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Bibliographic details for 18263920. SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited)
- Page name: 18263920. SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 16 April 2024 03:42 UTC
- Date retrieved: 24 June 2024 11:43 UTC
- Permanent URL: http://wikipatents.org/index.php?title=18263920._SUBSTRATE_PROCESSING_METHOD_AND_SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=53845
- Page Version ID: 53845
Citation styles for 18263920. SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited)
APA style
18263920. SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited). (2024, April 16). WikiPatents, . Retrieved 11:43, June 24, 2024 from http://wikipatents.org/index.php?title=18263920._SUBSTRATE_PROCESSING_METHOD_AND_SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=53845.
MLA style
"18263920. SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited)." WikiPatents, . 16 Apr 2024, 03:42 UTC. 24 Jun 2024, 11:43 <http://wikipatents.org/index.php?title=18263920._SUBSTRATE_PROCESSING_METHOD_AND_SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=53845>.
MHRA style
WikiPatents contributors, '18263920. SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited)', WikiPatents, , 16 April 2024, 03:42 UTC, <http://wikipatents.org/index.php?title=18263920._SUBSTRATE_PROCESSING_METHOD_AND_SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=53845> [accessed 24 June 2024]
Chicago style
WikiPatents contributors, "18263920. SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited)," WikiPatents, , http://wikipatents.org/index.php?title=18263920._SUBSTRATE_PROCESSING_METHOD_AND_SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=53845 (accessed June 24, 2024).
CBE/CSE style
WikiPatents contributors. 18263920. SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited) [Internet]. WikiPatents, ; 2024 Apr 16, 03:42 UTC [cited 2024 Jun 24]. Available from: http://wikipatents.org/index.php?title=18263920._SUBSTRATE_PROCESSING_METHOD_AND_SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=53845.
Bluebook style
18263920. SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited), http://wikipatents.org/index.php?title=18263920._SUBSTRATE_PROCESSING_METHOD_AND_SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=53845 (last visited June 24, 2024).
BibTeX entry
@misc{ wiki:xxx,
author = "WikiPatents",
title = "18263920. SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited) --- WikiPatents{,} ",
year = "2024",
url = "http://wikipatents.org/index.php?title=18263920._SUBSTRATE_PROCESSING_METHOD_AND_SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=53845",
note = "[Online; accessed 24-June-2024]"
}
When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx,
author = "WikiPatents",
title = "18263920. SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited) --- WikiPatents{,} ",
year = "2024",
url = "\url{http://wikipatents.org/index.php?title=18263920._SUBSTRATE_PROCESSING_METHOD_AND_SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=53845}",
note = "[Online; accessed 24-June-2024]"
}
