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Bibliographic details for Samsung electronics co., ltd. (20240128109). APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract

Citation styles for Samsung electronics co., ltd. (20240128109). APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract

APA style

Samsung electronics co., ltd. (20240128109). APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract. (2024, April 20). WikiPatents, . Retrieved 08:24, June 17, 2024 from http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240128109)._APPARATUS_FOR_MANUFACTURING_SEMICONDUCTOR_DEVICE_AND_METHOD_FOR_MANUFACTURING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract&oldid=54956.

MLA style

"Samsung electronics co., ltd. (20240128109). APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract." WikiPatents, . 20 Apr 2024, 16:46 UTC. 17 Jun 2024, 08:24 <http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240128109)._APPARATUS_FOR_MANUFACTURING_SEMICONDUCTOR_DEVICE_AND_METHOD_FOR_MANUFACTURING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract&oldid=54956>.

MHRA style

WikiPatents contributors, 'Samsung electronics co., ltd. (20240128109). APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract', WikiPatents, , 20 April 2024, 16:46 UTC, <http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240128109)._APPARATUS_FOR_MANUFACTURING_SEMICONDUCTOR_DEVICE_AND_METHOD_FOR_MANUFACTURING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract&oldid=54956> [accessed 17 June 2024]

Chicago style

WikiPatents contributors, "Samsung electronics co., ltd. (20240128109). APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract," WikiPatents, , http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240128109)._APPARATUS_FOR_MANUFACTURING_SEMICONDUCTOR_DEVICE_AND_METHOD_FOR_MANUFACTURING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract&oldid=54956 (accessed June 17, 2024).

CBE/CSE style

WikiPatents contributors. Samsung electronics co., ltd. (20240128109). APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract [Internet]. WikiPatents, ; 2024 Apr 20, 16:46 UTC [cited 2024 Jun 17]. Available from: http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240128109)._APPARATUS_FOR_MANUFACTURING_SEMICONDUCTOR_DEVICE_AND_METHOD_FOR_MANUFACTURING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract&oldid=54956.

Bluebook style

Samsung electronics co., ltd. (20240128109). APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract, http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240128109)._APPARATUS_FOR_MANUFACTURING_SEMICONDUCTOR_DEVICE_AND_METHOD_FOR_MANUFACTURING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract&oldid=54956 (last visited June 17, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "Samsung electronics co., ltd. (20240128109). APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240128109)._APPARATUS_FOR_MANUFACTURING_SEMICONDUCTOR_DEVICE_AND_METHOD_FOR_MANUFACTURING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract&oldid=54956",
   note = "[Online; accessed 17-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "Samsung electronics co., ltd. (20240128109). APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240128109)._APPARATUS_FOR_MANUFACTURING_SEMICONDUCTOR_DEVICE_AND_METHOD_FOR_MANUFACTURING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract&oldid=54956}",
   note = "[Online; accessed 17-June-2024]"
 }


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