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Bibliographic details for Samsung electronics co., ltd. (20240134290). MULTI-WAVELENGTH SELECTION METHOD FOR OVERLAY MEASUREMENT, AND OVERLAY MEASUREMENT METHOD AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD USING MULTI-WAVELENGTHS simplified abstract

Citation styles for Samsung electronics co., ltd. (20240134290). MULTI-WAVELENGTH SELECTION METHOD FOR OVERLAY MEASUREMENT, AND OVERLAY MEASUREMENT METHOD AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD USING MULTI-WAVELENGTHS simplified abstract

APA style

Samsung electronics co., ltd. (20240134290). MULTI-WAVELENGTH SELECTION METHOD FOR OVERLAY MEASUREMENT, AND OVERLAY MEASUREMENT METHOD AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD USING MULTI-WAVELENGTHS simplified abstract. (2024, April 26). WikiPatents, . Retrieved 03:17, June 26, 2024 from http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240134290)._MULTI-WAVELENGTH_SELECTION_METHOD_FOR_OVERLAY_MEASUREMENT,_AND_OVERLAY_MEASUREMENT_METHOD_AND_SEMICONDUCTOR_DEVICE_MANUFACTURING_METHOD_USING_MULTI-WAVELENGTHS_simplified_abstract&oldid=55263.

MLA style

"Samsung electronics co., ltd. (20240134290). MULTI-WAVELENGTH SELECTION METHOD FOR OVERLAY MEASUREMENT, AND OVERLAY MEASUREMENT METHOD AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD USING MULTI-WAVELENGTHS simplified abstract." WikiPatents, . 26 Apr 2024, 02:25 UTC. 26 Jun 2024, 03:17 <http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240134290)._MULTI-WAVELENGTH_SELECTION_METHOD_FOR_OVERLAY_MEASUREMENT,_AND_OVERLAY_MEASUREMENT_METHOD_AND_SEMICONDUCTOR_DEVICE_MANUFACTURING_METHOD_USING_MULTI-WAVELENGTHS_simplified_abstract&oldid=55263>.

MHRA style

WikiPatents contributors, 'Samsung electronics co., ltd. (20240134290). MULTI-WAVELENGTH SELECTION METHOD FOR OVERLAY MEASUREMENT, AND OVERLAY MEASUREMENT METHOD AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD USING MULTI-WAVELENGTHS simplified abstract', WikiPatents, , 26 April 2024, 02:25 UTC, <http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240134290)._MULTI-WAVELENGTH_SELECTION_METHOD_FOR_OVERLAY_MEASUREMENT,_AND_OVERLAY_MEASUREMENT_METHOD_AND_SEMICONDUCTOR_DEVICE_MANUFACTURING_METHOD_USING_MULTI-WAVELENGTHS_simplified_abstract&oldid=55263> [accessed 26 June 2024]

Chicago style

WikiPatents contributors, "Samsung electronics co., ltd. (20240134290). MULTI-WAVELENGTH SELECTION METHOD FOR OVERLAY MEASUREMENT, AND OVERLAY MEASUREMENT METHOD AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD USING MULTI-WAVELENGTHS simplified abstract," WikiPatents, , http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240134290)._MULTI-WAVELENGTH_SELECTION_METHOD_FOR_OVERLAY_MEASUREMENT,_AND_OVERLAY_MEASUREMENT_METHOD_AND_SEMICONDUCTOR_DEVICE_MANUFACTURING_METHOD_USING_MULTI-WAVELENGTHS_simplified_abstract&oldid=55263 (accessed June 26, 2024).

CBE/CSE style

WikiPatents contributors. Samsung electronics co., ltd. (20240134290). MULTI-WAVELENGTH SELECTION METHOD FOR OVERLAY MEASUREMENT, AND OVERLAY MEASUREMENT METHOD AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD USING MULTI-WAVELENGTHS simplified abstract [Internet]. WikiPatents, ; 2024 Apr 26, 02:25 UTC [cited 2024 Jun 26]. Available from: http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240134290)._MULTI-WAVELENGTH_SELECTION_METHOD_FOR_OVERLAY_MEASUREMENT,_AND_OVERLAY_MEASUREMENT_METHOD_AND_SEMICONDUCTOR_DEVICE_MANUFACTURING_METHOD_USING_MULTI-WAVELENGTHS_simplified_abstract&oldid=55263.

Bluebook style

Samsung electronics co., ltd. (20240134290). MULTI-WAVELENGTH SELECTION METHOD FOR OVERLAY MEASUREMENT, AND OVERLAY MEASUREMENT METHOD AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD USING MULTI-WAVELENGTHS simplified abstract, http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240134290)._MULTI-WAVELENGTH_SELECTION_METHOD_FOR_OVERLAY_MEASUREMENT,_AND_OVERLAY_MEASUREMENT_METHOD_AND_SEMICONDUCTOR_DEVICE_MANUFACTURING_METHOD_USING_MULTI-WAVELENGTHS_simplified_abstract&oldid=55263 (last visited June 26, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "Samsung electronics co., ltd. (20240134290). MULTI-WAVELENGTH SELECTION METHOD FOR OVERLAY MEASUREMENT, AND OVERLAY MEASUREMENT METHOD AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD USING MULTI-WAVELENGTHS simplified abstract --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240134290)._MULTI-WAVELENGTH_SELECTION_METHOD_FOR_OVERLAY_MEASUREMENT,_AND_OVERLAY_MEASUREMENT_METHOD_AND_SEMICONDUCTOR_DEVICE_MANUFACTURING_METHOD_USING_MULTI-WAVELENGTHS_simplified_abstract&oldid=55263",
   note = "[Online; accessed 26-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "Samsung electronics co., ltd. (20240134290). MULTI-WAVELENGTH SELECTION METHOD FOR OVERLAY MEASUREMENT, AND OVERLAY MEASUREMENT METHOD AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD USING MULTI-WAVELENGTHS simplified abstract --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240134290)._MULTI-WAVELENGTH_SELECTION_METHOD_FOR_OVERLAY_MEASUREMENT,_AND_OVERLAY_MEASUREMENT_METHOD_AND_SEMICONDUCTOR_DEVICE_MANUFACTURING_METHOD_USING_MULTI-WAVELENGTHS_simplified_abstract&oldid=55263}",
   note = "[Online; accessed 26-June-2024]"
 }


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