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Bibliographic details for Taiwan semiconductor manufacturing co., ltd. (20240160106). METHOD AND APPARATUS FOR CONTROLLING DROPLET IN EXTREME ULTRAVIOLET LIGHT SOURCE simplified abstract

Citation styles for Taiwan semiconductor manufacturing co., ltd. (20240160106). METHOD AND APPARATUS FOR CONTROLLING DROPLET IN EXTREME ULTRAVIOLET LIGHT SOURCE simplified abstract

APA style

Taiwan semiconductor manufacturing co., ltd. (20240160106). METHOD AND APPARATUS FOR CONTROLLING DROPLET IN EXTREME ULTRAVIOLET LIGHT SOURCE simplified abstract. (2024, May 24). WikiPatents, . Retrieved 10:41, June 26, 2024 from http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_co.,_ltd._(20240160106)._METHOD_AND_APPARATUS_FOR_CONTROLLING_DROPLET_IN_EXTREME_ULTRAVIOLET_LIGHT_SOURCE_simplified_abstract&oldid=60133.

MLA style

"Taiwan semiconductor manufacturing co., ltd. (20240160106). METHOD AND APPARATUS FOR CONTROLLING DROPLET IN EXTREME ULTRAVIOLET LIGHT SOURCE simplified abstract." WikiPatents, . 24 May 2024, 00:52 UTC. 26 Jun 2024, 10:41 <http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_co.,_ltd._(20240160106)._METHOD_AND_APPARATUS_FOR_CONTROLLING_DROPLET_IN_EXTREME_ULTRAVIOLET_LIGHT_SOURCE_simplified_abstract&oldid=60133>.

MHRA style

WikiPatents contributors, 'Taiwan semiconductor manufacturing co., ltd. (20240160106). METHOD AND APPARATUS FOR CONTROLLING DROPLET IN EXTREME ULTRAVIOLET LIGHT SOURCE simplified abstract', WikiPatents, , 24 May 2024, 00:52 UTC, <http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_co.,_ltd._(20240160106)._METHOD_AND_APPARATUS_FOR_CONTROLLING_DROPLET_IN_EXTREME_ULTRAVIOLET_LIGHT_SOURCE_simplified_abstract&oldid=60133> [accessed 26 June 2024]

Chicago style

WikiPatents contributors, "Taiwan semiconductor manufacturing co., ltd. (20240160106). METHOD AND APPARATUS FOR CONTROLLING DROPLET IN EXTREME ULTRAVIOLET LIGHT SOURCE simplified abstract," WikiPatents, , http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_co.,_ltd._(20240160106)._METHOD_AND_APPARATUS_FOR_CONTROLLING_DROPLET_IN_EXTREME_ULTRAVIOLET_LIGHT_SOURCE_simplified_abstract&oldid=60133 (accessed June 26, 2024).

CBE/CSE style

WikiPatents contributors. Taiwan semiconductor manufacturing co., ltd. (20240160106). METHOD AND APPARATUS FOR CONTROLLING DROPLET IN EXTREME ULTRAVIOLET LIGHT SOURCE simplified abstract [Internet]. WikiPatents, ; 2024 May 24, 00:52 UTC [cited 2024 Jun 26]. Available from: http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_co.,_ltd._(20240160106)._METHOD_AND_APPARATUS_FOR_CONTROLLING_DROPLET_IN_EXTREME_ULTRAVIOLET_LIGHT_SOURCE_simplified_abstract&oldid=60133.

Bluebook style

Taiwan semiconductor manufacturing co., ltd. (20240160106). METHOD AND APPARATUS FOR CONTROLLING DROPLET IN EXTREME ULTRAVIOLET LIGHT SOURCE simplified abstract, http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_co.,_ltd._(20240160106)._METHOD_AND_APPARATUS_FOR_CONTROLLING_DROPLET_IN_EXTREME_ULTRAVIOLET_LIGHT_SOURCE_simplified_abstract&oldid=60133 (last visited June 26, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "Taiwan semiconductor manufacturing co., ltd. (20240160106). METHOD AND APPARATUS FOR CONTROLLING DROPLET IN EXTREME ULTRAVIOLET LIGHT SOURCE simplified abstract --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_co.,_ltd._(20240160106)._METHOD_AND_APPARATUS_FOR_CONTROLLING_DROPLET_IN_EXTREME_ULTRAVIOLET_LIGHT_SOURCE_simplified_abstract&oldid=60133",
   note = "[Online; accessed 26-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "Taiwan semiconductor manufacturing co., ltd. (20240160106). METHOD AND APPARATUS FOR CONTROLLING DROPLET IN EXTREME ULTRAVIOLET LIGHT SOURCE simplified abstract --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_co.,_ltd._(20240160106)._METHOD_AND_APPARATUS_FOR_CONTROLLING_DROPLET_IN_EXTREME_ULTRAVIOLET_LIGHT_SOURCE_simplified_abstract&oldid=60133}",
   note = "[Online; accessed 26-June-2024]"
 }


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