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Bibliographic details for 18484562. APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)

Citation styles for 18484562. APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)

APA style

18484562. APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.). (2024, April 26). WikiPatents, . Retrieved 12:11, June 26, 2024 from http://wikipatents.org/index.php?title=18484562._APPARATUS_FOR_MANUFACTURING_SEMICONDUCTOR_DEVICE_AND_METHOD_FOR_MANUFACTURING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=57074.

MLA style

"18484562. APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)." WikiPatents, . 26 Apr 2024, 04:28 UTC. 26 Jun 2024, 12:11 <http://wikipatents.org/index.php?title=18484562._APPARATUS_FOR_MANUFACTURING_SEMICONDUCTOR_DEVICE_AND_METHOD_FOR_MANUFACTURING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=57074>.

MHRA style

WikiPatents contributors, '18484562. APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)', WikiPatents, , 26 April 2024, 04:28 UTC, <http://wikipatents.org/index.php?title=18484562._APPARATUS_FOR_MANUFACTURING_SEMICONDUCTOR_DEVICE_AND_METHOD_FOR_MANUFACTURING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=57074> [accessed 26 June 2024]

Chicago style

WikiPatents contributors, "18484562. APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)," WikiPatents, , http://wikipatents.org/index.php?title=18484562._APPARATUS_FOR_MANUFACTURING_SEMICONDUCTOR_DEVICE_AND_METHOD_FOR_MANUFACTURING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=57074 (accessed June 26, 2024).

CBE/CSE style

WikiPatents contributors. 18484562. APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.) [Internet]. WikiPatents, ; 2024 Apr 26, 04:28 UTC [cited 2024 Jun 26]. Available from: http://wikipatents.org/index.php?title=18484562._APPARATUS_FOR_MANUFACTURING_SEMICONDUCTOR_DEVICE_AND_METHOD_FOR_MANUFACTURING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=57074.

Bluebook style

18484562. APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.), http://wikipatents.org/index.php?title=18484562._APPARATUS_FOR_MANUFACTURING_SEMICONDUCTOR_DEVICE_AND_METHOD_FOR_MANUFACTURING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=57074 (last visited June 26, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18484562. APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=18484562._APPARATUS_FOR_MANUFACTURING_SEMICONDUCTOR_DEVICE_AND_METHOD_FOR_MANUFACTURING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=57074",
   note = "[Online; accessed 26-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18484562. APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=18484562._APPARATUS_FOR_MANUFACTURING_SEMICONDUCTOR_DEVICE_AND_METHOD_FOR_MANUFACTURING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=57074}",
   note = "[Online; accessed 26-June-2024]"
 }


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