Cite This Page

Jump to navigation Jump to search

Bibliographic details for Taiwan semiconductor manufacturing co., ltd. (20240128376). METHOD AND STRUCTURE FOR AIR GAP INNER SPACER IN GATE-ALL-AROUND DEVICES simplified abstract

Citation styles for Taiwan semiconductor manufacturing co., ltd. (20240128376). METHOD AND STRUCTURE FOR AIR GAP INNER SPACER IN GATE-ALL-AROUND DEVICES simplified abstract

APA style

Taiwan semiconductor manufacturing co., ltd. (20240128376). METHOD AND STRUCTURE FOR AIR GAP INNER SPACER IN GATE-ALL-AROUND DEVICES simplified abstract. (2024, April 26). WikiPatents, . Retrieved 19:04, June 23, 2024 from http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_co.,_ltd._(20240128376)._METHOD_AND_STRUCTURE_FOR_AIR_GAP_INNER_SPACER_IN_GATE-ALL-AROUND_DEVICES_simplified_abstract&oldid=56759.

MLA style

"Taiwan semiconductor manufacturing co., ltd. (20240128376). METHOD AND STRUCTURE FOR AIR GAP INNER SPACER IN GATE-ALL-AROUND DEVICES simplified abstract." WikiPatents, . 26 Apr 2024, 04:08 UTC. 23 Jun 2024, 19:04 <http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_co.,_ltd._(20240128376)._METHOD_AND_STRUCTURE_FOR_AIR_GAP_INNER_SPACER_IN_GATE-ALL-AROUND_DEVICES_simplified_abstract&oldid=56759>.

MHRA style

WikiPatents contributors, 'Taiwan semiconductor manufacturing co., ltd. (20240128376). METHOD AND STRUCTURE FOR AIR GAP INNER SPACER IN GATE-ALL-AROUND DEVICES simplified abstract', WikiPatents, , 26 April 2024, 04:08 UTC, <http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_co.,_ltd._(20240128376)._METHOD_AND_STRUCTURE_FOR_AIR_GAP_INNER_SPACER_IN_GATE-ALL-AROUND_DEVICES_simplified_abstract&oldid=56759> [accessed 23 June 2024]

Chicago style

WikiPatents contributors, "Taiwan semiconductor manufacturing co., ltd. (20240128376). METHOD AND STRUCTURE FOR AIR GAP INNER SPACER IN GATE-ALL-AROUND DEVICES simplified abstract," WikiPatents, , http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_co.,_ltd._(20240128376)._METHOD_AND_STRUCTURE_FOR_AIR_GAP_INNER_SPACER_IN_GATE-ALL-AROUND_DEVICES_simplified_abstract&oldid=56759 (accessed June 23, 2024).

CBE/CSE style

WikiPatents contributors. Taiwan semiconductor manufacturing co., ltd. (20240128376). METHOD AND STRUCTURE FOR AIR GAP INNER SPACER IN GATE-ALL-AROUND DEVICES simplified abstract [Internet]. WikiPatents, ; 2024 Apr 26, 04:08 UTC [cited 2024 Jun 23]. Available from: http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_co.,_ltd._(20240128376)._METHOD_AND_STRUCTURE_FOR_AIR_GAP_INNER_SPACER_IN_GATE-ALL-AROUND_DEVICES_simplified_abstract&oldid=56759.

Bluebook style

Taiwan semiconductor manufacturing co., ltd. (20240128376). METHOD AND STRUCTURE FOR AIR GAP INNER SPACER IN GATE-ALL-AROUND DEVICES simplified abstract, http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_co.,_ltd._(20240128376)._METHOD_AND_STRUCTURE_FOR_AIR_GAP_INNER_SPACER_IN_GATE-ALL-AROUND_DEVICES_simplified_abstract&oldid=56759 (last visited June 23, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "Taiwan semiconductor manufacturing co., ltd. (20240128376). METHOD AND STRUCTURE FOR AIR GAP INNER SPACER IN GATE-ALL-AROUND DEVICES simplified abstract --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_co.,_ltd._(20240128376)._METHOD_AND_STRUCTURE_FOR_AIR_GAP_INNER_SPACER_IN_GATE-ALL-AROUND_DEVICES_simplified_abstract&oldid=56759",
   note = "[Online; accessed 23-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "Taiwan semiconductor manufacturing co., ltd. (20240128376). METHOD AND STRUCTURE FOR AIR GAP INNER SPACER IN GATE-ALL-AROUND DEVICES simplified abstract --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_co.,_ltd._(20240128376)._METHOD_AND_STRUCTURE_FOR_AIR_GAP_INNER_SPACER_IN_GATE-ALL-AROUND_DEVICES_simplified_abstract&oldid=56759}",
   note = "[Online; accessed 23-June-2024]"
 }


Retrieved from "http://wikipatents.org/index.php?title=Special:CiteThisPage"