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Bibliographic details for 18227467. SEMICONDUCTOR MANUFACTURING APPARATUS, GAS SUPPLYING METHOD USING THE SAME, AND SEMICONDUCTOR MANUFACTURING METHOD USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)

Citation styles for 18227467. SEMICONDUCTOR MANUFACTURING APPARATUS, GAS SUPPLYING METHOD USING THE SAME, AND SEMICONDUCTOR MANUFACTURING METHOD USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)

APA style

18227467. SEMICONDUCTOR MANUFACTURING APPARATUS, GAS SUPPLYING METHOD USING THE SAME, AND SEMICONDUCTOR MANUFACTURING METHOD USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.). (2024, April 26). WikiPatents, . Retrieved 11:47, June 20, 2024 from http://wikipatents.org/index.php?title=18227467._SEMICONDUCTOR_MANUFACTURING_APPARATUS,_GAS_SUPPLYING_METHOD_USING_THE_SAME,_AND_SEMICONDUCTOR_MANUFACTURING_METHOD_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=56954.

MLA style

"18227467. SEMICONDUCTOR MANUFACTURING APPARATUS, GAS SUPPLYING METHOD USING THE SAME, AND SEMICONDUCTOR MANUFACTURING METHOD USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)." WikiPatents, . 26 Apr 2024, 04:20 UTC. 20 Jun 2024, 11:47 <http://wikipatents.org/index.php?title=18227467._SEMICONDUCTOR_MANUFACTURING_APPARATUS,_GAS_SUPPLYING_METHOD_USING_THE_SAME,_AND_SEMICONDUCTOR_MANUFACTURING_METHOD_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=56954>.

MHRA style

WikiPatents contributors, '18227467. SEMICONDUCTOR MANUFACTURING APPARATUS, GAS SUPPLYING METHOD USING THE SAME, AND SEMICONDUCTOR MANUFACTURING METHOD USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)', WikiPatents, , 26 April 2024, 04:20 UTC, <http://wikipatents.org/index.php?title=18227467._SEMICONDUCTOR_MANUFACTURING_APPARATUS,_GAS_SUPPLYING_METHOD_USING_THE_SAME,_AND_SEMICONDUCTOR_MANUFACTURING_METHOD_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=56954> [accessed 20 June 2024]

Chicago style

WikiPatents contributors, "18227467. SEMICONDUCTOR MANUFACTURING APPARATUS, GAS SUPPLYING METHOD USING THE SAME, AND SEMICONDUCTOR MANUFACTURING METHOD USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)," WikiPatents, , http://wikipatents.org/index.php?title=18227467._SEMICONDUCTOR_MANUFACTURING_APPARATUS,_GAS_SUPPLYING_METHOD_USING_THE_SAME,_AND_SEMICONDUCTOR_MANUFACTURING_METHOD_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=56954 (accessed June 20, 2024).

CBE/CSE style

WikiPatents contributors. 18227467. SEMICONDUCTOR MANUFACTURING APPARATUS, GAS SUPPLYING METHOD USING THE SAME, AND SEMICONDUCTOR MANUFACTURING METHOD USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.) [Internet]. WikiPatents, ; 2024 Apr 26, 04:20 UTC [cited 2024 Jun 20]. Available from: http://wikipatents.org/index.php?title=18227467._SEMICONDUCTOR_MANUFACTURING_APPARATUS,_GAS_SUPPLYING_METHOD_USING_THE_SAME,_AND_SEMICONDUCTOR_MANUFACTURING_METHOD_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=56954.

Bluebook style

18227467. SEMICONDUCTOR MANUFACTURING APPARATUS, GAS SUPPLYING METHOD USING THE SAME, AND SEMICONDUCTOR MANUFACTURING METHOD USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.), http://wikipatents.org/index.php?title=18227467._SEMICONDUCTOR_MANUFACTURING_APPARATUS,_GAS_SUPPLYING_METHOD_USING_THE_SAME,_AND_SEMICONDUCTOR_MANUFACTURING_METHOD_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=56954 (last visited June 20, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18227467. SEMICONDUCTOR MANUFACTURING APPARATUS, GAS SUPPLYING METHOD USING THE SAME, AND SEMICONDUCTOR MANUFACTURING METHOD USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=18227467._SEMICONDUCTOR_MANUFACTURING_APPARATUS,_GAS_SUPPLYING_METHOD_USING_THE_SAME,_AND_SEMICONDUCTOR_MANUFACTURING_METHOD_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=56954",
   note = "[Online; accessed 20-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18227467. SEMICONDUCTOR MANUFACTURING APPARATUS, GAS SUPPLYING METHOD USING THE SAME, AND SEMICONDUCTOR MANUFACTURING METHOD USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=18227467._SEMICONDUCTOR_MANUFACTURING_APPARATUS,_GAS_SUPPLYING_METHOD_USING_THE_SAME,_AND_SEMICONDUCTOR_MANUFACTURING_METHOD_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=56954}",
   note = "[Online; accessed 20-June-2024]"
 }


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