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Bibliographic details for Samsung electronics co., ltd. (20240162014). PROCESS CHAMBER, SUBSTRATE TREATING APPARATUS INCLUDING THE SAME, AND OPERATING METHOD OF THE SUBSTRATE TREATING APPARATUS simplified abstract

Citation styles for Samsung electronics co., ltd. (20240162014). PROCESS CHAMBER, SUBSTRATE TREATING APPARATUS INCLUDING THE SAME, AND OPERATING METHOD OF THE SUBSTRATE TREATING APPARATUS simplified abstract

APA style

Samsung electronics co., ltd. (20240162014). PROCESS CHAMBER, SUBSTRATE TREATING APPARATUS INCLUDING THE SAME, AND OPERATING METHOD OF THE SUBSTRATE TREATING APPARATUS simplified abstract. (2024, May 23). WikiPatents, . Retrieved 22:02, July 1, 2024 from http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240162014)._PROCESS_CHAMBER,_SUBSTRATE_TREATING_APPARATUS_INCLUDING_THE_SAME,_AND_OPERATING_METHOD_OF_THE_SUBSTRATE_TREATING_APPARATUS_simplified_abstract&oldid=59579.

MLA style

"Samsung electronics co., ltd. (20240162014). PROCESS CHAMBER, SUBSTRATE TREATING APPARATUS INCLUDING THE SAME, AND OPERATING METHOD OF THE SUBSTRATE TREATING APPARATUS simplified abstract." WikiPatents, . 23 May 2024, 07:49 UTC. 1 Jul 2024, 22:02 <http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240162014)._PROCESS_CHAMBER,_SUBSTRATE_TREATING_APPARATUS_INCLUDING_THE_SAME,_AND_OPERATING_METHOD_OF_THE_SUBSTRATE_TREATING_APPARATUS_simplified_abstract&oldid=59579>.

MHRA style

WikiPatents contributors, 'Samsung electronics co., ltd. (20240162014). PROCESS CHAMBER, SUBSTRATE TREATING APPARATUS INCLUDING THE SAME, AND OPERATING METHOD OF THE SUBSTRATE TREATING APPARATUS simplified abstract', WikiPatents, , 23 May 2024, 07:49 UTC, <http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240162014)._PROCESS_CHAMBER,_SUBSTRATE_TREATING_APPARATUS_INCLUDING_THE_SAME,_AND_OPERATING_METHOD_OF_THE_SUBSTRATE_TREATING_APPARATUS_simplified_abstract&oldid=59579> [accessed 1 July 2024]

Chicago style

WikiPatents contributors, "Samsung electronics co., ltd. (20240162014). PROCESS CHAMBER, SUBSTRATE TREATING APPARATUS INCLUDING THE SAME, AND OPERATING METHOD OF THE SUBSTRATE TREATING APPARATUS simplified abstract," WikiPatents, , http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240162014)._PROCESS_CHAMBER,_SUBSTRATE_TREATING_APPARATUS_INCLUDING_THE_SAME,_AND_OPERATING_METHOD_OF_THE_SUBSTRATE_TREATING_APPARATUS_simplified_abstract&oldid=59579 (accessed July 1, 2024).

CBE/CSE style

WikiPatents contributors. Samsung electronics co., ltd. (20240162014). PROCESS CHAMBER, SUBSTRATE TREATING APPARATUS INCLUDING THE SAME, AND OPERATING METHOD OF THE SUBSTRATE TREATING APPARATUS simplified abstract [Internet]. WikiPatents, ; 2024 May 23, 07:49 UTC [cited 2024 Jul 1]. Available from: http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240162014)._PROCESS_CHAMBER,_SUBSTRATE_TREATING_APPARATUS_INCLUDING_THE_SAME,_AND_OPERATING_METHOD_OF_THE_SUBSTRATE_TREATING_APPARATUS_simplified_abstract&oldid=59579.

Bluebook style

Samsung electronics co., ltd. (20240162014). PROCESS CHAMBER, SUBSTRATE TREATING APPARATUS INCLUDING THE SAME, AND OPERATING METHOD OF THE SUBSTRATE TREATING APPARATUS simplified abstract, http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240162014)._PROCESS_CHAMBER,_SUBSTRATE_TREATING_APPARATUS_INCLUDING_THE_SAME,_AND_OPERATING_METHOD_OF_THE_SUBSTRATE_TREATING_APPARATUS_simplified_abstract&oldid=59579 (last visited July 1, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "Samsung electronics co., ltd. (20240162014). PROCESS CHAMBER, SUBSTRATE TREATING APPARATUS INCLUDING THE SAME, AND OPERATING METHOD OF THE SUBSTRATE TREATING APPARATUS simplified abstract --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240162014)._PROCESS_CHAMBER,_SUBSTRATE_TREATING_APPARATUS_INCLUDING_THE_SAME,_AND_OPERATING_METHOD_OF_THE_SUBSTRATE_TREATING_APPARATUS_simplified_abstract&oldid=59579",
   note = "[Online; accessed 1-July-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "Samsung electronics co., ltd. (20240162014). PROCESS CHAMBER, SUBSTRATE TREATING APPARATUS INCLUDING THE SAME, AND OPERATING METHOD OF THE SUBSTRATE TREATING APPARATUS simplified abstract --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240162014)._PROCESS_CHAMBER,_SUBSTRATE_TREATING_APPARATUS_INCLUDING_THE_SAME,_AND_OPERATING_METHOD_OF_THE_SUBSTRATE_TREATING_APPARATUS_simplified_abstract&oldid=59579}",
   note = "[Online; accessed 1-July-2024]"
 }


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