatents, , 24 May 2024, 07:08 UTC, <http://wikipatents.org/index.php?title=18421783._METHOD_AND_APPARATUS_FOR_CONTROLLING_DROPLET_IN_EXTREME_ULTRAVIOLET_LIGHT_SOURCE_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=61263> [accessed 26 June 2024]

Chicago style

WikiPatents contributors, "18421783. METHOD AND APPARATUS FOR CONTROLLING DROPLET IN EXTREME ULTRAVIOLET LIGHT SOURCE simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)," WikiPatents, , http://wikipatents.org/index.php?title=18421783._METHOD_AND_APPARATUS_FOR_CONTROLLING_DROPLET_IN_EXTREME_ULTRAVIOLET_LIGHT_SOURCE_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=61263 (accessed June 26, 2024).

CBE/CSE style

WikiPatents contributors. 18421783. METHOD AND APPARATUS FOR CONTROLLING DROPLET IN EXTREME ULTRAVIOLET LIGHT SOURCE simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.) [Internet]. WikiPatents, ; 2024 May 24, 07:08 UTC [cited 2024 Jun 26]. Available from: http://wikipatents.org/index.php?title=18421783._METHOD_AND_APPARATUS_FOR_CONTROLLING_DROPLET_IN_EXTREME_ULTRAVIOLET_LIGHT_SOURCE_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=61263.

Bluebook style

18421783. METHOD AND APPARATUS FOR CONTROLLING DROPLET IN EXTREME ULTRAVIOLET LIGHT SOURCE simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.), http://wikipatents.org/index.php?title=18421783._METHOD_AND_APPARATUS_FOR_CONTROLLING_DROPLET_IN_EXTREME_ULTRAVIOLET_LIGHT_SOURCE_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=61263 (last visited June 26, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18421783. METHOD AND APPARATUS FOR CONTROLLING DROPLET IN EXTREME ULTRAVIOLET LIGHT SOURCE simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=18421783._METHOD_AND_APPARATUS_FOR_CONTROLLING_DROPLET_IN_EXTREME_ULTRAVIOLET_LIGHT_SOURCE_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=61263",
   note = "[Online; accessed 26-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18421783. METHOD AND APPARATUS FOR CONTROLLING DROPLET IN EXTREME ULTRAVIOLET LIGHT SOURCE simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=18421783._METHOD_AND_APPARATUS_FOR_CONTROLLING_DROPLET_IN_EXTREME_ULTRAVIOLET_LIGHT_SOURCE_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=61263}",
   note = "[Online; accessed 26-June-2024]"
 }


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