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Bibliographic details for 17961601. SUBSTRATE PROCESSING APPARATUS AND CONTROL METHOD FOR A SUBSTRATE PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited)

Citation styles for 17961601. SUBSTRATE PROCESSING APPARATUS AND CONTROL METHOD FOR A SUBSTRATE PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited)

APA style

17961601. SUBSTRATE PROCESSING APPARATUS AND CONTROL METHOD FOR A SUBSTRATE PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited). (2024, April 16). WikiPatents, . Retrieved 02:54, June 27, 2024 from http://wikipatents.org/index.php?title=17961601._SUBSTRATE_PROCESSING_APPARATUS_AND_CONTROL_METHOD_FOR_A_SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=53853.

MLA style

"17961601. SUBSTRATE PROCESSING APPARATUS AND CONTROL METHOD FOR A SUBSTRATE PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited)." WikiPatents, . 16 Apr 2024, 03:43 UTC. 27 Jun 2024, 02:54 <http://wikipatents.org/index.php?title=17961601._SUBSTRATE_PROCESSING_APPARATUS_AND_CONTROL_METHOD_FOR_A_SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=53853>.

MHRA style

WikiPatents contributors, '17961601. SUBSTRATE PROCESSING APPARATUS AND CONTROL METHOD FOR A SUBSTRATE PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited)', WikiPatents, , 16 April 2024, 03:43 UTC, <http://wikipatents.org/index.php?title=17961601._SUBSTRATE_PROCESSING_APPARATUS_AND_CONTROL_METHOD_FOR_A_SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=53853> [accessed 27 June 2024]

Chicago style

WikiPatents contributors, "17961601. SUBSTRATE PROCESSING APPARATUS AND CONTROL METHOD FOR A SUBSTRATE PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited)," WikiPatents, , http://wikipatents.org/index.php?title=17961601._SUBSTRATE_PROCESSING_APPARATUS_AND_CONTROL_METHOD_FOR_A_SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=53853 (accessed June 27, 2024).

CBE/CSE style

WikiPatents contributors. 17961601. SUBSTRATE PROCESSING APPARATUS AND CONTROL METHOD FOR A SUBSTRATE PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited) [Internet]. WikiPatents, ; 2024 Apr 16, 03:43 UTC [cited 2024 Jun 27]. Available from: http://wikipatents.org/index.php?title=17961601._SUBSTRATE_PROCESSING_APPARATUS_AND_CONTROL_METHOD_FOR_A_SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=53853.

Bluebook style

17961601. SUBSTRATE PROCESSING APPARATUS AND CONTROL METHOD FOR A SUBSTRATE PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited), http://wikipatents.org/index.php?title=17961601._SUBSTRATE_PROCESSING_APPARATUS_AND_CONTROL_METHOD_FOR_A_SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=53853 (last visited June 27, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "17961601. SUBSTRATE PROCESSING APPARATUS AND CONTROL METHOD FOR A SUBSTRATE PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=17961601._SUBSTRATE_PROCESSING_APPARATUS_AND_CONTROL_METHOD_FOR_A_SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=53853",
   note = "[Online; accessed 27-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "17961601. SUBSTRATE PROCESSING APPARATUS AND CONTROL METHOD FOR A SUBSTRATE PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=17961601._SUBSTRATE_PROCESSING_APPARATUS_AND_CONTROL_METHOD_FOR_A_SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=53853}",
   note = "[Online; accessed 27-June-2024]"
 }


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