Cite This Page
Bibliographic details for Samsung electronics co., ltd. (20240134290). MULTI-WAVELENGTH SELECTION METHOD FOR OVERLAY MEASUREMENT, AND OVERLAY MEASUREMENT METHOD AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD USING MULTI-WAVELENGTHS simplified abstract
- Page name: Samsung electronics co., ltd. (20240134290). MULTI-WAVELENGTH SELECTION METHOD FOR OVERLAY MEASUREMENT, AND OVERLAY MEASUREMENT METHOD AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD USING MULTI-WAVELENGTHS simplified abstract
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 26 April 2024 02:25 UTC
- Date retrieved: 28 June 2024 23:47 UTC
- Permanent URL: http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240134290)._MULTI-WAVELENGTH_SELECTION_METHOD_FOR_OVERLAY_MEASUREMENT,_AND_OVERLAY_MEASUREMENT_METHOD_AND_SEMICONDUCTOR_DEVICE_MANUFACTURING_METHOD_USING_MULTI-WAVELENGTHS_simplified_abstract&oldid=55263
- Page Version ID: 55263
Citation styles for Samsung electronics co., ltd. (20240134290). MULTI-WAVELENGTH SELECTION METHOD FOR OVERLAY MEASUREMENT, AND OVERLAY MEASUREMENT METHOD AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD USING MULTI-WAVELENGTHS simplified abstract
APA style
Samsung electronics co., ltd. (20240134290). MULTI-WAVELENGTH SELECTION METHOD FOR OVERLAY MEASUREMENT, AND OVERLAY MEASUREMENT METHOD AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD USING MULTI-WAVELENGTHS simplified abstract. (2024, April 26). WikiPatents, . Retrieved 23:47, June 28, 2024 from http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240134290)._MULTI-WAVELENGTH_SELECTION_METHOD_FOR_OVERLAY_MEASUREMENT,_AND_OVERLAY_MEASUREMENT_METHOD_AND_SEMICONDUCTOR_DEVICE_MANUFACTURING_METHOD_USING_MULTI-WAVELENGTHS_simplified_abstract&oldid=55263.
MLA style
"Samsung electronics co., ltd. (20240134290). MULTI-WAVELENGTH SELECTION METHOD FOR OVERLAY MEASUREMENT, AND OVERLAY MEASUREMENT METHOD AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD USING MULTI-WAVELENGTHS simplified abstract." WikiPatents, . 26 Apr 2024, 02:25 UTC. 28 Jun 2024, 23:47 <http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240134290)._MULTI-WAVELENGTH_SELECTION_METHOD_FOR_OVERLAY_MEASUREMENT,_AND_OVERLAY_MEASUREMENT_METHOD_AND_SEMICONDUCTOR_DEVICE_MANUFACTURING_METHOD_USING_MULTI-WAVELENGTHS_simplified_abstract&oldid=55263>.
MHRA style
WikiPatents contributors, 'Samsung electronics co., ltd. (20240134290). MULTI-WAVELENGTH SELECTION METHOD FOR OVERLAY MEASUREMENT, AND OVERLAY MEASUREMENT METHOD AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD USING MULTI-WAVELENGTHS simplified abstract', WikiPatents, , 26 April 2024, 02:25 UTC, <http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240134290)._MULTI-WAVELENGTH_SELECTION_METHOD_FOR_OVERLAY_MEASUREMENT,_AND_OVERLAY_MEASUREMENT_METHOD_AND_SEMICONDUCTOR_DEVICE_MANUFACTURING_METHOD_USING_MULTI-WAVELENGTHS_simplified_abstract&oldid=55263> [accessed 28 June 2024]
Chicago style
WikiPatents contributors, "Samsung electronics co., ltd. (20240134290). MULTI-WAVELENGTH SELECTION METHOD FOR OVERLAY MEASUREMENT, AND OVERLAY MEASUREMENT METHOD AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD USING MULTI-WAVELENGTHS simplified abstract," WikiPatents, , http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240134290)._MULTI-WAVELENGTH_SELECTION_METHOD_FOR_OVERLAY_MEASUREMENT,_AND_OVERLAY_MEASUREMENT_METHOD_AND_SEMICONDUCTOR_DEVICE_MANUFACTURING_METHOD_USING_MULTI-WAVELENGTHS_simplified_abstract&oldid=55263 (accessed June 28, 2024).
CBE/CSE style
WikiPatents contributors. Samsung electronics co., ltd. (20240134290). MULTI-WAVELENGTH SELECTION METHOD FOR OVERLAY MEASUREMENT, AND OVERLAY MEASUREMENT METHOD AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD USING MULTI-WAVELENGTHS simplified abstract [Internet]. WikiPatents, ; 2024 Apr 26, 02:25 UTC [cited 2024 Jun 28]. Available from: http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240134290)._MULTI-WAVELENGTH_SELECTION_METHOD_FOR_OVERLAY_MEASUREMENT,_AND_OVERLAY_MEASUREMENT_METHOD_AND_SEMICONDUCTOR_DEVICE_MANUFACTURING_METHOD_USING_MULTI-WAVELENGTHS_simplified_abstract&oldid=55263.
Bluebook style
Samsung electronics co., ltd. (20240134290). MULTI-WAVELENGTH SELECTION METHOD FOR OVERLAY MEASUREMENT, AND OVERLAY MEASUREMENT METHOD AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD USING MULTI-WAVELENGTHS simplified abstract, http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240134290)._MULTI-WAVELENGTH_SELECTION_METHOD_FOR_OVERLAY_MEASUREMENT,_AND_OVERLAY_MEASUREMENT_METHOD_AND_SEMICONDUCTOR_DEVICE_MANUFACTURING_METHOD_USING_MULTI-WAVELENGTHS_simplified_abstract&oldid=55263 (last visited June 28, 2024).
BibTeX entry
@misc{ wiki:xxx, author = "WikiPatents", title = "Samsung electronics co., ltd. (20240134290). MULTI-WAVELENGTH SELECTION METHOD FOR OVERLAY MEASUREMENT, AND OVERLAY MEASUREMENT METHOD AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD USING MULTI-WAVELENGTHS simplified abstract --- WikiPatents{,} ", year = "2024", url = "http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240134290)._MULTI-WAVELENGTH_SELECTION_METHOD_FOR_OVERLAY_MEASUREMENT,_AND_OVERLAY_MEASUREMENT_METHOD_AND_SEMICONDUCTOR_DEVICE_MANUFACTURING_METHOD_USING_MULTI-WAVELENGTHS_simplified_abstract&oldid=55263", note = "[Online; accessed 28-June-2024]" }
When using the LaTeX package url (\usepackage{url}
somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx, author = "WikiPatents", title = "Samsung electronics co., ltd. (20240134290). MULTI-WAVELENGTH SELECTION METHOD FOR OVERLAY MEASUREMENT, AND OVERLAY MEASUREMENT METHOD AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD USING MULTI-WAVELENGTHS simplified abstract --- WikiPatents{,} ", year = "2024", url = "\url{http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240134290)._MULTI-WAVELENGTH_SELECTION_METHOD_FOR_OVERLAY_MEASUREMENT,_AND_OVERLAY_MEASUREMENT_METHOD_AND_SEMICONDUCTOR_DEVICE_MANUFACTURING_METHOD_USING_MULTI-WAVELENGTHS_simplified_abstract&oldid=55263}", note = "[Online; accessed 28-June-2024]" }