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Bibliographic details for Samsung electronics co., ltd. (20240128102). APPARATUS AND METHOD MONITORING SEMICONDUCTOR MANUFACTURING EQUIPMENT simplified abstract

Citation styles for Samsung electronics co., ltd. (20240128102). APPARATUS AND METHOD MONITORING SEMICONDUCTOR MANUFACTURING EQUIPMENT simplified abstract

APA style

Samsung electronics co., ltd. (20240128102). APPARATUS AND METHOD MONITORING SEMICONDUCTOR MANUFACTURING EQUIPMENT simplified abstract. (2024, April 20). WikiPatents, . Retrieved 13:00, June 26, 2024 from http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240128102)._APPARATUS_AND_METHOD_MONITORING_SEMICONDUCTOR_MANUFACTURING_EQUIPMENT_simplified_abstract&oldid=54952.

MLA style

"Samsung electronics co., ltd. (20240128102). APPARATUS AND METHOD MONITORING SEMICONDUCTOR MANUFACTURING EQUIPMENT simplified abstract." WikiPatents, . 20 Apr 2024, 16:46 UTC. 26 Jun 2024, 13:00 <http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240128102)._APPARATUS_AND_METHOD_MONITORING_SEMICONDUCTOR_MANUFACTURING_EQUIPMENT_simplified_abstract&oldid=54952>.

MHRA style

WikiPatents contributors, 'Samsung electronics co., ltd. (20240128102). APPARATUS AND METHOD MONITORING SEMICONDUCTOR MANUFACTURING EQUIPMENT simplified abstract', WikiPatents, , 20 April 2024, 16:46 UTC, <http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240128102)._APPARATUS_AND_METHOD_MONITORING_SEMICONDUCTOR_MANUFACTURING_EQUIPMENT_simplified_abstract&oldid=54952> [accessed 26 June 2024]

Chicago style

WikiPatents contributors, "Samsung electronics co., ltd. (20240128102). APPARATUS AND METHOD MONITORING SEMICONDUCTOR MANUFACTURING EQUIPMENT simplified abstract," WikiPatents, , http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240128102)._APPARATUS_AND_METHOD_MONITORING_SEMICONDUCTOR_MANUFACTURING_EQUIPMENT_simplified_abstract&oldid=54952 (accessed June 26, 2024).

CBE/CSE style

WikiPatents contributors. Samsung electronics co., ltd. (20240128102). APPARATUS AND METHOD MONITORING SEMICONDUCTOR MANUFACTURING EQUIPMENT simplified abstract [Internet]. WikiPatents, ; 2024 Apr 20, 16:46 UTC [cited 2024 Jun 26]. Available from: http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240128102)._APPARATUS_AND_METHOD_MONITORING_SEMICONDUCTOR_MANUFACTURING_EQUIPMENT_simplified_abstract&oldid=54952.

Bluebook style

Samsung electronics co., ltd. (20240128102). APPARATUS AND METHOD MONITORING SEMICONDUCTOR MANUFACTURING EQUIPMENT simplified abstract, http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240128102)._APPARATUS_AND_METHOD_MONITORING_SEMICONDUCTOR_MANUFACTURING_EQUIPMENT_simplified_abstract&oldid=54952 (last visited June 26, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "Samsung electronics co., ltd. (20240128102). APPARATUS AND METHOD MONITORING SEMICONDUCTOR MANUFACTURING EQUIPMENT simplified abstract --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240128102)._APPARATUS_AND_METHOD_MONITORING_SEMICONDUCTOR_MANUFACTURING_EQUIPMENT_simplified_abstract&oldid=54952",
   note = "[Online; accessed 26-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "Samsung electronics co., ltd. (20240128102). APPARATUS AND METHOD MONITORING SEMICONDUCTOR MANUFACTURING EQUIPMENT simplified abstract --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240128102)._APPARATUS_AND_METHOD_MONITORING_SEMICONDUCTOR_MANUFACTURING_EQUIPMENT_simplified_abstract&oldid=54952}",
   note = "[Online; accessed 26-June-2024]"
 }


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