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Bibliographic details for Taiwan semiconductor manufacturing co., ltd. (20240160106). METHOD AND APPARATUS FOR CONTROLLING DROPLET IN EXTREME ULTRAVIOLET LIGHT SOURCE simplified abstract
- Page name: Taiwan semiconductor manufacturing co., ltd. (20240160106). METHOD AND APPARATUS FOR CONTROLLING DROPLET IN EXTREME ULTRAVIOLET LIGHT SOURCE simplified abstract
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 24 May 2024 00:52 UTC
- Date retrieved: 29 June 2024 04:45 UTC
- Permanent URL: http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_co.,_ltd._(20240160106)._METHOD_AND_APPARATUS_FOR_CONTROLLING_DROPLET_IN_EXTREME_ULTRAVIOLET_LIGHT_SOURCE_simplified_abstract&oldid=60133
- Page Version ID: 60133
Citation styles for Taiwan semiconductor manufacturing co., ltd. (20240160106). METHOD AND APPARATUS FOR CONTROLLING DROPLET IN EXTREME ULTRAVIOLET LIGHT SOURCE simplified abstract
APA style
Taiwan semiconductor manufacturing co., ltd. (20240160106). METHOD AND APPARATUS FOR CONTROLLING DROPLET IN EXTREME ULTRAVIOLET LIGHT SOURCE simplified abstract. (2024, May 24). WikiPatents, . Retrieved 04:45, June 29, 2024 from http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_co.,_ltd._(20240160106)._METHOD_AND_APPARATUS_FOR_CONTROLLING_DROPLET_IN_EXTREME_ULTRAVIOLET_LIGHT_SOURCE_simplified_abstract&oldid=60133.
MLA style
"Taiwan semiconductor manufacturing co., ltd. (20240160106). METHOD AND APPARATUS FOR CONTROLLING DROPLET IN EXTREME ULTRAVIOLET LIGHT SOURCE simplified abstract." WikiPatents, . 24 May 2024, 00:52 UTC. 29 Jun 2024, 04:45 <http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_co.,_ltd._(20240160106)._METHOD_AND_APPARATUS_FOR_CONTROLLING_DROPLET_IN_EXTREME_ULTRAVIOLET_LIGHT_SOURCE_simplified_abstract&oldid=60133>.
MHRA style
WikiPatents contributors, 'Taiwan semiconductor manufacturing co., ltd. (20240160106). METHOD AND APPARATUS FOR CONTROLLING DROPLET IN EXTREME ULTRAVIOLET LIGHT SOURCE simplified abstract', WikiPatents, , 24 May 2024, 00:52 UTC, <http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_co.,_ltd._(20240160106)._METHOD_AND_APPARATUS_FOR_CONTROLLING_DROPLET_IN_EXTREME_ULTRAVIOLET_LIGHT_SOURCE_simplified_abstract&oldid=60133> [accessed 29 June 2024]
Chicago style
WikiPatents contributors, "Taiwan semiconductor manufacturing co., ltd. (20240160106). METHOD AND APPARATUS FOR CONTROLLING DROPLET IN EXTREME ULTRAVIOLET LIGHT SOURCE simplified abstract," WikiPatents, , http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_co.,_ltd._(20240160106)._METHOD_AND_APPARATUS_FOR_CONTROLLING_DROPLET_IN_EXTREME_ULTRAVIOLET_LIGHT_SOURCE_simplified_abstract&oldid=60133 (accessed June 29, 2024).
CBE/CSE style
WikiPatents contributors. Taiwan semiconductor manufacturing co., ltd. (20240160106). METHOD AND APPARATUS FOR CONTROLLING DROPLET IN EXTREME ULTRAVIOLET LIGHT SOURCE simplified abstract [Internet]. WikiPatents, ; 2024 May 24, 00:52 UTC [cited 2024 Jun 29]. Available from: http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_co.,_ltd._(20240160106)._METHOD_AND_APPARATUS_FOR_CONTROLLING_DROPLET_IN_EXTREME_ULTRAVIOLET_LIGHT_SOURCE_simplified_abstract&oldid=60133.
Bluebook style
Taiwan semiconductor manufacturing co., ltd. (20240160106). METHOD AND APPARATUS FOR CONTROLLING DROPLET IN EXTREME ULTRAVIOLET LIGHT SOURCE simplified abstract, http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_co.,_ltd._(20240160106)._METHOD_AND_APPARATUS_FOR_CONTROLLING_DROPLET_IN_EXTREME_ULTRAVIOLET_LIGHT_SOURCE_simplified_abstract&oldid=60133 (last visited June 29, 2024).
BibTeX entry
@misc{ wiki:xxx, author = "WikiPatents", title = "Taiwan semiconductor manufacturing co., ltd. (20240160106). METHOD AND APPARATUS FOR CONTROLLING DROPLET IN EXTREME ULTRAVIOLET LIGHT SOURCE simplified abstract --- WikiPatents{,} ", year = "2024", url = "http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_co.,_ltd._(20240160106)._METHOD_AND_APPARATUS_FOR_CONTROLLING_DROPLET_IN_EXTREME_ULTRAVIOLET_LIGHT_SOURCE_simplified_abstract&oldid=60133", note = "[Online; accessed 29-June-2024]" }
When using the LaTeX package url (\usepackage{url}
somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx, author = "WikiPatents", title = "Taiwan semiconductor manufacturing co., ltd. (20240160106). METHOD AND APPARATUS FOR CONTROLLING DROPLET IN EXTREME ULTRAVIOLET LIGHT SOURCE simplified abstract --- WikiPatents{,} ", year = "2024", url = "\url{http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_co.,_ltd._(20240160106)._METHOD_AND_APPARATUS_FOR_CONTROLLING_DROPLET_IN_EXTREME_ULTRAVIOLET_LIGHT_SOURCE_simplified_abstract&oldid=60133}", note = "[Online; accessed 29-June-2024]" }