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Bibliographic details for Taiwan semiconductor manufacturing co., ltd. (20240128376). METHOD AND STRUCTURE FOR AIR GAP INNER SPACER IN GATE-ALL-AROUND DEVICES simplified abstract
- Page name: Taiwan semiconductor manufacturing co., ltd. (20240128376). METHOD AND STRUCTURE FOR AIR GAP INNER SPACER IN GATE-ALL-AROUND DEVICES simplified abstract
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 26 April 2024 04:08 UTC
- Date retrieved: 20 June 2024 04:53 UTC
- Permanent URL: http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_co.,_ltd._(20240128376)._METHOD_AND_STRUCTURE_FOR_AIR_GAP_INNER_SPACER_IN_GATE-ALL-AROUND_DEVICES_simplified_abstract&oldid=56759
- Page Version ID: 56759
Citation styles for Taiwan semiconductor manufacturing co., ltd. (20240128376). METHOD AND STRUCTURE FOR AIR GAP INNER SPACER IN GATE-ALL-AROUND DEVICES simplified abstract
APA style
Taiwan semiconductor manufacturing co., ltd. (20240128376). METHOD AND STRUCTURE FOR AIR GAP INNER SPACER IN GATE-ALL-AROUND DEVICES simplified abstract. (2024, April 26). WikiPatents, . Retrieved 04:53, June 20, 2024 from http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_co.,_ltd._(20240128376)._METHOD_AND_STRUCTURE_FOR_AIR_GAP_INNER_SPACER_IN_GATE-ALL-AROUND_DEVICES_simplified_abstract&oldid=56759.
MLA style
"Taiwan semiconductor manufacturing co., ltd. (20240128376). METHOD AND STRUCTURE FOR AIR GAP INNER SPACER IN GATE-ALL-AROUND DEVICES simplified abstract." WikiPatents, . 26 Apr 2024, 04:08 UTC. 20 Jun 2024, 04:53 <http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_co.,_ltd._(20240128376)._METHOD_AND_STRUCTURE_FOR_AIR_GAP_INNER_SPACER_IN_GATE-ALL-AROUND_DEVICES_simplified_abstract&oldid=56759>.
MHRA style
WikiPatents contributors, 'Taiwan semiconductor manufacturing co., ltd. (20240128376). METHOD AND STRUCTURE FOR AIR GAP INNER SPACER IN GATE-ALL-AROUND DEVICES simplified abstract', WikiPatents, , 26 April 2024, 04:08 UTC, <http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_co.,_ltd._(20240128376)._METHOD_AND_STRUCTURE_FOR_AIR_GAP_INNER_SPACER_IN_GATE-ALL-AROUND_DEVICES_simplified_abstract&oldid=56759> [accessed 20 June 2024]
Chicago style
WikiPatents contributors, "Taiwan semiconductor manufacturing co., ltd. (20240128376). METHOD AND STRUCTURE FOR AIR GAP INNER SPACER IN GATE-ALL-AROUND DEVICES simplified abstract," WikiPatents, , http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_co.,_ltd._(20240128376)._METHOD_AND_STRUCTURE_FOR_AIR_GAP_INNER_SPACER_IN_GATE-ALL-AROUND_DEVICES_simplified_abstract&oldid=56759 (accessed June 20, 2024).
CBE/CSE style
WikiPatents contributors. Taiwan semiconductor manufacturing co., ltd. (20240128376). METHOD AND STRUCTURE FOR AIR GAP INNER SPACER IN GATE-ALL-AROUND DEVICES simplified abstract [Internet]. WikiPatents, ; 2024 Apr 26, 04:08 UTC [cited 2024 Jun 20]. Available from: http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_co.,_ltd._(20240128376)._METHOD_AND_STRUCTURE_FOR_AIR_GAP_INNER_SPACER_IN_GATE-ALL-AROUND_DEVICES_simplified_abstract&oldid=56759.
Bluebook style
Taiwan semiconductor manufacturing co., ltd. (20240128376). METHOD AND STRUCTURE FOR AIR GAP INNER SPACER IN GATE-ALL-AROUND DEVICES simplified abstract, http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_co.,_ltd._(20240128376)._METHOD_AND_STRUCTURE_FOR_AIR_GAP_INNER_SPACER_IN_GATE-ALL-AROUND_DEVICES_simplified_abstract&oldid=56759 (last visited June 20, 2024).
BibTeX entry
@misc{ wiki:xxx, author = "WikiPatents", title = "Taiwan semiconductor manufacturing co., ltd. (20240128376). METHOD AND STRUCTURE FOR AIR GAP INNER SPACER IN GATE-ALL-AROUND DEVICES simplified abstract --- WikiPatents{,} ", year = "2024", url = "http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_co.,_ltd._(20240128376)._METHOD_AND_STRUCTURE_FOR_AIR_GAP_INNER_SPACER_IN_GATE-ALL-AROUND_DEVICES_simplified_abstract&oldid=56759", note = "[Online; accessed 20-June-2024]" }
When using the LaTeX package url (\usepackage{url}
somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx, author = "WikiPatents", title = "Taiwan semiconductor manufacturing co., ltd. (20240128376). METHOD AND STRUCTURE FOR AIR GAP INNER SPACER IN GATE-ALL-AROUND DEVICES simplified abstract --- WikiPatents{,} ", year = "2024", url = "\url{http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_co.,_ltd._(20240128376)._METHOD_AND_STRUCTURE_FOR_AIR_GAP_INNER_SPACER_IN_GATE-ALL-AROUND_DEVICES_simplified_abstract&oldid=56759}", note = "[Online; accessed 20-June-2024]" }