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Bibliographic details for 18473459. SUBSTRATE TREATMENT METHOD, SUBSTRATE TREATMENT APPARATUS, AND COMPUTER STORAGE MEDIUM simplified abstract (Tokyo Electron Limited)
- Page name: 18473459. SUBSTRATE TREATMENT METHOD, SUBSTRATE TREATMENT APPARATUS, AND COMPUTER STORAGE MEDIUM simplified abstract (Tokyo Electron Limited)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 16 April 2024 03:43 UTC
- Date retrieved: 26 June 2024 11:48 UTC
- Permanent URL: http://wikipatents.org/index.php?title=18473459._SUBSTRATE_TREATMENT_METHOD,_SUBSTRATE_TREATMENT_APPARATUS,_AND_COMPUTER_STORAGE_MEDIUM_simplified_abstract_(Tokyo_Electron_Limited)&oldid=53855
- Page Version ID: 53855
Citation styles for 18473459. SUBSTRATE TREATMENT METHOD, SUBSTRATE TREATMENT APPARATUS, AND COMPUTER STORAGE MEDIUM simplified abstract (Tokyo Electron Limited)
APA style
18473459. SUBSTRATE TREATMENT METHOD, SUBSTRATE TREATMENT APPARATUS, AND COMPUTER STORAGE MEDIUM simplified abstract (Tokyo Electron Limited). (2024, April 16). WikiPatents, . Retrieved 11:48, June 26, 2024 from http://wikipatents.org/index.php?title=18473459._SUBSTRATE_TREATMENT_METHOD,_SUBSTRATE_TREATMENT_APPARATUS,_AND_COMPUTER_STORAGE_MEDIUM_simplified_abstract_(Tokyo_Electron_Limited)&oldid=53855.
MLA style
"18473459. SUBSTRATE TREATMENT METHOD, SUBSTRATE TREATMENT APPARATUS, AND COMPUTER STORAGE MEDIUM simplified abstract (Tokyo Electron Limited)." WikiPatents, . 16 Apr 2024, 03:43 UTC. 26 Jun 2024, 11:48 <http://wikipatents.org/index.php?title=18473459._SUBSTRATE_TREATMENT_METHOD,_SUBSTRATE_TREATMENT_APPARATUS,_AND_COMPUTER_STORAGE_MEDIUM_simplified_abstract_(Tokyo_Electron_Limited)&oldid=53855>.
MHRA style
WikiPatents contributors, '18473459. SUBSTRATE TREATMENT METHOD, SUBSTRATE TREATMENT APPARATUS, AND COMPUTER STORAGE MEDIUM simplified abstract (Tokyo Electron Limited)', WikiPatents, , 16 April 2024, 03:43 UTC, <http://wikipatents.org/index.php?title=18473459._SUBSTRATE_TREATMENT_METHOD,_SUBSTRATE_TREATMENT_APPARATUS,_AND_COMPUTER_STORAGE_MEDIUM_simplified_abstract_(Tokyo_Electron_Limited)&oldid=53855> [accessed 26 June 2024]
Chicago style
WikiPatents contributors, "18473459. SUBSTRATE TREATMENT METHOD, SUBSTRATE TREATMENT APPARATUS, AND COMPUTER STORAGE MEDIUM simplified abstract (Tokyo Electron Limited)," WikiPatents, , http://wikipatents.org/index.php?title=18473459._SUBSTRATE_TREATMENT_METHOD,_SUBSTRATE_TREATMENT_APPARATUS,_AND_COMPUTER_STORAGE_MEDIUM_simplified_abstract_(Tokyo_Electron_Limited)&oldid=53855 (accessed June 26, 2024).
CBE/CSE style
WikiPatents contributors. 18473459. SUBSTRATE TREATMENT METHOD, SUBSTRATE TREATMENT APPARATUS, AND COMPUTER STORAGE MEDIUM simplified abstract (Tokyo Electron Limited) [Internet]. WikiPatents, ; 2024 Apr 16, 03:43 UTC [cited 2024 Jun 26]. Available from: http://wikipatents.org/index.php?title=18473459._SUBSTRATE_TREATMENT_METHOD,_SUBSTRATE_TREATMENT_APPARATUS,_AND_COMPUTER_STORAGE_MEDIUM_simplified_abstract_(Tokyo_Electron_Limited)&oldid=53855.
Bluebook style
18473459. SUBSTRATE TREATMENT METHOD, SUBSTRATE TREATMENT APPARATUS, AND COMPUTER STORAGE MEDIUM simplified abstract (Tokyo Electron Limited), http://wikipatents.org/index.php?title=18473459._SUBSTRATE_TREATMENT_METHOD,_SUBSTRATE_TREATMENT_APPARATUS,_AND_COMPUTER_STORAGE_MEDIUM_simplified_abstract_(Tokyo_Electron_Limited)&oldid=53855 (last visited June 26, 2024).
BibTeX entry
@misc{ wiki:xxx,
author = "WikiPatents",
title = "18473459. SUBSTRATE TREATMENT METHOD, SUBSTRATE TREATMENT APPARATUS, AND COMPUTER STORAGE MEDIUM simplified abstract (Tokyo Electron Limited) --- WikiPatents{,} ",
year = "2024",
url = "http://wikipatents.org/index.php?title=18473459._SUBSTRATE_TREATMENT_METHOD,_SUBSTRATE_TREATMENT_APPARATUS,_AND_COMPUTER_STORAGE_MEDIUM_simplified_abstract_(Tokyo_Electron_Limited)&oldid=53855",
note = "[Online; accessed 26-June-2024]"
}
When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx,
author = "WikiPatents",
title = "18473459. SUBSTRATE TREATMENT METHOD, SUBSTRATE TREATMENT APPARATUS, AND COMPUTER STORAGE MEDIUM simplified abstract (Tokyo Electron Limited) --- WikiPatents{,} ",
year = "2024",
url = "\url{http://wikipatents.org/index.php?title=18473459._SUBSTRATE_TREATMENT_METHOD,_SUBSTRATE_TREATMENT_APPARATUS,_AND_COMPUTER_STORAGE_MEDIUM_simplified_abstract_(Tokyo_Electron_Limited)&oldid=53855}",
note = "[Online; accessed 26-June-2024]"
}
