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Bibliographic details for Taiwan semiconductor manufacturing co., ltd. (20240162095). DIELECTRIC PROTECTION LAYER IN MIDDLE-OF-LINE INTERCONNECT STRUCTURE MANUFACTURING METHOD simplified abstract

Citation styles for Taiwan semiconductor manufacturing co., ltd. (20240162095). DIELECTRIC PROTECTION LAYER IN MIDDLE-OF-LINE INTERCONNECT STRUCTURE MANUFACTURING METHOD simplified abstract

APA style

Taiwan semiconductor manufacturing co., ltd. (20240162095). DIELECTRIC PROTECTION LAYER IN MIDDLE-OF-LINE INTERCONNECT STRUCTURE MANUFACTURING METHOD simplified abstract. (2024, May 24). WikiPatents, . Retrieved 02:06, June 28, 2024 from http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_co.,_ltd._(20240162095)._DIELECTRIC_PROTECTION_LAYER_IN_MIDDLE-OF-LINE_INTERCONNECT_STRUCTURE_MANUFACTURING_METHOD_simplified_abstract&oldid=60152.

MLA style

"Taiwan semiconductor manufacturing co., ltd. (20240162095). DIELECTRIC PROTECTION LAYER IN MIDDLE-OF-LINE INTERCONNECT STRUCTURE MANUFACTURING METHOD simplified abstract." WikiPatents, . 24 May 2024, 00:55 UTC. 28 Jun 2024, 02:06 <http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_co.,_ltd._(20240162095)._DIELECTRIC_PROTECTION_LAYER_IN_MIDDLE-OF-LINE_INTERCONNECT_STRUCTURE_MANUFACTURING_METHOD_simplified_abstract&oldid=60152>.

MHRA style

WikiPatents contributors, 'Taiwan semiconductor manufacturing co., ltd. (20240162095). DIELECTRIC PROTECTION LAYER IN MIDDLE-OF-LINE INTERCONNECT STRUCTURE MANUFACTURING METHOD simplified abstract', WikiPatents, , 24 May 2024, 00:55 UTC, <http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_co.,_ltd._(20240162095)._DIELECTRIC_PROTECTION_LAYER_IN_MIDDLE-OF-LINE_INTERCONNECT_STRUCTURE_MANUFACTURING_METHOD_simplified_abstract&oldid=60152> [accessed 28 June 2024]

Chicago style

WikiPatents contributors, "Taiwan semiconductor manufacturing co., ltd. (20240162095). DIELECTRIC PROTECTION LAYER IN MIDDLE-OF-LINE INTERCONNECT STRUCTURE MANUFACTURING METHOD simplified abstract," WikiPatents, , http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_co.,_ltd._(20240162095)._DIELECTRIC_PROTECTION_LAYER_IN_MIDDLE-OF-LINE_INTERCONNECT_STRUCTURE_MANUFACTURING_METHOD_simplified_abstract&oldid=60152 (accessed June 28, 2024).

CBE/CSE style

WikiPatents contributors. Taiwan semiconductor manufacturing co., ltd. (20240162095). DIELECTRIC PROTECTION LAYER IN MIDDLE-OF-LINE INTERCONNECT STRUCTURE MANUFACTURING METHOD simplified abstract [Internet]. WikiPatents, ; 2024 May 24, 00:55 UTC [cited 2024 Jun 28]. Available from: http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_co.,_ltd._(20240162095)._DIELECTRIC_PROTECTION_LAYER_IN_MIDDLE-OF-LINE_INTERCONNECT_STRUCTURE_MANUFACTURING_METHOD_simplified_abstract&oldid=60152.

Bluebook style

Taiwan semiconductor manufacturing co., ltd. (20240162095). DIELECTRIC PROTECTION LAYER IN MIDDLE-OF-LINE INTERCONNECT STRUCTURE MANUFACTURING METHOD simplified abstract, http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_co.,_ltd._(20240162095)._DIELECTRIC_PROTECTION_LAYER_IN_MIDDLE-OF-LINE_INTERCONNECT_STRUCTURE_MANUFACTURING_METHOD_simplified_abstract&oldid=60152 (last visited June 28, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "Taiwan semiconductor manufacturing co., ltd. (20240162095). DIELECTRIC PROTECTION LAYER IN MIDDLE-OF-LINE INTERCONNECT STRUCTURE MANUFACTURING METHOD simplified abstract --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_co.,_ltd._(20240162095)._DIELECTRIC_PROTECTION_LAYER_IN_MIDDLE-OF-LINE_INTERCONNECT_STRUCTURE_MANUFACTURING_METHOD_simplified_abstract&oldid=60152",
   note = "[Online; accessed 28-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "Taiwan semiconductor manufacturing co., ltd. (20240162095). DIELECTRIC PROTECTION LAYER IN MIDDLE-OF-LINE INTERCONNECT STRUCTURE MANUFACTURING METHOD simplified abstract --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_co.,_ltd._(20240162095)._DIELECTRIC_PROTECTION_LAYER_IN_MIDDLE-OF-LINE_INTERCONNECT_STRUCTURE_MANUFACTURING_METHOD_simplified_abstract&oldid=60152}",
   note = "[Online; accessed 28-June-2024]"
 }


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