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Bibliographic details for 18379828. METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE INCLUDING DOUBLE PATTERNING PROCESS simplified abstract (Samsung Electronics Co., Ltd.)
- Page name: 18379828. METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE INCLUDING DOUBLE PATTERNING PROCESS simplified abstract (Samsung Electronics Co., Ltd.)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 26 April 2024 05:27 UTC
- Date retrieved: 28 June 2024 06:12 UTC
- Permanent URL: http://wikipatents.org/index.php?title=18379828._METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_INCLUDING_DOUBLE_PATTERNING_PROCESS_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=57627
- Page Version ID: 57627
Citation styles for 18379828. METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE INCLUDING DOUBLE PATTERNING PROCESS simplified abstract (Samsung Electronics Co., Ltd.)
APA style
18379828. METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE INCLUDING DOUBLE PATTERNING PROCESS simplified abstract (Samsung Electronics Co., Ltd.). (2024, April 26). WikiPatents, . Retrieved 06:12, June 28, 2024 from http://wikipatents.org/index.php?title=18379828._METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_INCLUDING_DOUBLE_PATTERNING_PROCESS_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=57627.
MLA style
"18379828. METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE INCLUDING DOUBLE PATTERNING PROCESS simplified abstract (Samsung Electronics Co., Ltd.)." WikiPatents, . 26 Apr 2024, 05:27 UTC. 28 Jun 2024, 06:12 <http://wikipatents.org/index.php?title=18379828._METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_INCLUDING_DOUBLE_PATTERNING_PROCESS_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=57627>.
MHRA style
WikiPatents contributors, '18379828. METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE INCLUDING DOUBLE PATTERNING PROCESS simplified abstract (Samsung Electronics Co., Ltd.)', WikiPatents, , 26 April 2024, 05:27 UTC, <http://wikipatents.org/index.php?title=18379828._METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_INCLUDING_DOUBLE_PATTERNING_PROCESS_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=57627> [accessed 28 June 2024]
Chicago style
WikiPatents contributors, "18379828. METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE INCLUDING DOUBLE PATTERNING PROCESS simplified abstract (Samsung Electronics Co., Ltd.)," WikiPatents, , http://wikipatents.org/index.php?title=18379828._METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_INCLUDING_DOUBLE_PATTERNING_PROCESS_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=57627 (accessed June 28, 2024).
CBE/CSE style
WikiPatents contributors. 18379828. METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE INCLUDING DOUBLE PATTERNING PROCESS simplified abstract (Samsung Electronics Co., Ltd.) [Internet]. WikiPatents, ; 2024 Apr 26, 05:27 UTC [cited 2024 Jun 28]. Available from: http://wikipatents.org/index.php?title=18379828._METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_INCLUDING_DOUBLE_PATTERNING_PROCESS_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=57627.
Bluebook style
18379828. METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE INCLUDING DOUBLE PATTERNING PROCESS simplified abstract (Samsung Electronics Co., Ltd.), http://wikipatents.org/index.php?title=18379828._METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_INCLUDING_DOUBLE_PATTERNING_PROCESS_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=57627 (last visited June 28, 2024).
BibTeX entry
@misc{ wiki:xxx, author = "WikiPatents", title = "18379828. METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE INCLUDING DOUBLE PATTERNING PROCESS simplified abstract (Samsung Electronics Co., Ltd.) --- WikiPatents{,} ", year = "2024", url = "http://wikipatents.org/index.php?title=18379828._METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_INCLUDING_DOUBLE_PATTERNING_PROCESS_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=57627", note = "[Online; accessed 28-June-2024]" }
When using the LaTeX package url (\usepackage{url}
somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx, author = "WikiPatents", title = "18379828. METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE INCLUDING DOUBLE PATTERNING PROCESS simplified abstract (Samsung Electronics Co., Ltd.) --- WikiPatents{,} ", year = "2024", url = "\url{http://wikipatents.org/index.php?title=18379828._METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_INCLUDING_DOUBLE_PATTERNING_PROCESS_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=57627}", note = "[Online; accessed 28-June-2024]" }