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Bibliographic details for 18273446. APPARATUS FOR TRANSFERRING SUBSTRATE, SUBSTRATE PROCESSING SYSTEM AND METHOD OF PROCESSING SUBSTRATE simplified abstract (Tokyo Electron Limited)
- Page name: 18273446. APPARATUS FOR TRANSFERRING SUBSTRATE, SUBSTRATE PROCESSING SYSTEM AND METHOD OF PROCESSING SUBSTRATE simplified abstract (Tokyo Electron Limited)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 16 April 2024 03:43 UTC
- Date retrieved: 26 June 2024 12:08 UTC
- Permanent URL: http://wikipatents.org/index.php?title=18273446._APPARATUS_FOR_TRANSFERRING_SUBSTRATE,_SUBSTRATE_PROCESSING_SYSTEM_AND_METHOD_OF_PROCESSING_SUBSTRATE_simplified_abstract_(Tokyo_Electron_Limited)&oldid=53857
- Page Version ID: 53857
Citation styles for 18273446. APPARATUS FOR TRANSFERRING SUBSTRATE, SUBSTRATE PROCESSING SYSTEM AND METHOD OF PROCESSING SUBSTRATE simplified abstract (Tokyo Electron Limited)
APA style
18273446. APPARATUS FOR TRANSFERRING SUBSTRATE, SUBSTRATE PROCESSING SYSTEM AND METHOD OF PROCESSING SUBSTRATE simplified abstract (Tokyo Electron Limited). (2024, April 16). WikiPatents, . Retrieved 12:08, June 26, 2024 from http://wikipatents.org/index.php?title=18273446._APPARATUS_FOR_TRANSFERRING_SUBSTRATE,_SUBSTRATE_PROCESSING_SYSTEM_AND_METHOD_OF_PROCESSING_SUBSTRATE_simplified_abstract_(Tokyo_Electron_Limited)&oldid=53857.
MLA style
"18273446. APPARATUS FOR TRANSFERRING SUBSTRATE, SUBSTRATE PROCESSING SYSTEM AND METHOD OF PROCESSING SUBSTRATE simplified abstract (Tokyo Electron Limited)." WikiPatents, . 16 Apr 2024, 03:43 UTC. 26 Jun 2024, 12:08 <http://wikipatents.org/index.php?title=18273446._APPARATUS_FOR_TRANSFERRING_SUBSTRATE,_SUBSTRATE_PROCESSING_SYSTEM_AND_METHOD_OF_PROCESSING_SUBSTRATE_simplified_abstract_(Tokyo_Electron_Limited)&oldid=53857>.
MHRA style
WikiPatents contributors, '18273446. APPARATUS FOR TRANSFERRING SUBSTRATE, SUBSTRATE PROCESSING SYSTEM AND METHOD OF PROCESSING SUBSTRATE simplified abstract (Tokyo Electron Limited)', WikiPatents, , 16 April 2024, 03:43 UTC, <http://wikipatents.org/index.php?title=18273446._APPARATUS_FOR_TRANSFERRING_SUBSTRATE,_SUBSTRATE_PROCESSING_SYSTEM_AND_METHOD_OF_PROCESSING_SUBSTRATE_simplified_abstract_(Tokyo_Electron_Limited)&oldid=53857> [accessed 26 June 2024]
Chicago style
WikiPatents contributors, "18273446. APPARATUS FOR TRANSFERRING SUBSTRATE, SUBSTRATE PROCESSING SYSTEM AND METHOD OF PROCESSING SUBSTRATE simplified abstract (Tokyo Electron Limited)," WikiPatents, , http://wikipatents.org/index.php?title=18273446._APPARATUS_FOR_TRANSFERRING_SUBSTRATE,_SUBSTRATE_PROCESSING_SYSTEM_AND_METHOD_OF_PROCESSING_SUBSTRATE_simplified_abstract_(Tokyo_Electron_Limited)&oldid=53857 (accessed June 26, 2024).
CBE/CSE style
WikiPatents contributors. 18273446. APPARATUS FOR TRANSFERRING SUBSTRATE, SUBSTRATE PROCESSING SYSTEM AND METHOD OF PROCESSING SUBSTRATE simplified abstract (Tokyo Electron Limited) [Internet]. WikiPatents, ; 2024 Apr 16, 03:43 UTC [cited 2024 Jun 26]. Available from: http://wikipatents.org/index.php?title=18273446._APPARATUS_FOR_TRANSFERRING_SUBSTRATE,_SUBSTRATE_PROCESSING_SYSTEM_AND_METHOD_OF_PROCESSING_SUBSTRATE_simplified_abstract_(Tokyo_Electron_Limited)&oldid=53857.
Bluebook style
18273446. APPARATUS FOR TRANSFERRING SUBSTRATE, SUBSTRATE PROCESSING SYSTEM AND METHOD OF PROCESSING SUBSTRATE simplified abstract (Tokyo Electron Limited), http://wikipatents.org/index.php?title=18273446._APPARATUS_FOR_TRANSFERRING_SUBSTRATE,_SUBSTRATE_PROCESSING_SYSTEM_AND_METHOD_OF_PROCESSING_SUBSTRATE_simplified_abstract_(Tokyo_Electron_Limited)&oldid=53857 (last visited June 26, 2024).
BibTeX entry
@misc{ wiki:xxx,
author = "WikiPatents",
title = "18273446. APPARATUS FOR TRANSFERRING SUBSTRATE, SUBSTRATE PROCESSING SYSTEM AND METHOD OF PROCESSING SUBSTRATE simplified abstract (Tokyo Electron Limited) --- WikiPatents{,} ",
year = "2024",
url = "http://wikipatents.org/index.php?title=18273446._APPARATUS_FOR_TRANSFERRING_SUBSTRATE,_SUBSTRATE_PROCESSING_SYSTEM_AND_METHOD_OF_PROCESSING_SUBSTRATE_simplified_abstract_(Tokyo_Electron_Limited)&oldid=53857",
note = "[Online; accessed 26-June-2024]"
}
When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx,
author = "WikiPatents",
title = "18273446. APPARATUS FOR TRANSFERRING SUBSTRATE, SUBSTRATE PROCESSING SYSTEM AND METHOD OF PROCESSING SUBSTRATE simplified abstract (Tokyo Electron Limited) --- WikiPatents{,} ",
year = "2024",
url = "\url{http://wikipatents.org/index.php?title=18273446._APPARATUS_FOR_TRANSFERRING_SUBSTRATE,_SUBSTRATE_PROCESSING_SYSTEM_AND_METHOD_OF_PROCESSING_SUBSTRATE_simplified_abstract_(Tokyo_Electron_Limited)&oldid=53857}",
note = "[Online; accessed 26-June-2024]"
}
