Cite This Page
Bibliographic details for 18477047. PLACING TABLE AND SUBSTRATE PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited)
- Page name: 18477047. PLACING TABLE AND SUBSTRATE PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 16 April 2024 03:42 UTC
- Date retrieved: 17 June 2024 10:03 UTC
- Permanent URL: http://wikipatents.org/index.php?title=18477047._PLACING_TABLE_AND_SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=53842
- Page Version ID: 53842
Citation styles for 18477047. PLACING TABLE AND SUBSTRATE PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited)
APA style
18477047. PLACING TABLE AND SUBSTRATE PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited). (2024, April 16). WikiPatents, . Retrieved 10:03, June 17, 2024 from http://wikipatents.org/index.php?title=18477047._PLACING_TABLE_AND_SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=53842.
MLA style
"18477047. PLACING TABLE AND SUBSTRATE PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited)." WikiPatents, . 16 Apr 2024, 03:42 UTC. 17 Jun 2024, 10:03 <http://wikipatents.org/index.php?title=18477047._PLACING_TABLE_AND_SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=53842>.
MHRA style
WikiPatents contributors, '18477047. PLACING TABLE AND SUBSTRATE PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited)', WikiPatents, , 16 April 2024, 03:42 UTC, <http://wikipatents.org/index.php?title=18477047._PLACING_TABLE_AND_SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=53842> [accessed 17 June 2024]
Chicago style
WikiPatents contributors, "18477047. PLACING TABLE AND SUBSTRATE PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited)," WikiPatents, , http://wikipatents.org/index.php?title=18477047._PLACING_TABLE_AND_SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=53842 (accessed June 17, 2024).
CBE/CSE style
WikiPatents contributors. 18477047. PLACING TABLE AND SUBSTRATE PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited) [Internet]. WikiPatents, ; 2024 Apr 16, 03:42 UTC [cited 2024 Jun 17]. Available from: http://wikipatents.org/index.php?title=18477047._PLACING_TABLE_AND_SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=53842.
Bluebook style
18477047. PLACING TABLE AND SUBSTRATE PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited), http://wikipatents.org/index.php?title=18477047._PLACING_TABLE_AND_SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=53842 (last visited June 17, 2024).
BibTeX entry
@misc{ wiki:xxx,
author = "WikiPatents",
title = "18477047. PLACING TABLE AND SUBSTRATE PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited) --- WikiPatents{,} ",
year = "2024",
url = "http://wikipatents.org/index.php?title=18477047._PLACING_TABLE_AND_SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=53842",
note = "[Online; accessed 17-June-2024]"
}
When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx,
author = "WikiPatents",
title = "18477047. PLACING TABLE AND SUBSTRATE PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited) --- WikiPatents{,} ",
year = "2024",
url = "\url{http://wikipatents.org/index.php?title=18477047._PLACING_TABLE_AND_SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=53842}",
note = "[Online; accessed 17-June-2024]"
}
